Claims
- 1. A device for manufacturing a thin film comprising a supporting body for supporting a long macromolecular substrate, a shielding plate for regulating the direction of atoms forming a thin film, a nozzle for directing gas from a deposition end side of a main aperture formed in said shielding plate to said substrate, and another nozzle for orienting gas flux from a top side of a sub-aperture formed in said shielding plate on a deposition starting side of said main aperture or from a section near said supporting body to selectively deposit a metal oxide on a surface of said substrate; said substrate running in a vacuum along said supporting body; and said supporting body being made of a seamless belt.
- 2. A device for manufacturing a thin film comprising a supporting body for supporting a long macromolecular substrate, a shielding plate for regulating the direction of atoms forming a thin film, a nozzle for directing gas from a deposition end side of an aperture formed in said shielding plate, and a nozzle for directing gas flux from the outside of a circulating section of vapor forming said thin film to selectively deposit a metal oxide on a surface of said substrate; said substrate running in a vacuum along said supporting body; and said supporting body being made of a seamless belt.
- 3. A device for manufacturing a thin film, comprising a supporting body for supporting a long macromolecular substrate, a shielding plate for regulating the direction of atoms forming a thin film, and a nozzle for directing gas flux from a deposition end side of each of two apertures for depositing a deposition film in an intermittent manner, formed in said shielding plate; said substrate running in a vacuum along said supporting body; and said supporting body being made of a seamless belt.
Priority Claims (1)
Number |
Date |
Country |
Kind |
6-194005 |
Aug 1994 |
JP |
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Parent Case Info
This appln is a continuation of Ser. No. 09/004,078 Jan. 7, 1998 which is a div of Ser. No. 08/513,539 Aug. 10, 1995 U.S. Pat. No. 5,759,710.
US Referenced Citations (6)
Non-Patent Literature Citations (1)
Entry |
“Recording Characteristics of Obliquely Evaporated Thin Co-O Films”, Journal of the Magnetics Society of Japan, vol. 18, Supplement, No. S1, pp. 431-434. |
Continuations (1)
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Number |
Date |
Country |
Parent |
09/004078 |
Jan 1998 |
US |
Child |
09/502847 |
|
US |