The invention relates to a method for receiving and/or transporting substrates, wherein, by means of at least one sensor, a deviation of the position of a substrate, in particular of a substrate arranged in a slot of a container, is detected at least with respect to one degree of freedom and a movement course of at least one receiving device and/or transporting device is determined with the inclusion of said deviation.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
The invention will be explained in more detail below with reference to the drawings in FIG. 1 to FIG. 3.
FIG. 1 schematically shows a receiving device according to the invention,
FIG. 2 schematically shows a substrate repository (rack),
FIG. 3 schematically shows a flow chart of an exemplary embodiment of the method implementation according to the invention.
Claims
1. A method for receiving and/or transporting substrates comprising:
detecting, by means of at least one sensor, a position of a substrate, at least with respect to one degree of freedom; anddetermining a movement course of at least one of a receiving device and a transporting device with the inclusion of said position.
2. The method of claim 1, wherein the relative position of said substrate with respect to said receiving device is determined by means of the at least one sensor.
3. The method of claim 1, wherein the occupancy of a substrate repository is determined by means of at least one sensor.
4. The method of claim 1, wherein a position of at least one of said substrate and the occupancy of a substrate repository is determined by means of at least one sensor arranged on said receiving device.
5. The method of claim 1, wherein characteristic data relating to position changes are stored and the movement course is determined with inclusion of said characteristic data.
6. The method of claim 1, wherein at least one characteristic data set is recorded and/or stored which represents changes in the movement course which are dependent on a change in the installation configuration.
7. The method of claim 1, wherein a fine setting of the movement course is determined by means of the determination of position changes.
8. The method of claim 1, wherein the movement course of the at least one of the receiving device and the transporting device is determined in a learning cycle.
9. The method of claim 1, wherein the movement course is adapted to changed installation configurations continuously or at intervals.
10. The method of claim 1, wherein the occupancy of a container with respect to the substrate repository and/or the type of a substrate to be moved is taken into account in the determination of the movement course of the receiving device and/or transporting device.
11. The method of claim 1, wherein the relative position of a substrate with respect to a substrate receiving device is determined as the position.
12. The method of claim 1, wherein installation-, in particular container-specific characteristic data sets are stored in a database and used for determining the movement course of the at least one receiving and/or transporting device.
13. The method of claim 1, wherein the position of the substrate is detected in three translation directions.
14. The method of claim 1, wherein the position is detected in at least two rotation directions.
15. The method of claim 1, wherein the position is detected by means of at least two sensors arranged on a receiving device.
16. The method of claim 15, wherein capacitive sensors are provided as the sensors.
17. The method of claim 16, wherein data which represent at least one movement operation are stored in a memory.
18. An apparatus for receiving and/or transporting substrates, comprising:
at least one sensor for detecting the position of a substrate at least with respect to one degree of freedom; andmeans for controlling a movement course of at least one of a receiving device and a transporting device for substrates, wherein the means for controlling the movement course comprise means for the inclusion of the detected position of the substrate.
19. The apparatus of claim 18, wherein the apparatus comprises means for recording and/or storing at least one characteristic data set which represents a configuration-specific movement sequence.
20. The apparatus of claim 18, wherein the apparatus has means for adapting the movement course depending on an alteration of the installation configuration.
21. The apparatus of claim 20, wherein the characteristic data set represents an alteration of the movement course depending on a change in the installation configuration.
22. The apparatus of claim 18, wherein the apparatus comprises means for recording and/or storing at least one characteristic data set which represents the fine control of the movement course.
23. The apparatus claim 22, wherein the apparatus comprises means for the fine control of the movement course with the inclusion of said position.
24. The apparatus of claim 18, wherein the apparatus has, for distance measurement, at least one of a capacitive sensor, an ultrasonic sensor and a light barrier.
25. The apparatus of claim 18, wherein the apparatus has a receiving device which has at least three sensors.
26. An automation device comprising an apparatus for receiving and/or transporting substrates as claimed in claim 18.
Patent Application
20070208453
