Claims
- 1. A fly height measurement system for measuring fly height of a slider over a storage disc, the system comprising:an objective lens and a solid-immersion-lens for focusing light near the bottom of the slider such that the light is coupled to the disc through a near field; and a means for estimating the fly height based on a component of the light, which propagates from the storage disc as the storage disc spins just below the slider.
- 2. A fly height measurement system for measuring fly height of a slider over a storage disc, the system comprising:a source of light, which produces light along a light path; a slider comprising an objective lens and a solid-immersion-lens, wherein the objective lens is positioned such that light from the source hits the objective lens and is directed toward the solid-immersion-lens and couples to the disc surface through a near field; a detector module to receive light reflected from the disc; and a processor to estimate the fly height of the slider based on detector module output.
- 3. The measurement system of claim 2 wherein the light from the source is monochromatic or quasi-monochromatic.
- 4. The measurement system of claim 2 further including a beam splitter in the light path between the light source and the objective lens.
- 5. The measurement system of claim 4 wherein the beam splitter is a partially polarizing beam splitter.
- 6. The measurement system of claim 2 wherein the light source comprises a red laser.
- 7. The measurement system of claim 2 wherein the detector module includes a lens and a two element detector.
- 8. The measurement system of claim 2 wherein the detector module includes a polarizer.
- 9. The measurement system of claim 2 wherein the detector module includes a detector array.
- 10. The measurement system of claim 2 wherein the detector module includes a polarization beam splitter and two light sensitive elements each configured to measure one component of the split beam.
- 11. The measurement system of claim 2 wherein the detector module includes a central aperture stop.
- 12. The measurement system of claim 2 wherein the detector module outputs a signal related to the total quantity of reflected light received by the detector module and the processor estimates the fly height based on a comparison of the detector module output with information stored in memory.
- 13. The measurement system of claim 2 wherein the detector module outputs a signal related to the polarization of reflected light received by the detector module and the processor estimates the fly height based on a comparison of the detector module output with information stored in memory.
- 14. The measurement system of claim 13 wherein the polarization ratio of the reflected light is evaluated.
- 15. The measurement system of claim 2 wherein the detector module outputs a signal related to the distribution of intensity, phase or polarization of reflected light received by the detector module and the processor estimates the fly height based on a comparison of the detector module output with information stored in memory.
- 16. A fly height measurement system for measuring fly height of a slider over a storage disc, the system comprising:a source of light, which produces light along a light path; a slider comprising an objective lens and a solid-immersion-lens, wherein the objective lens is positioned such that light from the source hits the objective lens and is directed toward the solid-immersion-lens and couples to the disc surface through a near field; a detector module to receive a component of the light transmitted through the disc, where the light directed at the detector is not spatially dispersed based on wavelength; and a processor to estimate the fly height of the slider based on an output of the detector module.
- 17. The measurement system of claim 16 wherein the detector module includes a polarization beam splitter and two light sensitive elements each configured to measure one component of the split beam.
- 18. The measurement system of claim 16 wherein the detector module includes a central aperture stop.
- 19. The measurement system of claim 16 wherein the detector module includes a detector array.
CROSS REFERENCE TO RELATED APPLICATIONS
This application claims priority to provisional application Serial No. 60/074,966, filed on Feb. 17, 1998 and is a §371 National Stage Application of International Application No. PCT/US98/20311, filed Sep. 29, 1998 and published as WO99/41566 on Aug. 19, 1999 in English.
PCT Information
Filing Document |
Filing Date |
Country |
Kind |
PCT/US98/20311 |
|
WO |
00 |
Publishing Document |
Publishing Date |
Country |
Kind |
WO99/41566 |
8/19/1999 |
WO |
A |
US Referenced Citations (37)
Provisional Applications (1)
|
Number |
Date |
Country |
|
60/074966 |
Feb 1998 |
US |