Method and apparatus for measuring wavelength jitter of light signal

Information

  • Patent Grant
  • 6785001
  • Patent Number
    6,785,001
  • Date Filed
    Tuesday, August 21, 2001
    23 years ago
  • Date Issued
    Tuesday, August 31, 2004
    20 years ago
Abstract
An apparatus for detecting wavelength change of a first light signal comprises an amplitude splitting interferometer and a detector. The amplitude splitting interferometer comprises first and second optical paths. The first optical path has a first index of refraction that varies with wavelength over a first wavelength band. The second optical path has a second index of refraction that is relatively constant over the first wavelength band. In operation the first light signal enters and exits the amplitude splitting interferometer forming interference light. The interference light couples to the detector which detects the wavelength change of the first light signal from the interference light. An interferometer comprises a first beam splitter, third and fourth optical paths, and a second beam splitter. The third optical path is optically coupled to the first beam splitter and has a third index of refraction that varies with wavelength over a second wavelength band. The fourth optical path is optically coupled to the first beam splitter and has a fourth index of refraction that is relatively constant over the second wavelength band. The second beam splitter is optically coupled to the first and second optical paths such that in operation an incident light enters the first beam splitter and exits the second beam splitter forming an output light and further such that in operation a change in wavelength of the incident light within the wavelength band causes a change in interference of the output light.
Description




FIELD OF THE INVENTION




This invention relates to the field of optical communication. More particularly, this invention relates to the field of optical communication where there is a need to measure wavelength jitter.




BACKGROUND OF THE INVENTION




In WDM (wavelength division multiplexing) optical communication, multiple wavelengths of light each carry a communication signal. Each of the multiple wavelengths of light forms a channel. In DWDM (dense WDM) optical communication, a subset of the WDM optical communication, the channels are spaced close together. A typical DWDM application operates at a wavelength band about 1,550 nm, has 40 channels, and has spacing of 0.4 nm between adjacent channels.




In the WDM optical communication there is a need to monitor the wavelength of each channel. This is especially required for the DWDM optical communication because of the close spacing between adjacent channels.




A method of monitoring wavelength of each of the channels employs a scanning source, a Michelson interferometer, and a detector. The scanning source individually directs each of the channels sequentially to the Michelson interferometer. The Michelson interferometer sequentially directs interference fringe patterns corresponding to each of the channels to the detector. The detector detects the interference fringe pattern, which are electronically compared to desired interference fringe patterns.




There are a number of problems associated with this method. An instrument employing this method is expensive. Further, because the method employs a scanning source, the method exhibits a slow update rate. Moreover, as the channel spacing has decreased in the DWDM optical communication, a dynamic range provided by the method is proving to be insufficient.




The Michelson interferometer is an amplitude splitting interferometer which provides information about light which enters it. The Michelson interferometer includes a beam splitter, first and second mirrors, and a focusing lens. Light entering the Michelson interferometer is split by the beam splitter into a transmitted light and a reflected light. The reflected light then reflects from the first mirror and returns to the beam splitter. Meanwhile the transmitted light reflects from the second mirror and returns to the beam splitter. The beam splitter combines the transmitted light and the reflected light into interference light which is focused by the focusing lens into an interference pattern. As wavelength of the light changes the interference pattern changes.




A Mach-Zehnder interferometer is an amplitude splitting interferometer which provides information about an object placed within a first leg of the Mach-Zehnder interferometer rather than information about light entering the Mach-Zehnder interferometer. For example, the Mach-Zehnder interferometer is often used to observe a gas flow pattern caused by density variations in the gas flow pattern. The first leg of the Mach-Zehnder interferometer passes through the gas flow patterns while a second leg of the interferometer does not pass through the gas flow pattern. First light, diffracted by the gas flow pattern within the first leg, interferes with second light which traverses the second leg. A focusing lens produces an image of the gas flow pattern by focusing the first and second light in an image plane.




What is needed is a method of monitoring channel wavelength that is less expensive.




What is needed is a method of monitoring channel wavelength that exhibits a better update rate.




What is needed is a method of monitoring channel wavelength that exhibits a better dynamic range.




What is needed is a Mach-Zehnder interferometer which provides information about light entering the Mach-Zehnder interferometer rather than information about an object within a leg of the Mach-Zehnder interferometer.




SUMMARY OF THE INVENTION




An apparatus for detecting wavelength change of a first light signal of the present invention comprises an amplitude splitting interferometer and a detector. The amplitude splitting interferometer comprises first and second optical paths. The first optical path has a first index of refraction that varies with wavelength over a first wavelength band. The second optical path has a second index of refraction that is relatively constant over the first wavelength band. In operation the first light signal enters and exits the amplitude splitting interferometer forming interference light. The interference light couples to the detector which detects the wavelength change of the first light signal from the interference light.




An interferometer of the present invention comprises a first beam splitter, third and fourth optical paths, and a second beam splitter. The third optical path is optically coupled to the first beam splitter and has a third index of refraction that varies with wavelength over a second wavelength band. The fourth optical path is optically coupled to the first beam splitter and has a fourth index of refraction that is relatively constant over the second wavelength band. The second beam splitter is optically coupled to the first and second optical paths such that in operation an incident light enters the first beam splitter and exits the second beam splitter forming an output light and further such that in operation a change in wavelength of the incident light within the wavelength band causes a change in interference of the output light.











BRIEF DESCRIPTION OF THE DRAWINGS





FIG. 1

schematically illustrates the preferred channel monitor of the present invention.





FIG. 2

illustrates an optical layout of the preferred channel monitor of the present invention.





FIG. 3

illustrates an isometric view of a grating light valve of the present invention.





FIGS. 4A and 4B

illustrate a cross-section of the grating light valve of the present invention in a reflecting mode and a diffracting mode, respectively.





FIG. 5

illustrates an isometric view of the preferred interferometer of the present invention.





FIG. 6

illustrates a plan view of the preferred interferometer of the present invention.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT




The preferred channel monitor and a 1% splitter of the present invention is schematically illustrated in FIG.


1


. The preferred channel monitor


10


includes dispersion and collimation optics


14


, the preferred interferometer


16


, a light modulator


18


, a detector


20


, and electronics


22


. The 1% splitter


12


is preferably optically coupled to an input optical fiber, an output optical fiber, and the dispersion and collimation optics


14


. The dispersion and collimation optics


14


are optically coupled to the preferred interferometer


16


. The preferred interferometer


16


is optically coupled to the light modulator


18


. The light modulator


18


is optically coupled to detector


20


. The light modulator


18


and the detector


20


are electrically coupled to the electronics


22


.




The dispersion and collimation optics


14


preferably comprise a grism. The grism comprises a combination of a prism and a diffraction grating, where a face of the prism comprises the diffraction grating. Alternatively, the dispersion and collimation optics


14


comprise the diffraction grating. Further alternatively, the dispersion and collimation optics


14


comprise the prism.




In operation, the input optical fiber carries a WDM signal including first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


, for a total of n signals. For example, in a typical DWDM application operating at 1550 nm and having 40 channels separated by 0.4 nm, n equals 40. The 1% splitter


12


couples most of the WDM signal to the output optical fiber and couples a small portion of the WDM signal to the dispersion and collimation optics


14


. Thus, a reduced strength WDM signal including the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


is coupled to the dispersion and collimation optics


14


. The dispersion and collimation optics


14


spatially separate the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


and preferably collimates the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


.




The preferred interferometer forms first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′ from the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


. The preferred interferometer causes each of the first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′ vary as a function of wavelength of each of the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


, respectively. Thus, for example, if the first wavelength signal λ


1


has a wavelength 0.4 nm less than the second wavelength signal λ


2


and the second wavelength signal λ


2


has a wavelength 0.4 nm less than the third wavelength signal λ


3


, a wavelength shift of 0.04 nm of the second wavelength signal λ


2


towards the first wavelength signal λ


1


and away from the third wavelength signal λ


3


causes a change in the second interference signal λ


2


′.




The light modulator


18


, driven by the electronics


22


, directs at least one of the first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′ to the detector


20


while causing a remainder of the first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′ to not be directed to the detector


20


at a given time. For example, in

FIG. 1

, the second interference signal λ


2


′ is directed to the detector


20


while the first, third, and nth interference signals, λ


1


′, λ


3


′, and λ


n


′, are not directed to the detector


20


. At a later time, the light modulator


18


directs at least one of the first, third, and nth interference signals, λ


1


′, λ


3


′, and λ


n


′, to the detector


20


while causing the second interference signal λ


2


′ to not be directed to the detector


20


.




As depicted in

FIG. 1

, the detector


20


in conjunction with the electronics


22


senses the second interference signal λ


2


′. Preferably, the detector


20


comprises a linear array of detecting elements and the second interference signal λ


2


′ provides a fringe pattern, where the fringe pattern changes as the second interference signal λ


2


′ changes. A shift of the fringe pattern along the linear array of detecting elements corresponds to a change in wavelength of the second wavelength signal λ


2


. Often, the change in wavelength is referred to as wavelength jitter because the change in wavelength exhibits a fluctuation of the wavelength. Since the second interference signal λ


2


′ provides the fringe pattern and because the linear array of detecting elements are preferably configured to detect the fringe pattern, the detector senses power fluctuation as well as the wavelength jitter.




Alternatively, the detector


20


comprises a detecting element and the second interference signal λ


2


′ provides an intensity level, where the intensity level changes as the second interference signal λ


2


′ changes. A change of the intensity level at the detecting element corresponds to the change in wavelength of the second wavelength signal λ


2


. In this alternative, a separate arrangement (not shown) provides the power fluctuation of the second wavelength signal λ


2


.




An optical layout of the preferred channel monitor


10


is illustrated in FIG.


2


. The preferred channel monitor


10


includes an optical fiber


24


, the dispersion and collimation optics


14


, the preferred interferometer


16


, the light modulator


18


, a focusing lens


28


, and the detector


20


. The optical fiber


24


optically couples the 1% splitter


12


(

FIG. 1

) to the dispersion and collimation optics


14


. The dispersion and collimation optics


14


preferably comprise an objective lens


30


, the grism


32


, and a linear array of collimating micro-lenses


34


.




In operation, the WDM signal


36


exits the optical fiber


24


and couples to the objective lens


30


. The objective lens


30


focuses the WDM signal


36


. The grism


32


spatially separates the WDM signal


36


into the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


. The linear array of collimating micro-lenses


34


collimates the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


, which couple to the preferred interferometer


16


. In order to provide a more compact package size, mirrors (not shown) preferably fold the optical layout. Alternatively, the mirrors are not used.




The preferred interferometer


16


is an amplitude splitting interferometer which splits each of the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


, into divided signals, causes the divided signals to travel first and second optical paths, respectively, and recombines the divided signals into the first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′, which exit the preferred interferometer


16


. Next, the first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′ couple to the light modulator


18


. Preferably, the light modulator


18


is a diffractive light modulator. Alternatively, the light modulator


18


is a reflective light modulator. Further alternatively, the light modulator


18


is a transmissive light modulator.




The light modulator


18


preferably directs at least one of the first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′, to the focusing lens


28


as a collimated beam while causing a remainder of the first, second, third, and nth interference signals, λ


1


′, λ


2


′, λ


3


′, and λ


n


′ to not be directed to the focusing lens


28


as the collimated beam at a given time.




The light modulator


18


preferably reflects the second wavelength signal λ


2


while preferably diffracting the first, third, and nth interference signals, λ


1


′, λ


3


′, and λ


n


′. Thus, the second interference signal λ


2


′ following the light modulator


18


is the collimated beam while the first, third, and nth interference signals, λ


1


′, λ


3


′, and λ


n


′, following the light modulator


18


are diffracted beams (not shown). The focusing lens


28


then directs the second interference signal λ


2


′ onto the detector


20


while causing the first, third, and nth interference signals, λ


1


′, λ


3


′, and λ


n


′, to not be directed onto the detector


20


. The detector


20


is located slightly away from a focal length of the focusing lens


28


in order to image the fringe pattern onto the linear array of detecting elements.




Preferably, the optical fiber


24


has an exit with an f/4 numerical aperture. Alternatively, the exit has a different numerical aperture. Preferably, the objective lens


30


is an f/5 objective lens with a focal length of 300 mm. Alternatively, the objective lens


30


is a different objective lens. Preferably, the grism


32


comprises a 10° angle between entrance and exit faces and comprises a grating with a period spacing of 2 μm on the exit face. Alternatively, the grism


32


comprises a different grism. Preferably, the linear array of collimating micro-lenses


34


comprises f/1 micro-lenses having a diameter of 0.250 mm. Alternatively, the linear array of micro-lenses


34


comprises different micro-lenses. Preferably, the focusing lens


28


comprises and f/2 focusing lens having a focal length of 20 mm. Alternatively, the focusing lens


28


comprises a different focusing lens.




Preferably, the detector


20


comprises the linear array of detecting elements. More preferably, the detector


20


comprises a four element linear array of InGaAs detecting elements. Alternatively, the detector


20


comprises a different array of detecting elements where the different array of detecting elements is selected from a group comprising the linear array of detecting elements and an area array of detecting elements. Further alternatively, the detector


20


comprises the detecting element.




Preferably, the electronics


22


(

FIG. 1

) comprise driving electronics for the light modulator


18


and signal processing electronics for processing information from the detector


20


. Preferably, the driving electronics modulate channels of the light modulator


18


with unique signatures and the signal processing electronics comprise a lock-in amplifier tuned to the unique signatures. Alternatively, the electronics


22


(

FIG. 1

) comprise different driving electronics. Further alternatively, the signal processing electronics comprise different signal processing electronics.




Preferably, the diffractive light modulator is a grating light valve. The grating light valve of the present invention is isometrically illustrated in FIG.


3


. The grating light valve


40


preferably comprises elongated elements


42


suspended by first and second posts,


44


and


46


, above a substrate


48


. The elongated elements


42


comprise a conducting and reflecting surface


50


. The substrate comprises a conductor


52


. In operation, the grating light valve operates to produce modulated light selected from a reflection mode and a diffraction mode.




A cross-section of the grating light valve


40


of the present invention is further illustrated in

FIGS. 4A and 4B

. The grating light valve


40


comprises the elongated elements


42


suspended above the substrate


48


. The elongated elements comprise the conducting and reflecting surface


50


and a resilient material


54


. The substrate


48


comprises the conductor


52


.





FIG. 4A

depicts the grating light valve


40


in the reflection mode. In the reflection mode, the conducting and reflecting surfaces


50


of the elongated elements


42


form a plane so that incident light I reflects from the elongated elements


42


to produce reflected light R.





FIG. 4B

depicts the grating light valve


40


in the diffraction mode. In the diffraction mode, an electrical bias causes alternate ones of the elongated elements


42


to move toward the substrate


48


. The electrical bias is applied between the reflecting and conducting surfaces


50


of the alternate ones of the elongated elements


42


and the conductor


52


. The electrical bias results in a height difference of a quarter wavelength λ/4 of the incident light I between the alternate ones of the elongated elements


42


and non-biased ones of the elongated elements


42


. The height difference of the quarter wavelength λ/4 produces diffracted light including plus one and minus one diffraction orders, D


+1


and D


−1


.




Preferably, a particular light signal modulator for a particular light signal comprises three pairs of the elongated elements


42


. More preferably, the particular light signal modulator comprises six pairs of the elongated elements


42


. Alternatively, the particular light signal modulator comprises two pairs of the elongated elements


42


.




The preferred interferometer


16


of the present invention is isometrically illustrated in FIG.


5


. The preferred interferometer


16


comprises a first prism


60


and a second prism


62


. Preferably, the first prism


60


and the second prism


62


are optically cemented together to form a beam splitting surface


64


. Preferably, the first prism


60


comprises fused silica. The fused silica exhibits an approximately constant index of refraction over a wavelength band about 1,550 nm. Alternatively, the first prism


60


comprises a first different material that exhibits the approximately constant index of refraction over the wavelength band about 1,550 nm. Preferably, the second prism


62


comprises optical grade germanium. The optical grade germanium exhibits an index of refraction which varies with wavelength over the wavelength band about 1,550 nm. Alternatively, the second prism


62


comprises a second different material that exhibits the index of refraction which varies with wavelength over the wavelength band about 1,550 nm.




It will be readily apparent to one skilled in the art that if the preferred interferometer


16


is to be used to detect a wavelength change within a different wavelength band about a different wavelength, other materials are likely to be more appropriate than the fused silica and the optical grade germanium for the first and second prisms,


60


and


62


, respectively.




A top view of the preferred interferometer


16


is illustrated in FIG.


6


. The preferred interferometer comprises the first and second prisms,


60


and


62


, and the beam splitting surface


64


. In operation, the first, second, third, and nth wavelength signals, λ


1


, λ


2


, λ


3


, and λ


n


, enter the preferred interferometer


16


. In order to simplify description of operation of the preferred interferometer


16


, only the first light signal λ


1


is traced through the preferred interferometer


16


. The first light signal λ


1


is split by the beam splitting surface


64


into a reference light signal λ


11


, which propagates within the first prism


60


, and a varied light signal λ


12


, which propagates within the second prism


62


. The reference light signal λ


11


reflects from a first total internal reflection surface


66


while the varied light signal λ


12


reflects from a second total internal reflection surface


68


. Following these reflections, the beam splitting surface


64


combines the reference light signal λ


11


and the varied light signal λ


12


to form the first interference signal λ


1


′, which exits the preferred interferometer


16


. Similarly, the second, third, and nth interference signals λ


2


′, λ


3


′, and λ


n


′, are formed by the preferred interferometer


16


. By inducing a slight misalignment between the reference light signal λ


11


and the varied light signal λ


12


, the first interference signal λ


1


′ exhibits the fringe pattern. Otherwise, the first interference signal λ


1


′ exhibits an intensity ranging from bright to dark. The second, third, and nth interference signals λ


2


′, λ


3


′, and λ


n


′, are similarly formed by the preferred interferometer


16


.




Mathematically, the fringe pattern produced by the preferred interferometer


16


is given by:








I


(


x


)=(


I




0


/2)[1+cos((2π/λ)×sin θ+φ)]






where I(x) is intensity across fringe pattern, I


0


is maximum intensity of the fringe pattern, λ is wavelength, θ is angle between interference light producing the fringe pattern, and φ is phase difference induced by change in wavelength. The phase difference φ is given by:






φ=(2π/λ)(


n




1




d




1




−n




2




d




2


)






where n


1


is a first refractive index of the first prism


60


, n


2


is a second refractive index of the second prism


62


, d


1


is a first path length within the first prism


60


for the reference light signal λ


11


, and d


2


is a second path length within the second prism


62


for the varied light signal λ


12


.




For a slight change in the wavelength λ, change in the (2π/λ)×sin θ term for the fringe pattern is negligible. Thus, a change from a bright fringe to a dark fringe occurs when the phase difference φ equals π. For a 0.04 nm change in the wavelength λ near 1,550 nm, the first index of refraction n


1


for the fused silica is constant while the second index of refraction n


2


for the germanium changes by 0.0000125. Setting the first and second path lengths, d


1


and d


2


, equal to a path length d, setting the wavelength λ equal to 1,550 nm, and solving for the path length d, gives the path length d equal to 62 mm.




A first alternative channel monitor of the present invention comprises the preferred interferometer


16


and the detector


20


. In the first alternative channel monitor a fourth light signal enters the preferred interferometer


16


and a fourth interference signal exits the preferred interferometer. The detector


20


detects the fourth interference signal as the fringe pattern and consequently detects the change in wavelength of the fourth light signal. Alternatively, the detector


20


detects the intensity level.




A first alternative interferometer of the present invention comprises a first beam splitter, first and second optical paths, and a second beam splitter. The first optical path comprising a first material which has the approximately constant index of refraction over the wavelength band. The second optical path comprising a second material having the index of refraction which varies over the wavelength band. The first beam splitter dividing an input light into a first light which travels along the first optical path and a second light which travels along the second optical path. The second beam splitter combining the first and second light into an interference light.




It will be readily apparent to one skilled in the art that other various modifications may be made to the preferred embodiment without departing from the spirit and scope of the invention as defined by the appended claims.



Claims
  • 1. An apparatus for detecting wavelength change of a first light signal comprising:a. an amplitude splitting interferometer comprising first and second optical paths, the first optical path having a first index of refraction that varies with wavelength over a wavelength band, the second optical path having a second index of refraction that is relatively constant over the wavelength band, such that in operation the first light signal enters and exits the amplitude splitting interferometer, whereby interference light is formed; and b. a detector optically coupled to the amplitude splitting interferometer such that in operation the detector detects the wavelength change of the first light signal from the interference light.
  • 2. The apparatus of claim 1 further comprising a light modulator coupling the amplitude splitting interferometer to the detector such that in operation a second light signal having a wavelength different from the first light signal is separated from the first light signal by the light modulator.
  • 3. The apparatus of claim 2 wherein the light modulator comprises a diffractive light modulator.
  • 4. The apparatus of claim 3 wherein the diffractive light modulator comprises a grating light valve.
  • 5. The apparatus of claim 2 further comprising a dispersion device coupling the first and second light signals to the amplitude splitting interferometer, the dispersion device spatially separating the first and second light signals.
  • 6. The apparatus of claim 5 wherein the dispersion device comprise a grism.
  • 7. The apparatus of claim 5 wherein the dispersion device comprise a grating.
  • 8. The apparatus of claim 5 wherein the dispersion device comprise a prism.
  • 9. The apparatus of claim 5 further comprising a collimation lens optically coupling the dispersion device to the amplitude splitting interferometer.
  • 10. The apparatus of claim 9 wherein the collimation lens comprises a micro-lens array.
  • 11. The apparatus of claim 9 further comprising a splitter coupling the first and second light signals to the collimation lens, the splitter separating the first and second light signals from first and second transmission light signals, respectively.
  • 12. The apparatus of claim 1 further comprising a light modulator optically coupled to the amplitude splitting interferometer such that in operation a second light signal having a wavelength different from the first light signal is separated from the first light signal prior to the first light signal entering the amplitude splitting interferometer.
  • 13. The apparatus of claim 12 wherein the light modulator comprises a diffractive light modulator.
  • 14. The apparatus of claim 13 wherein the diffractive light modulator comprises a grating light valve.
  • 15. The apparatus of claim 1 wherein the amplitude splitting interferometer further comprises:a. a first beam splitter optically coupled to first and second entrances of the first and second optical paths, respectively; and b. a second beam splitter optically coupled to first and second exits of the first and second optical paths, respectively.
  • 16. The apparatus of claim 1 wherein:a. the first optical path of the amplitude splitting interferometer comprises a first prism; and b. the second optical path of the amplitude splitting interferometer comprises a second prism joined to the first prism, whereby a beam splitting surface is formed.
  • 17. The apparatus of claim 1 wherein the interferometer produces a fringe pattern and further wherein the detector comprises a detector array such that in operation the detector array detects the fringe pattern in order to measure a power change and the wavelength change.
  • 18. The apparatus of claim 1 wherein the interferometer does not produce a fringe pattern.
  • 19. The apparatus of claim 18 wherein power sensing optics coupled to the detector provide an amplitude change measurement of the first light signal.
  • 20. The apparatus of claim 18 wherein a light signal amplitude adjustment arrangement adjusts an amplitude of the first light signal prior to the first light signal reaching the detector so that the first light signal has a reference amplitude upon reaching the detector.
  • 21. An apparatus for detecting wavelength change of a light signal comprising:a. means for dividing the light signal into first and second lights; b. first means for causing the first light to travel along a first optical path having a first index of refraction that varies with wavelength over a wavelength band; c. second means for causing the second light to travel along a second optical path having a second index of refraction that is relatively constant over the wavelength band; d. means for combining the first and second lights into an output light, the output light exhibiting a change in interference as wavelength of the light signal changes; and e. means for detecting the change in the interference as the wavelength of the light signal changes.
  • 22. An apparatus for detecting wavelength jitter comprising:a. an amplitude splitting interferometer comprising first and second optical paths, the first optical path having a first index of refraction that varies with wavelength over a wavelength band, the second optical path having a second index of refraction that is relatively constant over the wavelength band, such that in operation first and second light signals enter and exit the amplitude splitting interferometer, whereby first and second interference light is formed; b. a light modulator optically coupled to the amplitude splitting interferometer such that in operation the light modulator separates the second interference light from the first interference light; and c. a detector optically coupled to the light modulator such that in operation the detector detects wavelength jitter from the first interference light.
  • 23. An apparatus for detecting wavelength jitter comprising:a. a light modulator such that in operation the light modulator couples to first and second light signals and further such that in operation the light modulator separates the second light signal from the first light signal; b. an amplitude splitting interferometer coupled to the light modulator, the amplitude splitting interferometer comprising first and second optical paths, the first optical path having a first index of refraction that varies with wavelength over a wavelength band, the second optical path having a second index of refraction that is relatively constant over the wavelength band, such that in operation the first light signals enters and exits the amplitude splitting interferometer, whereby an interference light is formed; and c. a detector optically coupled to the amplitude splitting interferometer such that in operation the detector detects wavelength jitter from the interference light.
  • 24. An interferometer comprising:a. a first beam splitter; b. a first optical path optically coupled to the first beam splitter and having a first index of refraction that varies with wavelength over a wavelength band; c. a second optical path optically coupled to the first beam splitter and having a second index of refraction that is relatively constant over the wavelength band; and d. a second beam splitter optically coupled to the first and second optical paths such that in operation an incident light enters the first beam splitter and exits the second beam splitter, whereby an output light is formed, and further such that in operation a change in wavelength of the incident light within the wavelength band causes a change in interference of the output light.
  • 25. The interferometer of claim 24 wherein the first optical path comprises germanium.
  • 26. The interferometer of claim 24 wherein the second optical path comprises fused silica.
  • 27. The interferometer of claim 24 wherein the interference exhibits a fringe pattern.
  • 28. The interferometer of claim 24 wherein the interference does not exhibit a fringe pattern.
  • 29. An interferometer comprising:a. means for dividing an incident light into first and second lights; b. first means for causing the first light to travel along a first optical path having a first index of refraction that varies with wavelength over a wavelength band; c. second means for causing the second light to travel along a second optical path having a second index of refraction that is relatively constant over the wavelength band; and d. means for combining the first and second lights into an output light, the output light exhibiting a change in interference as wavelength of the incident light changes.
  • 30. An interferometer comprising:a. a first prism having a first index of refraction that varies with wavelength over a wavelength band, the first prism including a first total internal reflection surface; b. a second prism joined to the first prism to form a beam splitting surface, the second prism having a second index of refraction that is relatively constant over the wavelength band, the second prism including a second total internal reflection surface, such that in operation an incident light enters the interferometer and exits the interferometer, whereby an output light is formed, and further such that in operation the output light exhibits a change in interference as wavelength of the incident light changes.
  • 31. The interferometer of claim 30 wherein optical cement joins the second prism to the first prism.
US Referenced Citations (21)
Number Name Date Kind
RE16767 Jenkins Oct 1927 E
RE25169 Glenn May 1962 E
D334557 Hunter et al. Apr 1993 S
D334742 Hunter et al. Apr 1993 S
D337320 Hunter et al. Jul 1993 S
5311360 Bloom et al. May 1994 A
5459610 Bloom et al. Oct 1995 A
5504575 Stafford Apr 1996 A
5661592 Bornstein et al. Aug 1997 A
5757536 Ricco et al. May 1998 A
5808797 Bloom et al. Sep 1998 A
5841579 Bloom et al. Nov 1998 A
5949570 Shiono et al. Sep 1999 A
6061166 Furlani et al. May 2000 A
6169624 Godil et al. Jan 2001 B1
6172796 Kowarz et al. Jan 2001 B1
6181458 Brazas, Jr. et al. Jan 2001 B1
6188519 Johnson Feb 2001 B1
6215579 Bloom et al. Apr 2001 B1
6219015 Bloom et al. Apr 2001 B1
6646745 Verma et al. Nov 2003 B2
Foreign Referenced Citations (100)
Number Date Country
32 33 195 Mar 1983 DE
43 23 799 Jan 1994 DE
197 23 618 Dec 1997 DE
197 51 716 May 1998 DE
198 46 532 May 2000 DE
0 089 044 Sep 1983 EP
0 261 901 Mar 1988 EP
0 314 437 Oct 1988 EP
0 304 263 Feb 1989 EP
0 306 308 Mar 1989 EP
0 322 714 Jul 1989 EP
0 627 644 Sep 1990 EP
0 417 039 Mar 1991 EP
0 423 513 Apr 1991 EP
0 436 738 Jul 1991 EP
0 458 316 Nov 1991 EP
0 477 566 Apr 1992 EP
0 488 326 Jun 1992 EP
0 499 566 Aug 1992 EP
0 528 646 Feb 1993 EP
0 530 760 Mar 1993 EP
0 550 189 Jul 1993 EP
0 610 665 Aug 1994 EP
0 627 644 Dec 1994 EP
0 627 850 Dec 1994 EP
0 643 314 Mar 1995 EP
0 654 777 May 1995 EP
0 658 868 Jun 1995 EP
0 658 830 Dec 1995 EP
0 689 078 Dec 1995 EP
0 801 319 Oct 1997 EP
0 851 492 Jul 1998 EP
1 003 071 May 2000 EP
1 014 143 Jun 2000 EP
1 040 927 Oct 2000 EP
2 117 564 Oct 1983 GB
2 118 365 Oct 1983 GB
2 266 385 Oct 1993 GB
2 296 152 Jun 1996 GB
2 319 424 May 1998 GB
53-39068 Apr 1978 JP
55-11151 Aug 1980 JP
57-31166 Feb 1982 JP
57-210638 Dec 1982 JP
60-49638 Mar 1985 JP
60-94756 May 1985 JP
60-250639 Dec 1985 JP
61-142750 Jun 1986 JP
61-145838 Jul 1986 JP
63-234767 Sep 1988 JP
63-305323 Dec 1988 JP
1-155637 Jun 1989 JP
40-1155637 Jun 1989 JP
2219092 Aug 1990 JP
4-333015 Nov 1992 JP
7-281161 Oct 1995 JP
3288369 Mar 2002 JP
WO 9013913 Nov 1990 WO
WO 9212506 Jul 1992 WO
WO 9302269 Feb 1993 WO
WO 9309472 May 1993 WO
WO 9318428 Sep 1993 WO
WO 9322694 Nov 1993 WO
WO 9409473 Apr 1994 WO
WO 9429761 Dec 1994 WO
WO 9511473 Apr 1995 WO
WO 9602941 Feb 1996 WO
WO 9608031 Mar 1996 WO
WO 9641217 Dec 1996 WO
WO 9641224 Dec 1996 WO
WO 9722033 Jun 1997 WO
WO 9726569 Jul 1997 WO
WO 9805935 Feb 1998 WO
WO 9824240 Jun 1998 WO
WO 9841893 Sep 1998 WO
WO 9907146 Feb 1999 WO
WO 9912208 Mar 1999 WO
WO 9923520 May 1999 WO
WO 9934484 Jul 1999 WO
WO 9959335 Nov 1999 WO
WO 9963388 Dec 1999 WO
WO 9967671 Dec 1999 WO
WO 0004718 Jan 2000 WO
WO 0007225 Feb 2000 WO
WO 0104674 Jan 2001 WO
WO 01006297 Jan 2001 WO
WO 0157581 Aug 2001 WO
WO 02025348 Mar 2002 WO
WO 0231575 Apr 2002 WO
WO 02058111 Jul 2002 WO
WO 02065184 Aug 2002 WO
WO 02073286 Sep 2002 WO
WO 02084375 Oct 2002 WO
WO 02084397 Oct 2002 WO
WO 03001281 Jan 2003 WO
WO 03001716 Jan 2003 WO
WO 03012523 Feb 2003 WO
WO 03016965 Feb 2003 WO
WO 03023849 Mar 2003 WO
WO 03025628 Mar 2003 WO
Non-Patent Literature Citations (86)
Entry
Hecht, Optics, Addison-Wesley, 2nd edition, 1987, pp. 358-360.
Solgaard, O., Integrated semiconductor light modulators for fiber-optic and display applications, Ph.D. Dissertation, Stanford University, Feb. 1992.
Apte, R.B., Grating light valves for high resolution displays, Ph.D. Dissertation, Stanford University, Jun. 1994.
R. Apte, “Grating Light Valves for High Resolution Displays”, Solid State Sensors and Actuators Workshop, Ph D. Dissertation, Stanford University (Jun. 1994).
O. Solgaard, “Integrated Semiconductor Light Modulators for Fiber-Optic and Display Applications”, Ph.D. Dissertation, Stanford University Feb., 1992.
R. Gerhard-Multhaupt, “Viscoelastic Spatial Light Modulators and Schlieren-Optical Systems for HDTV Projection Displays” SPIE vol. 1255 Large Screen Projection Displays 11 (1990), pp. 69-78.
R. Gerhard-Multhaupt, “Light-Valve Technologies for High-Definition Television Projection Displays”, Displays vol. 12, No. 3/4 (1991), pp. 115-128.
O. Solgaard, F. Sandejas, and D. Bloom, “Deformable Grating Optical Modulator,” Optics Letters, vol. 17, No. 9, May 1, 1992, New York, USA, pp. 688-690.
F. Sandejas, R. Apte, W. Banyai, and D. Bloom, “Surface Microfabrication of Deformable Grating Valve for High Resolution Displays,” The 7th International Conference on Solid-State Sensors and Actuators.
P. Alvelda, “High-Efficiency Color Microdisplays,” SID 95 Digest, pp. 307-311, 1995.
Worboys et al., “Miniature Display Technology for Integrated Helmut Systems,” GEC Journal of Research, vol. 10, No. 2, pp. 111-118, Chelmsford, Essex, GB 1993.
M. Farn et al., “Color Separation by use of Binary Optics,” Optics Letters, vol. 18:15 pp. 1214-1216, 1993.
P. Alvelda, “VLSI Microdisplays and Optoelectric Technology,” MIT, pp. 1-93, 1995.
P. Alvelda, “VLSI Mircodisplay Technology,” Oct. 14, 1994.
D. Rowe, “Laser Beam Scanning,” SPIE, vol. 2088, Oct. 5, 1993, 18-26.
L. Hornbeck, “Deformable-Mirror Spatial Light Modulators,” Spatial Light Modulators and Applications III, Aug. 8, CA 1989, pp. 86-102.
Russick et al., “Supercritical Carbon Dioxide Extraction of Solvent from Micromachined Structures,” Supercritical Fluids, Chapter 18, American Chemical Society, pp 255-269, 1997.
Buhler et al., “Linear Array of Complementary Metal Oxide Semiconductor Double-Pass Metal Micromirrors,” Optical Engineering, vol. 36, No. 5, pp 1391-1398, May 1997.
Gani et al., “Variable Gratings for Optical Switching: Rigorous Electromagnetic Simulation and Design,” Optical Engineering, vol. 38, No. 3, pp 552-557, Mar. 1999.
R. Tepe, et al. “Viscoelastic Spatial Light Modulator with Active Matrix Addressing,” Applied Optics, vol. 28, No. 22, New York, USA, pp. 4826-4834, Nov. 15, 1989.
W. Brinker, et al., “Deformation Behavior of Thin Viscoelastic Layers Used in an Active-Matrix-Addressed Spatial Light Modulator,” SPIE vol. 1018, pp. 79-85, Germany, 1988.
T. Utsunomiya and H. Sato, “Electrically Deformable Echellette Grating and its Application to Tunable Laser Resonator,” Electronics and Communications in Japan, vol. 63-c, No. 10, pp. 94-100, Japan, 1980.
Burns, D.M. et al., Development of microelectromechanical variable blaze gratings, Sensors and Actuators A, pp. 7-15, 1998.
R.N. Thomas, et al., “The Mirror-Matrix Tube: A Novel Light Valve for Projection Displays”, IEEE Transactions on Electron Devices, vol. ED-22, No. 9, pp. 765-775, Sep. 1975.
“Kitchen Computer”, IBM Technical Disclosure Bulletin, vol. 37, No. 12, pp. 223-225, Dec. 1994.
“Image Orientation Sensing and Correction for Notepads”, Research Disclosure, No. 34788, p. 217, Mar. 1993.
Beck Mason et al., “Directly Modulated Sampled Grating DBR Lasers for Long-Haul WDM Communication Systems” IEEE Photonics Technology Letters, vol. 9, No. 3, Mar. 1997. pp. 377 of 379.
N. J. Frigo et al., “A Wavelength-Division Multiplexed Passive Optical Network with Cost-Shared Components”, IEEE Photonics Technology Letters, vol. 6, No. 11, Nov. 1994, pp. 1365 of 1367.
M. S. Goodman et al., “The LAMBDANET Multiwavelength Network: Architecture, Applications, and Demonstrations”, IEEE Journal on Selected Areas in Communications, vol. 8, No. 6, Aug. 1990, pp. 995 of 1004.
C. A. Turkatte, “Examining the Benefits of Tunable Lasers for Provisioning Bandwidth on Demand”, EuroForum Optical Components, Feb. 2001, pp. 1 of 10.
R. Plastow, “Tunable Lasers and Future Optical Networks”, Forum-Tunable Laser, Aug. 2000, pp. 58 of 62.
Elizabeth Bruce, “Tunable Lasers”, Communications, IEEE Spectrum, Feb. 2002, pp. 35 of 39.
M. G. Littman et al., “Spectrally Narrow Pulsed Dye Laser without Beam Expander”, Applied Optics, vol. 17, No. 14, Jul. 15, 1998, pp. 2224 of 2227.
Apte et al., “Deformable Grating Light Valves for High Resolution Displays,” Solid State Actuator Workshop, Hilton Head, South Carolina, Jun. 13-16, 1994.
Sene et al., “Polysilicon micromechanical gratings for optical modulation,” Sensors and Actuators, vol. A57, pp. 145-151, 1996.
Amm et al., “Invited Paper: Grating Light Valve™ Technology: Update and Novel Applications,” SID Digest, vol. 29, 1998.
Development of Digital MEMS-Based Display Technology Promises Improved Resolution, Contrast, and Speed, XP-000730009, 1997, pp. 33 of 34.
“Micromachined Opto/Electro/Mechanical Systems,” Electronic Systems, NASA Tech Briefs, Mar. 1997, pp. 50 & 52.
S.T. Pai, et al., “Electromigration in Metals”, Received Jun. 4, 1976, p. 103-115.
Olga B. Spahn, et al., “High Optical Power Handling of Pop-Up Microelectromechanical Mirrors”, Sandia National Laboratories, IEEE 2000, p. 51-52.
David M. Burns, et al. “Optical Power Induced Damage to Microelectromechanical Mirrors”, Sensors and Actuators A 70, 1998, p. 6-14.
V.S. Aliev et al., “Development of Si(100) surface roughness at the initial stage of etching in F2 and XeF2 gases: ellipsometric study,” Surface Science 442 (1999), pp. 206-214.
Xuan-Qi Wang et al., “Gas-Phase Silicon Etching with Bromine Trifluoride,” Depart. of Electrical Engineering, 136-93 California Institute of Technology, 1997 IEEE, pp. 1505-1508.
Harold F. Winters, “Etch products from the reaction of XeF2 with SiO2, Si3N4, SiC, and Si in the presence of Ion Bombardment,” IBM Research Laboratory, 1983 American Vacuum Society, pp. 927-931.
Mehran Mehregany, “Microelectromechanical Systems,” 1993 IEEE, pp. 14-22.
D. Moser et al., “A CMOS Compatible Thermally Excited Silicon Oxide Beam Resonator with Aluminum Mirror,” Physical Electronics Laboratory, 1991 IEEE, pp. 547-550.
M. Parameswaran et al., “Commercial CMOS Fabricated Integrated Dynamic Thermal Scene Simulator,” 1991 IEEE, pp. 29.4.1-29.4.4.
M. Parameswaran et al., “CMOS Electrothermal Microactuators,” Depart. of Electrical Engineering, 1990 IEEE, pp. 128-131.
U. Streller et al., “Selectivity in dry etching of Si(100) with XeF2 and VUV light,” Applied Surface Science 106, (1996), pp. 341-346.
M.J.M Vugts et al., “Si/XeF2 etching: Temperature dependence,” 1996 American Vacuum Society, pp. 2766-2774.
P. Krummenacher et al., “Smart Temperature Sensor in CMOS Technology,” Sensors and Actuators, A-21-A-23 (1990), pp. 636-638.
Henry Baltes, “CMOS as sensor technology,” Sensors and Actuators A. 37-38, (1993), pp. 51-56.
Thomas Boltshauser et al., “Piezoresistive Membrane Hygrometers Based on IC Technology,” Sensor and Materials, 5, 3, (1993), pp. 125-134.
Z. Parpia et al., “Modelling of CMOS Compatible High Voltage Device Structures,” pp. 41-50.
Jon Gildemeister, “Xenon Difluoride Etching System,” 1997, UC Berkeley MicroTabrication Manual Chapter 7.15, p. 2-5.
W. Reithmuller et al., “A smart accelerometer with on-chip electronics fabricated by a commercial CMOS process,” Sensors and Actuators A. 31, (1992), 121-124.
W. Gopel et al., “Sensors- A Comprehensive Survey,” vol. 7, Weinheim New York, 44 pgs.
D. E. Ibbotson et al., “Comparison of XeF2 and F-atom reations with Si and SiO2,” 1984 American Institute of Physics, pp. 1129-1131.
D. E. Ibbotson et al,. “Plasmaless dry etching of silicon with fluorine-containing compounds,” 1984 American Institute of Physics, pp. 2939-2942.
M.H. Hecht et al., “A novel x-ray photoelectron spectroscopy study of the AI/SiO2 interfaces,” 1985 American Institute of Physics, pp. 5256-52616.
Daniel L. Flamm et al., “XeF2 and F-Atom Reactions with Si: Their Significance for Plasma Etching,,” Solid State Technology, V. 26, #4, 4/83, pp. 117-121.
H.F. Winters et al., “The etching of silicon with XeF2 vapor,” Appl. Phys. Lett. vol. 34, No. 1, Jan. 1979, pp. 70-73.
Wayne Bailey et al., “Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications,” SPIE—The International Society for Optical Engineering, vol. 2641, Oct. 1995, 13 pgs.
David Moser et al., “CMOS Flow Sensors,” 1993 Physical Electronics Lab, Swiss Federal Institute of Tech, Zurich, Switzerland, 195 pgs.
E. Hecht, “Optics”, Addison-Wesley, 2nd edition, 1987, Adelphi University, pp. 358-360.
T. Glaser et al., “Beam switching with binary single-order diffractive grating”, XP-000802142, Optics Letters, Dec. 15, 1998, vol. 23, No. 24, pp. 1933 of 1935.
P. C. Kundu et al., “Reduction of Speckle Noise by Varying the Polarisation of Illuminating Beam”, XP-002183475, Dept. of Applied Physics, Calcutta University, 1975, pp. 63-67.
J. W. Goodman, “Some Fundamental Properties of Speckle”, XP-002181682; Dept. of Electrical Engineering, Stanford University, 1976, pp. 1146-1150.
Lingli Wang et al., “Speckle Reduction in Laser Projection Systems by Diffractive Optical Elements”, XP-000754330, Applied Optics, Apr. 1, 1998, vol. 37, No. 10, pp. 1770-1775.
R.W. Corrigan et al., “Calibration of a Scanned Linear Grating Light-Valve, Projection System for E-Cinema Applications”, Silicon Light Machines, SID'99, San Jose, CA, 27 pgs, 1999.
R.W. Corrigan et al., “Calibration of a Scanned Linear Grating Light-Valve, Projection System”, Silicon Light Machines, San Jose, CA, 4 pgs, May 18, 1999.
“Introduction to Cryptography”, http://www.ssh.fi/tech/crpto/into.html, 35 pgs, Jun. 21, 1999.
“Deep Sky Black,” Equinox Interscience, www.eisci.com/deepsky.html, 1997.
“Absorptive Neutral Density Filters,” Newport Corp., Irvine, CA, www.newport.com, May 7, 1999.
“High Energy Variable Attenuators,” Newport Corp., Irvine, CA, www.newport.com, May 7, 1999.
“Neutral-Density Filters,” New Focus, Inc., Santa Clara, CA, www.newfocus.com, May 7, 1999.
J. Hawkes et al., “Laser Theory and Practice,” Prentice Hall, New York, 1995, pp. 407-408.
C. Tew et al., “Electronic Control of a Digital Micromirror Device for Projection Displays”, Proceedings of the 1994 IEEE International Solid-State Circuits Conference, 1994.
Henck, S.A., “Lubrication of Digital Micromirror Devices™”, Tribology Letters, No. 3, pp. 239-247, 1997.
K. W. Goossen et al., “Silicon Modulator Based on Mechanically-Active Anti-Reflection Layer with 1 Mbit/sec Capability for Fiber-in-the-Loop Applications”, IEEE Protonics Technology Letters, vol. 6, No. 9, Sep. 1994, pp. 1119-1121.
J. A. Walker et al., “Demonstration of a Gain Flattened Optical Amplifier with Micromechanical Equalizer Element”, Lucent Technologies, pp. 13-14.
A. P. Payne et al., “Resonance Measurements of Stresses in Al/Si3N4 Micro-Ribbons”, Silicon Light Machines, Sep. 22, 1999, 11 pgs.
M. W. Miles, “A New Reflective FPD Technology Using Interferometric Modulation”, 4 pgs.
N. A. Riza et al., “Digitally Controlled Fault-Tolerant Multiwavelength Programmable Fiber-Optic Attenuator Using a Two-Dimensional Digital Micromirror Device”, Optics Letters, Mar. 1, 1999, vol. 24, No. 5, pp. 282-284.
N. A. Riza et al., “Synchronous Amplitude and Time Control for an Optimum Dynamic Range Variable Photonic D lay Line”, Applied Optics, Apr. 10, 1999, vol. 38, No. 11, pp. 2309-2318.
P. Alvelda et al., “44.4: Ferroelectric Microdisplays Using Distortion-Compensated Pixel Layouts”, SID 95 Digest, XP 2020715, pp. 931-933.