Position monitoring

Industry

CPC
H01L21/67259

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67259Position monitoring

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for automated wafer carrier handling
- Patent number 12,322,628
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate, substrate processing apparatus, met...
- Patent number 12,320,778
- Issue date Jun 3, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Displacement measurements in semiconductor wafer processing
- Patent number 12,322,662
- Issue date Jun 3, 2025
- Applied Materials, Inc.
- Justin Wong
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma processing apparatus, and method and program for controlling...
- Patent number 12,315,704
- Issue date May 27, 2025
- Tokyo Electron Limited
- Yusuke Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing device and wafer conveying method
- Patent number 12,308,277
- Issue date May 20, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hui Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing display device and apparatus for manufactu...
- Patent number 12,308,259
- Issue date May 20, 2025
- Samsung Display Co., Ltd.
- Dong Woo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding apparatus and method for correcting movement amount of bond...
- Patent number 12,308,273
- Issue date May 20, 2025
- Shinkawa Ltd.
- Makoto Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing system
- Patent number 12,300,524
- Issue date May 13, 2025
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,288,704
- Issue date Apr 29, 2025
- Applied Materials, Inc.
- Ralph P. Antonio
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and device for controlling overhead hoist transfer vehicle
- Patent number 12,280,961
- Issue date Apr 22, 2025
- Semes Co., Ltd.
- Jun Beom Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate measurement subsystem
- Patent number 12,283,503
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Upendra V. Ummethala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,283,501
- Issue date Apr 22, 2025
- Kokusai Electric Corporation
- Takayuki Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment fixture for a reactor system
- Patent number 12,278,129
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Surojit Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Positioning method
- Patent number 12,272,102
- Issue date Apr 8, 2025
- Disco Corporation
- Yoshimasa Kojima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus, system and method for providing a fiber optic coupler
- Patent number 12,272,587
- Issue date Apr 8, 2025
- JABIL INC.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced footprint wafer handling platform
- Patent number 12,272,583
- Issue date Apr 8, 2025
- Lam Research Corporation
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus with circuit-locating mechanism
- Patent number 12,266,411
- Issue date Apr 1, 2025
- Micron Technology, Inc.
- Itamar Lavy
- G11 - INFORMATION STORAGE
Information Patent Grant
Annealing method
- Patent number 12,266,553
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Chang Huang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Component mounting system and component mounting method
- Patent number 12,261,070
- Issue date Mar 25, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection method for seized traveling lift pins in wafer processing...
- Patent number 12,249,534
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Eric Shero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection and analysis of substrate support and pre-heat ring in a...
- Patent number 12,243,761
- Issue date Mar 4, 2025
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Machine learning on overlay management
- Patent number 12,237,188
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Level monitoring and active adjustment of a substrate support assembly
- Patent number 12,227,847
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- James V. Santiago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus for manufacturing semiconductor device
- Patent number 12,224,187
- Issue date Feb 11, 2025
- Kioxia Corporation
- Makoto Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate type sensor and method of measuring the impact point and...
- Patent number 12,224,189
- Issue date Feb 11, 2025
- Semes Co., Ltd.
- Young Seop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus with aligner
- Patent number 12,224,191
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Beomsoo Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DICING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMICON...
- Publication number 20250174473
- Publication date May 29, 2025
- YAMAHA HATSUDOKI KABUSHIKI KAISHA
- Yoshikuni SUZUKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20250174478
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer Module, and Substrate Transfer Method in Semiconductor Man...
- Publication number 20250174476
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Die-Level Parametric Prediction Boosting Method and System for Impr...
- Publication number 20250174497
- Publication date May 29, 2025
- MEDIATEK INC.
- Chin-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Die-Level Parametric Prediction Boosting Method and Die-Level Param...
- Publication number 20250174498
- Publication date May 29, 2025
- MEDIATEK INC.
- Chin-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OFFSET ALIGNMENT AND REPAIR IN MICRO DEVICE TRANSFER
- Publication number 20250167033
- Publication date May 22, 2025
- VueReal Inc.
- Gholamreza Chaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITION RECONSTRUCTION OF SEMICONDUCTOR COMPONENTS ON A WAFER
- Publication number 20250167052
- Publication date May 22, 2025
- ROBERT BOSCH GmbH
- Eric Sebastian Schmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OFFSET ALIGNMENT AND REPAIR IN MICRO DEVICE TRANSFER
- Publication number 20250167032
- Publication date May 22, 2025
- VueReal Inc.
- Gholamreza Chaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND DETECTING METHOD OF TRAY TILTING
- Publication number 20250167038
- Publication date May 22, 2025
- TES CO., LTD.
- Jin-Hyung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE MOTION PROFILE SYSTEM AND METHOD
- Publication number 20250157850
- Publication date May 15, 2025
- KLA Corporation
- Zhaolong Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM WITH CAPABILITIES FOR DETECTING WHETHER...
- Publication number 20250140540
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Sergei Golovkov
- G01 - MEASURING TESTING
Information Patent Application
INFORMATION PROCESSING APPARATUS, PATTERN FORMING APPARATUS, INFORM...
- Publication number 20250138427
- Publication date May 1, 2025
- Canon Kabushiki Kaisha
- JUNYA TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...
- Publication number 20250125172
- Publication date Apr 17, 2025
- EBARA CORPORATION
- Mitsuru MIYAZAKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Calibration Method and Substrate Processing System
- Publication number 20250125173
- Publication date Apr 17, 2025
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF TRANSFERRING TARGET OBJECT TO TARGET SUBSTRATE
- Publication number 20250125178
- Publication date Apr 17, 2025
- Innolux Corporation
- Chen-Lin Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Detecting a Substrate in a Chamber of a Sub...
- Publication number 20250118580
- Publication date Apr 10, 2025
- Mingle TONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positional Relationship Detection System
- Publication number 20250118581
- Publication date Apr 10, 2025
- DAIFUKU CO., LTD.
- Tomotaka Kinugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Detecting Semiconductor Wafer Ce...
- Publication number 20250112078
- Publication date Apr 3, 2025
- STATS ChipPAC Pte Ltd.
- Tack Chee Yong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250104979
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Toshiki AKAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, AND SUBSTRATE CLEANING METHOD USING THE...
- Publication number 20250105030
- Publication date Mar 27, 2025
- Samsung Electronics Co., Ltd.
- Jieun SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND S...
- Publication number 20250105038
- Publication date Mar 27, 2025
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250105040
- Publication date Mar 27, 2025
- SCREEN Holdings Co., Ltd.
- Yuichi TAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORTING DEVICE AND SUBSTRATE PROCESSING DEVICE EQUIP...
- Publication number 20250105039
- Publication date Mar 27, 2025
- SCREEN Holdings Co., Ltd.
- Takuya SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS
- Publication number 20250096030
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Ren-Hau WU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
POSITIONING DEVICE AND MOUNTING DEVICE USING SAME
- Publication number 20250096016
- Publication date Mar 20, 2025
- TORAY ENGINEERING CO., LTD.
- Kenji HAMAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR BONDING A PLURALITY OF DIES TO A CARRIER P...
- Publication number 20250096017
- Publication date Mar 20, 2025
- PYXIS CF PTE. LTD.
- HWEE SENG CHEW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20250096023
- Publication date Mar 20, 2025
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20250087498
- Publication date Mar 13, 2025
- LAM RESEARCH CORPORATION
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXPANDABLE WAFER BONDER
- Publication number 20250087521
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Christopher NETZBAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING DISPLAY DEVICE, METHOD OF MANUFACTURING...
- Publication number 20250087507
- Publication date Mar 13, 2025
- SAMSUNG DISPLAY CO., LTD.
- Hyun Deok IM
- H01 - BASIC ELECTRIC ELEMENTS

Position monitoring

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for automated wafer carrier handling

Method of processing substrate, substrate processing apparatus, met...

Transfer apparatus and transfer method

Displacement measurements in semiconductor wafer processing

Plasma processing apparatus, and method and program for controlling...

Wafer processing device and wafer conveying method

Method for manufacturing display device and apparatus for manufactu...

Bonding apparatus and method for correcting movement amount of bond...

Substrate processing system

Methods and apparatus for processing a substrate

Method and device for controlling overhead hoist transfer vehicle

Substrate measurement subsystem

Substrate processing apparatus, method of manufacturing semiconduct...

Alignment fixture for a reactor system

Positioning method

Apparatus, system and method for providing a fiber optic coupler

Reduced footprint wafer handling platform

Apparatus with circuit-locating mechanism

Annealing method

Component mounting system and component mounting method

Detection method for seized traveling lift pins in wafer processing...

Detection and analysis of substrate support and pre-heat ring in a...

Machine learning on overlay management

Substrate transporter and substrate processing apparatus including...

Substrate processing system and substrate processing method

Level monitoring and active adjustment of a substrate support assembly

Substrate processing apparatus for manufacturing semiconductor device

Substrate type sensor and method of measuring the impact point and...

Wafer transfer apparatus with aligner

Substrate processing system and method for controlling substrate pr...

Patents Applicationslast 30 patents

DICING DEVICE, SEMICONDUCTOR CHIP MANUFACTURING METHOD, AND SEMICON...

SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM

Transfer Module, and Substrate Transfer Method in Semiconductor Man...

Die-Level Parametric Prediction Boosting Method and System for Impr...

Die-Level Parametric Prediction Boosting Method and Die-Level Param...

OFFSET ALIGNMENT AND REPAIR IN MICRO DEVICE TRANSFER

POSITION RECONSTRUCTION OF SEMICONDUCTOR COMPONENTS ON A WAFER

OFFSET ALIGNMENT AND REPAIR IN MICRO DEVICE TRANSFER

SUBSTRATE PROCESSING APPARATUS AND DETECTING METHOD OF TRAY TILTING

STAGE MOTION PROFILE SYSTEM AND METHOD

SUBSTRATE PROCESSING SYSTEM WITH CAPABILITIES FOR DETECTING WHETHER...

INFORMATION PROCESSING APPARATUS, PATTERN FORMING APPARATUS, INFORM...

INFORMATION PROCESSING APPARATUS, INFERENCE APPARATUS, MACHINE-LEAR...

Calibration Method and Substrate Processing System

METHOD OF TRANSFERRING TARGET OBJECT TO TARGET SUBSTRATE

Systems and Methods for Detecting a Substrate in a Chamber of a Sub...

Positional Relationship Detection System

Semiconductor Device and Method of Detecting Semiconductor Wafer Ce...

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE CLEANING DEVICE, AND SUBSTRATE CLEANING METHOD USING THE...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND S...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TRANSPORTING DEVICE AND SUBSTRATE PROCESSING DEVICE EQUIP...

APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS

POSITIONING DEVICE AND MOUNTING DEVICE USING SAME

APPARATUS AND METHOD FOR BONDING A PLURALITY OF DIES TO A CARRIER P...

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

TIN OXIDE MANDRELS IN PATTERNING

EXPANDABLE WAFER BONDER

APPARATUS FOR MANUFACTURING DISPLAY DEVICE, METHOD OF MANUFACTURING...