Claims
- 1. Apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound, comprising:(a) a gas decomposer-burner tower having: a gas decomposer room for mixing at least one of a hydrocarbon gas and NH3 gas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment and thermally decomposing a resulting mixed gas in a non-oxidizing atmosphere; a burner room for burning flammable components of the mixed gas thermally decomposed in the gas decomposer room; the gas decomposer room and the burner room being formed integrally with each other and situated across an intervening heat-resistant partition wall having an opening at an upper end portion thereof for providing communication between the gas decomposer room and the burner room; (b) a heater disposed in the gas decomposer room and the burner room; (c) a pipe for supplying a reducing atmosphere forming agent to the gas decomposer room; (d) an air-feeding pipe for supplying air to the burner room; and (e) a water scrubber disposed downstream of the gas decomposer-burner tower.
- 2. Apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound, comprising:(a) a gas decomposer-burner tower having: a gas decomposer room for mixing at least one of a hydrocarbon gas and NH3 gas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment and thermally decomposing a resulting mixed gas in a non-oxidizing atmosphere; a burner room for burning flammable components of the mixed gas thermally decomposed in the gas decomposer room; the gas decomposer room and the burner room being formed integrally with each other and situated across an intervening heat-resistant partition wall having an opening at an upper end portion thereof for providing communication between the gas decomposer room and the burner room; (b) a heater disposed in the gas decomposer room and the burner room; (c) a pipe for supplying a reducing atmosphere forming agent to the gas decomposer room; (d) an air-feeding pipe for supplying air to the burner room; and (e) an adsorber tower disposed downstream of the gas decomposer-burner tower and loaded with granular CaO or CaCO3.
- 3. The apparatus according to claim 1 or 2, further comprising a water scrubber disposed upstream of the gas decomposer-burner tower for washing the exhaust gas discharged from the manufacturing equipment with water prior to the thermal decomposition of the mixed gas in the non-oxidizing atmosphere.
- 4. The apparatus according to claim 1 or 2, wherein the heater is disposed horizontally in the gas decomposer room and the burner room.
- 5. The apparatus according to claim 1 or 2, further comprising a grating horizontally disposed below the heater disposed in the gas decomposer room and the burner room.
- 6. Apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound, comprising:(a) a first water scrubber for washing with water an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment; (b) a gas decomposer-burner tower having: a gas decomposer room connected to an upper end of the first water scrubber for mixing at least one of a hydrocarbon gas and NH3 gas with the exhaust gas washed by the first water scrubber and thermally decomposing a resulting mixed gas in a non-oxidizing atmosphere; a burner room for burning flammable components of the mixed gas thermally decomposed in the gas decomposer room; the gas decomposer room and the burner room being formed integrally with each other and situated across an intervening heat-resistant partition wall having an opening at an upper end portion thereof for providing communication between the gas decomposer room and the burner room; (c) a heater horizontally disposed in the gas decomposer room and the burner room; (d) a grating horizontally disposed below the heater in the gas decomposer room and the burner room; (f) a pipe for supplying a reducing atmosphere forming agent to the gas decomposer room; (g) an air-feeding pipe for supplying air to the burner room; (f) a second water scrubber connected to a lower end of the burner room; and (g) a water cistern on which the first and second scrubbers stand.
- 7. Apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound, comprising:(a) a first water scrubber for washing with water an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment; (b) a gas decomposer-burner tower having: a gas decomposer room connected to an upper end of the first water scrubber for mixing at least one of a hydrocarbon gas and NH3 gas with the exhaust gas washed by the first water scrubber and thermally decomposing a resulting mixed gas in a non-oxidizing atmosphere; a burner room for burning flammable components of the mixed gas thermally decomposed in the gas decomposer room; the gas decomposer room and the burner room being formed integrally with each other and situated across an intervening heat-resistant partition wall having an opening at an upper end portion thereof for providing communication between the gas decomposer room and the burner room; (c) a heater horizontally disposed in the gas decomposer room and the burner room; (d) a grating horizontally disposed below the heater in the gas decomposer room and the burner room; (f) a pipe for supplying a reducing atmosphere forming agent to the gas decomposer room; (g) an air-feeding pipe for supplying air to the burner room; (f) an adsorber tower disposed downstream of the gas decomposer-burner tower and loaded with granular CaO or CaCO3; and (g) a water cistern on which the first scrubber stands.
Priority Claims (1)
Number |
Date |
Country |
Kind |
10-170899 |
Jun 1998 |
JP |
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Parent Case Info
This application is a Continuation-in-part (CIP) of application Ser. No. 09/174,452 filed on Oct. 19, 1998, now U.S. Pat. No. 6,126,906.
US Referenced Citations (8)
Continuation in Parts (1)
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Number |
Date |
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Parent |
09/174452 |
Oct 1998 |
US |
Child |
09/620557 |
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US |