Position monitoring

Industry

CPC
H01L21/67259

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67259Position monitoring

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Positioning method
- Patent number 12,272,102
- Issue date Apr 8, 2025
- Disco Corporation
- Yoshimasa Kojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus, system and method for providing a fiber optic coupler
- Patent number 12,272,587
- Issue date Apr 8, 2025
- JABIL INC.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced footprint wafer handling platform
- Patent number 12,272,583
- Issue date Apr 8, 2025
- Lam Research Corporation
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus with circuit-locating mechanism
- Patent number 12,266,411
- Issue date Apr 1, 2025
- Micron Technology, Inc.
- Itamar Lavy
- G11 - INFORMATION STORAGE
Information Patent Grant
Annealing method
- Patent number 12,266,553
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Component mounting system and component mounting method
- Patent number 12,261,070
- Issue date Mar 25, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection method for seized traveling lift pins in wafer processing...
- Patent number 12,249,534
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Eric Shero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection and analysis of substrate support and pre-heat ring in a...
- Patent number 12,243,761
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Machine learning on overlay management
- Patent number 12,237,188
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Level monitoring and active adjustment of a substrate support assembly
- Patent number 12,227,847
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- James V. Santiago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for manufacturing semiconductor device
- Patent number 12,224,187
- Issue date Feb 11, 2025
- Kioxia Corporation
- Makoto Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate type sensor and method of measuring the impact point and...
- Patent number 12,224,189
- Issue date Feb 11, 2025
- Semes Co., Ltd.
- Young Seop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus with aligner
- Patent number 12,224,191
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Beomsoo Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method and substrate transfer system
- Patent number 12,224,193
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating substrate
- Patent number 12,217,977
- Issue date Feb 4, 2025
- Semes Co., Ltd.
- Oh Yeol Kwon
- B08 - CLEANING
Information Patent Grant
Methods and systems of image based robot alignment
- Patent number 12,211,718
- Issue date Jan 28, 2025
- GlobalWafers Co., Ltd.
- TaeHyeong Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Component conveying instrument with an adjusting unit and method of...
- Patent number 12,211,721
- Issue date Jan 28, 2025
- Muehlbauer GmbH & Co. KG
- Rainer Miehlich
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metal-oxide-metal (MOM) capacitors for integrated circuit monitoring
- Patent number 12,205,885
- Issue date Jan 21, 2025
- Microchip Technology Incorporated
- Yaojian Leng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vision-based wafer pre-alignment platform and alignment method
- Patent number 12,205,325
- Issue date Jan 21, 2025
- WUXI XIVI SCIENCE AND TECHNOLOGY CO., LTD.
- Minjie Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Bonding system
- Patent number 12,198,963
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Yoshitaka Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Execution device and execution method
- Patent number 12,198,954
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Grant
Substrate transfer method and substrate transfer system
- Patent number 12,198,955
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate holding hand and substrate transferring robot
- Patent number 12,195,285
- Issue date Jan 14, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Satoshi Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wire tension adjustment method and wire tension adjuster
- Patent number 12,191,173
- Issue date Jan 7, 2025
- Shinkawa Ltd.
- Toshihiko Toyama
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Storage system, query system and storage method for reticles, and c...
- Patent number 12,191,177
- Issue date Jan 7, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and substr...
- Patent number 12,183,612
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for Detecting a Substrate in a Chamber of a Sub...
- Publication number 20250118580
- Publication date Apr 10, 2025
- Mingle TONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positional Relationship Detection System
- Publication number 20250118581
- Publication date Apr 10, 2025
- DAIFUKU CO., LTD.
- Tomotaka Kinugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Detecting Semiconductor Wafer Ce...
- Publication number 20250112078
- Publication date Apr 3, 2025
- STATS ChipPAC Pte Ltd.
- Tack Chee Yong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250104979
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Toshiki AKAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, AND SUBSTRATE CLEANING METHOD USING THE...
- Publication number 20250105030
- Publication date Mar 27, 2025
- Samsung Electronics Co., Ltd.
- Jieun SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND S...
- Publication number 20250105038
- Publication date Mar 27, 2025
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250105040
- Publication date Mar 27, 2025
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORTING DEVICE AND SUBSTRATE PROCESSING DEVICE EQUIP...
- Publication number 20250105039
- Publication date Mar 27, 2025
- SCREEN Holdings Co., Ltd.
- Takuya SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS
- Publication number 20250096030
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Ren-Hau WU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
POSITIONING DEVICE AND MOUNTING DEVICE USING SAME
- Publication number 20250096016
- Publication date Mar 20, 2025
- TORAY ENGINEERING CO., LTD.
- Kenji HAMAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR BONDING A PLURALITY OF DIES TO A CARRIER P...
- Publication number 20250096017
- Publication date Mar 20, 2025
- PYXIS CF PTE. LTD.
- HWEE SENG CHEW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20250096023
- Publication date Mar 20, 2025
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20250087498
- Publication date Mar 13, 2025
- LAM RESEARCH CORPORATION
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXPANDABLE WAFER BONDER
- Publication number 20250087521
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Christopher NETZBAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING DISPLAY DEVICE, METHOD OF MANUFACTURING...
- Publication number 20250087507
- Publication date Mar 13, 2025
- SAMSUNG DISPLAY CO., LTD.
- Hyun Deok IM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING A CENTER POSITION OF A TRANSFERRED SEMICONDU...
- Publication number 20250087511
- Publication date Mar 13, 2025
- VM Inc.
- Tae Jin KWON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Monitoring Moving and Stepping Silicon Wafers
- Publication number 20250087510
- Publication date Mar 13, 2025
- TCL ZHONGHUAN RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Lihui JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PRE-ALIGNER
- Publication number 20250079221
- Publication date Mar 6, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Itamar Orenbuch
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND ABNORMALITY DETERMINATION METHOD
- Publication number 20250073841
- Publication date Mar 6, 2025
- EBARA CORPORATION
- Yoshimasa OZONE
- B24 - GRINDING POLISHING
Information Patent Application
INSPECTION SYSTEM AND METHOD FOR SUPPORTING BEAM OF SUBSTRATE CARRIER
- Publication number 20250079208
- Publication date Mar 6, 2025
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- MING-CHIEN CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...
- Publication number 20250079231
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR PACKAGING WAFER CASSETTES
- Publication number 20250069927
- Publication date Feb 27, 2025
- Siltronic AG
- Franz SOLLINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR HEIGHT ADJUSTMENT
- Publication number 20250069928
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR WAFER WET PROCESS
- Publication number 20250062141
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jie CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES
- Publication number 20250062143
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Deepak Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAPPING APPARATUS AND LOAD PORT APPARATUS
- Publication number 20250054790
- Publication date Feb 13, 2025
- TDK Corporation
- Tatsuhiro KOTSUGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MAP GENERATING METHOD
- Publication number 20250046646
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Junnosuke TAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING
- Publication number 20250046635
- Publication date Feb 6, 2025
- Samsung Electronics Co., Ltd.
- Sangchul Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JUNCTION PASSAGE CONTROL SYSTEM BASED ON LOCATION OF OHT USING POWE...
- Publication number 20250046638
- Publication date Feb 6, 2025
- CANTOPS CO., LTD.
- Hak Seo OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Throughput Substrate Processing Cluster Tool With Factory Inte...
- Publication number 20250038021
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Upendra UMMETHALA
- H01 - BASIC ELECTRIC ELEMENTS

Position monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Positioning method

Apparatus, system and method for providing a fiber optic coupler

Reduced footprint wafer handling platform

Apparatus with circuit-locating mechanism

Annealing method

Component mounting system and component mounting method

Detection method for seized traveling lift pins in wafer processing...

Detection and analysis of substrate support and pre-heat ring in a...

Machine learning on overlay management

Substrate transporter and substrate processing apparatus including...

Substrate processing system and substrate processing method

Level monitoring and active adjustment of a substrate support assembly

Substrate processing apparatus for manufacturing semiconductor device

Substrate type sensor and method of measuring the impact point and...

Wafer transfer apparatus with aligner

Substrate processing system and method for controlling substrate pr...

Control method and substrate transfer system

Method and apparatus for treating substrate

Methods and systems of image based robot alignment

Component conveying instrument with an adjusting unit and method of...

Metal-oxide-metal (MOM) capacitors for integrated circuit monitoring

Vision-based wafer pre-alignment platform and alignment method

Bonding system

Execution device and execution method

Substrate transfer method and substrate transfer system

Substrate holding hand and substrate transferring robot

Wire tension adjustment method and wire tension adjuster

Storage system, query system and storage method for reticles, and c...

Substrate transfer apparatus, substrate transfer method, and substr...

Tin oxide mandrels in patterning

Patents Applicationslast 30 patents

Systems and Methods for Detecting a Substrate in a Chamber of a Sub...

Positional Relationship Detection System

Semiconductor Device and Method of Detecting Semiconductor Wafer Ce...

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE CLEANING DEVICE, AND SUBSTRATE CLEANING METHOD USING THE...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND S...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSPORTING DEVICE AND SUBSTRATE PROCESSING DEVICE EQUIP...

APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS

POSITIONING DEVICE AND MOUNTING DEVICE USING SAME

APPARATUS AND METHOD FOR BONDING A PLURALITY OF DIES TO A CARRIER P...

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

TIN OXIDE MANDRELS IN PATTERNING

EXPANDABLE WAFER BONDER

APPARATUS FOR MANUFACTURING DISPLAY DEVICE, METHOD OF MANUFACTURING...

METHOD FOR DETERMINING A CENTER POSITION OF A TRANSFERRED SEMICONDU...

System and Method for Monitoring Moving and Stepping Silicon Wafers

SUBSTRATE PRE-ALIGNER

SUBSTRATE PROCESSING APPARATUS, AND ABNORMALITY DETERMINATION METHOD

INSPECTION SYSTEM AND METHOD FOR SUPPORTING BEAM OF SUBSTRATE CARRIER

SUBSTRATE PROCESSING APPARATUS, ROTATION STATE DETECTION METHOD, ME...

DEVICE FOR PACKAGING WAFER CASSETTES

SUSCEPTOR HEIGHT ADJUSTMENT

SYSTEM AND METHOD FOR WAFER WET PROCESS

SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES

MAPPING APPARATUS AND LOAD PORT APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE MAP GENERATING METHOD

SUBSTRATE PROCESSING

JUNCTION PASSAGE CONTROL SYSTEM BASED ON LOCATION OF OHT USING POWE...

High Throughput Substrate Processing Cluster Tool With Factory Inte...