METHOD AND SYSTEM FOR ANALYZING STANDARD TOOL MESSAGES IN A MANUFACTURING ENVIRONMENT

Abstract

By analyzing process messages exchanged between one or more process tools and a remote host system, the status of the communication may be efficiently monitored. The analysis of the respective process messages may allow interpretation of process messages so as to have increased intelligibility, wherein additionally the process messages may be classified in accordance with one or more predefined criteria. Thus, the detection of even subtle communication inefficiencies may be significantly enhanced.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The invention may be understood by reference to the following description taken in conjunction with the accompanying drawings, in which like reference numerals identify like elements, and in which:

FIG. 1 a schematically illustrates a manufacturing environment including a process message analyzing system according to illustrative embodiments of the present invention;

FIGS. 1 b-1e schematically illustrate flowcharts of operational modes of a process message analyzing system of FIG. 1a l in accordance with illustrative embodiments;

FIGS. 1 f-1g schematically illustrate the system of FIG. 1a with additional functionality in accordance with further illustrative embodiments;

FIG. 1 h represents a flowchart for illustrating an operational mode according to the system as shown in FIG. 1g; and

FIG. 1 i schematically illustrates the process message analyzing system with a statistical unit for determining statistical parameters of the process messages on the basis of true utilization.

Claims

1. A system, comprising: an interface configured to receive process messages in a standard format from a communication link between a host system and one or more process tools of a manufacturing environment; anda process message analyzing unit connected to said interface and configured to interpret each of said process messages and classify said process messages according to at least one of a plurality of predefined selectable criteria.

2. The system of claim 1, further comprising a user interface configured to select one or more of said predefined selectable criteria by user interaction.

3. The system of claim 2, wherein said user interface is further configured to display said interpreted process messages, and wherein a degree of intelligibility for human perception of said interpreted process messages is higher than a degree of intelligibility of said process messages in said standard format.

4. The system of claim 2, wherein said analyzing unit is connected to said user interface to enable configuration by a user.

5. The system of claim 1, wherein said process message analyzing unit is configured to interpret and classify each of a plurality of run-specific process messages of a specified process run during execution of said run-specific process messages by said one or more process tools.

6. The system of claim 5, wherein said process message analyzing unit is further configured to interpret and classify each of said plurality of run-specific process messages of said specified process run after completion of said specific process run.

7. The system of claim 1, wherein one of said plurality of selectable criteria represents a tool characteristic of at least one of said one or more process tools.

8. The system of claim 7, wherein said tool characteristic represents at least one of a processing state, a substrate transport in said one or more process tools, a carrier state in said one or more process tools and a hardware status.

9. The system of claim 8, wherein said process message analyzing unit further comprises a state model monitor unit configured to monitor one or more state models implemented in said one or more process tools.

10. The system of claim 9, wherein said state model monitor unit is further configured to identify one or more state models related to a monitored one of said one or more state models.

11. The system of claim 10, wherein said state model monitor unit is further configured to evaluate said monitored state model on the basis of a state of said one or more related state models.

12. The system of claim 9, wherein said state model monitor unit is further configured to evaluate said monitored state model on the basis of state transitions of said state model.

13. The system of claim 1, further comprising an analysis unit configured to operate on said classified process messages to perform at least one of a state model check, a statistical calculation and a contiguity determination for two or more state models.

14. The system of claim 13, wherein said analysis unit comprises a statistical analysis unit configured to determine a statistical characteristic of said process messages on the basis of tool utilization of said one or more process tools.

15. The system of claim 13, wherein said analysis unit is connected to said user interface to enable configuration by a user.

16. The system of claim 15, wherein said user interface is further configured to display one or more results generated by said analysis unit.

17. The system of claim 13, further comprising an interface configured to enable interaction with said analysis unit during run time of said analysis unit.

18. A method, comprising: receiving process messages from a communication link between a host system and one or more process tools of a manufacturing environment, said process messages being exchanged in a standardized format; andinterpreting said process messages to have an increased degree of intelligibility for human perception compared to said process messages.

19. The method of claim 18, further comprising classifying said received process messages according to one or more predefined selectable criteria.

20. The method of claim 19, wherein classifying said process messages comprises filtering said process messages on the basis of selectable filter parameters.

21. The method of claim 20, wherein said filter parameters relate to at least one of a processing state of said one or more process tools, a substrate transport activity in said one or more process tools, a carrier status in said one or more process tools and a hardware status of said one or more process tools.

22. The method of claim 19, wherein classifying said process messages comprises grouping said process messages according to state models representing said one or more process tools.

23. The method of claim 22, further comprising operating on said classified process messages to perform a secondary analysis on said classified process messages.

24. The method of claim 23, wherein operating on said classified process messages comprises performing at least one of a state model check, a statistical calculation and a contiguity determination for two or more state models.

25. The method of claim 23, wherein operating on said classified process messages to perform said secondary analysis is user configurable.

26. The method of claim 23, wherein operating on said classified process messages comprises interactively entering information for controlling said operating while operating on said process messages.

27. The method of claim 23, further comprising displaying one or more results of said operating on the classified process messages.

28. The method of claim 22, further comprising evaluating one or more of said state models with respect to compliance with a predefined state model evolution.

29. The method of claim 28, wherein evaluating said one or more state models comprises identifying at least one reference state model related to said one or more state models to be evaluated and determining whether or not a state of said at least one reference state model is compatible with said one or more state models to be evaluated.

30. The method of claim 29, further comprising providing an indication of a result of said determination at least when said at least one reference state model and said one or more state models to be evaluated are not compatible.

31. The method of claim 18, further comprising determining at least one statistical parameter of said process messages on the basis of a degree of utilization of said one or more process tools.

32. A method, comprising: receiving process messages from a communication link between a host system and one or more process tools of a manufacturing environment, said process messages being exchanged in a standardized format; andanalyzing said process messages by classifying said process messages on the basis of one or more selectable criteria.

33. The method of claim 32, wherein classifying said process messages comprises grouping said process messages according to state models representing the operation of said one or more process tools in said manufacturing environment under the control of said host system.

34. The method of claim 33, further comprising monitoring at least one of said state models with respect to a predefined operational behavior.

35. The method of claim 34, wherein monitoring said at least one state model comprises determining a compatibility of a state of interest of said at least one state model with a state of a state model correlated to said at least one state model when in said state of interest.

36. The method of claim 32, further comprising performing a statistical analysis of said process messages with respect to tool utilization of said one or more process tools.