Activation or excitation of reactive gases outside the coating chamber

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CPC
C23C14/0026

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0026Activation or excitation of reactive gases outside the coating chamber

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Patents Grantslast 30 patents

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Activation or excitation of reactive gases outside the coating chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for formation of a transition metal dichalcogenide (TMDC) ma...

Radical generator and molecular beam epitaxy apparatus

In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-sele...

In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-sele...

Luminescent materials that emit light in the visible range or the n...

Oxide coated cutting insert

Oxide coated cutting insert

Method and apparatus for producing semiconductor films and related...

Group-III metal nitride and preparation thereof

Hybrid beam deposition system and methods for fabricating metal oxi...

Charge-free method of forming nanostructures on a substrate

Method and apparatus for manufacturing a zinc oxide thin film at lo...

Sp3 bond boron nitride emitting light in ultraviolet region, its pr...

Charge-free low-temperature method of forming thin film-based nanos...

Semiconductor structures and methods of fabricating semiconductor s...

Apparatus for depositing a low work function material

Process for preparing ferroelectric thin films

Method and device for manufacturing a thin film and magnestic recor...

Film structure, electronic device, recording medium, and process of...

Low work function surface layers produced by laser ablation using s...

Low scatter, high quality water clear zinc sulfide

RF induction plasma source generating apparatus

Method and device for manufacturing a thin film and magnetic record...

Method and device for manufacturing a thin film and magnetic record...

Method and device for manufacturing a thin film and magnetic record...

Forming a piezoelectric layer with improved texture

Process of making squid device having tilt-boundary junction

Method of producing film of nitrogen-doped II-VI group compound sem...

Magnetic recording medium with a magnetic layer having a specific o...

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Patents Applicationslast 30 patents

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YTTRIUM OXIDE COATED OPTICAL ELEMENTS WITH IMPROVED MID-INFRARED PE...

Vapor Deposition of Ceramic Coatings

OXIDE COATED CUTTING INSERT

OXIDE COATED CUTTING INSERT

GROUP III-V NITRIDE LAYER AND METHOD FOR PRODUCING THE SAME

GROUP-III METAL NITRIDE AND PREPARATION THEREOF

Charge-free low-temperature method of forming thin film-based nanos...

METHOD AND APPARATUS FOR PRODUCING SEMICONDUCTOR FILMS, PHOTOELECTR...

Charge-free low-temperature method of forming thin film-based nanos...

Charge-free method of forming nanostructures on a substrate

Film growth at low pressure mediated by liquid flux and induced by...

Method and apparatus for manufacturing a zinc oxide thin film at lo...

Hybrid beam deposition system and methods for fabricating metal oxi...

Sp3 bond boron nitride emitting light in ultraviolet region, its pr...

Semiconductor structures and methods of fabricating semiconductor s...

Film growth at low pressure mediated by liquid flux and induced by...

Vacuum deposition system and thin-film deposition process