Method and manufacturing nozzle plate, liquid ejection head and image forming apparatus

Abstract

The method of manufacturing a nozzle plate includes the steps of: forming a photosensitive film of a negative type photosensitive material on a transparent plate having light transmission characteristics, the photosensitive film being demarcated into an unirradiated region and an irradiated region; and performing exposure of the photosensitive film to light transmitted via a spatial modulation element and the transparent plate, in such a manner that the unirradiated region is not irradiated with the light and the irradiated region is irradiated with the light, wherein, during the exposure of the photosensitive film, change of the unirradiated region is successively performed and change of a time interval when the irradiated region is irradiated with the light is performed in accordance with the change of the unirradiated region.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The nature of this invention, as well as other objects and benefits thereof, will be explained in the following with reference to the accompanying drawings, in which like reference characters designate the same or similar parts throughout the figures and wherein:

FIG. 1 is an overall compositional diagram of an apparatus which is available for a method of manufacturing a nozzle plate according to a first embodiment;

FIG. 2 is a flowchart showing steps of manufacturing a nozzle plate according to the first embodiment;

FIGS. 3A to 3D are illustrative diagrams of multiple irradiation by a mirror array;

FIGS. 4A to 4D are cross-sectional diagrams of a nozzle having a spiral shape;

FIG. 5 is a flowchart showing a procedure for correcting light exposure;

FIGS. 6A and 6B are illustrative diagrams of light exposure for forming grooves using a mask;

FIG. 7 is an illustrative diagram of nozzle positions and an irradiation area;

FIG. 8 is a diagram showing a photoresist after a developing process and a post-baking;

FIG. 9 is a diagram showing a nozzle plate completed by the method of manufacture according to the first embodiment;

FIG. 10 is a flowchart showing steps of manufacturing a nozzle plate according to a second embodiment;

FIGS. 11A to 11D are illustrative diagrams of multiple irradiation by a mirror array;

FIGS. 12A and 12B are illustrative diagrams of light exposure for forming grooves using a mask;

FIG. 13 is a diagram showing a photoresist after a developing process and a post-baking;

FIG. 14 is a diagram showing the state after carrying out Ni eutectoid plating;

FIG. 15 is a diagram showing the state after carrying out Ni electroforming;

FIG. 16 is a diagram showing a nozzle plate completed by the method of manufacture according to the second embodiment;

FIG. 17A is a plan view perspective diagram showing an embodiment of the composition of a print head;

FIG. 17B is a principal enlarged view of FIG. 17A;

FIG. 17C is a plan view perspective diagram showing a further embodiment of the structure of a head;

FIG. 18 is a cross-sectional view along line 18-18 in FIG. 17A;

FIG. 19 is a diagram showing the arrangement of ink chamber units;

FIG. 20 is a general schematic drawing of an inkjet recording apparatus;

FIG. 21 is a principal plan diagram showing the peripheral area of a print unit of an inkjet recording apparatus;

FIGS. 22A to 22D are diagrams showing the steps of a method of manufacture in the related art;

FIGS. 23A to 23D are diagrams showing the steps of another method of manufacture in the related art;

FIG. 24 is a diagram showing a step of another method of manufacture in the related art; and

FIG. 25 is a diagram showing a step of another method of manufacture in the related art.

Claims

1. A method of manufacturing a nozzle plate, the method comprising the steps of: forming a photosensitive film of a negative type photosensitive material on a transparent plate having light transmission characteristics, the photosensitive film being demarcated into an unirradiated region and an irradiated region; andperforming exposure of the photosensitive film to light transmitted via a spatial modulation element and the transparent plate, in such a manner that the unirradiated region is not irradiated with the light and the irradiated region is irradiated with the light,wherein, during the exposure of the photosensitive film, change of the unirradiated region is successively performed and change of a time interval when the irradiated region is irradiated with the light is performed in accordance with the change of the unirradiated region.

2. A method of manufacturing a nozzle plate, the method comprising the steps of: forming a photosensitive film of a positive type photosensitive material on a transparent plate having light transmission characteristics, the photosensitive film being demarcated into an unirradiated region and an irradiated region;performing exposure of the photosensitive film to light transmitted via a spatial modulation element and the transparent plate, in such a manner that the unirradiated region is not irradiated with the light and the irradiated region is irradiated with the light;developing the photosensitive film after the exposure of the photosensitive film; andelectroforming a metal member by using the photosensitive film which has been developed for a mold,wherein, during the exposure of the photosensitive film, change of the unirradiated region is successively performed and change of a time interval when the irradiated region is irradiated with the light is performed in accordance with the change of the unirradiated region.

3. The method of manufacturing a nozzle plate as defined in claim 1, wherein: during the exposure of the photosensitive film, the change of the unirradiated region is successively performed in such a manner that the unirradiated region becomes narrower successively; andduring the exposure of the photosensitive film, the change of the time interval when the irradiated region is irradiated with the light is performed in such a manner that the time interval is shortened in accordance with narrowing of the unirradiated region.

4. The method of manufacturing a nozzle plate as defined in claim 2, wherein: during the exposure of the photosensitive film, the change of the unirradiated region is successively performed in such a manner that the unirradiated region becomes narrower successively; andduring the exposure of the photosensitive film, the change of the time interval when the irradiated region is irradiated with the light is performed in such a manner that the time interval is shortened in accordance with narrowing of the unirradiated region.

5. The method of manufacturing a nozzle plate as defined in claim 1, wherein at least one of the change of the unirradiated region and the change of the time interval is controlled in accordance with characteristics of the light which passes through the photosensitive film.

6. The method of manufacturing a nozzle plate as defined in claim 2, wherein at least one of the change of the unirradiated region and the change of the time interval is controlled in accordance with characteristics of the light which passes through the photosensitive film.

7. The method of manufacturing a nozzle plate as defined in claim 1, further comprising the step of forming a first groove having a diameter smaller than a maximum diameter of the unirradiated region, in a surface of the photosensitive film reverse to a surface of the photosensitive film on which the transparent plate is arranged.

8. The method of manufacturing a nozzle plate as defined in claim 2, further comprising the step of forming a first groove having a diameter smaller than a maximum diameter of the unirradiated region, in a surface of the metal member reverse to a surface of the metal member on which the transparent plate is arranged.

9. The method of manufacturing a nozzle plate as defined in claim 1, wherein a cross-sectional shape of the unirradiated region which has a maximum space differs from a cross-sectional shape of the unirradiated region which has a minimum space.

10. The method of manufacturing a nozzle plate as defined in claim 2, wherein a cross-sectional shape of the unirradiated region which has a maximum space differs from a cross-sectional shape of the unirradiated region which has a minimum space.

11. The method of manufacturing a nozzle plate as defined in claim 1, wherein: the unirradiated region has a projecting section which extends outward; anda phase of the projecting section of the unirradiated region changes successively in accordance with the change of the unirradiated region.

12. The method of manufacturing a nozzle plate as defined in claim 2, wherein: the unirradiated region has a projecting section which projects outward; anda phase of the projecting section of the unirradiated region changes successively in accordance with the change of the unirradiated region.

13. The method of manufacturing a nozzle plate as defined in claim 1, further comprising the step of forming a second groove in a surface of the photosensitive film on which the transparent plate is arranged.

14. The method of manufacturing a nozzle plate as defined in claim 2, further comprising the step of forming a second groove in a surface of the metal member on which the transparent plate is arranged.

15. A liquid ejection head comprising a nozzle plate manufactured by the method of manufacturing a nozzle as defined in claim 1.

16. A liquid ejection head comprising a nozzle plate manufactured by the method of manufacturing a nozzle as defined in claim 2.

17. An image forming apparatus comprising the liquid ejection head as defined in claim 15.

18. An image forming apparatus comprising the liquid ejection head as defined in claim 16.