Claims
- 1. A method for creating a poly 1 stringer monitor, comprising the steps of:(a) creating active regions over a substrate; (b) patterning a poly1 layer over the active region such that the poly1 layer also covers the area of the substrate where one word line in a pair of word lines will be located; (c) patterning a continuous poly2 layer over the substrate to form the word lines such that the poly2 layer extends between each pair of word lines over the active area; (d) etching the poly1 layer outside each pair of word lines over the active area; and for each pair of word lines, connecting the word line having a layer of poly1 to an external pad so that any poly1 stringers that occur after etching may be detected.
- 2. The method of claim 1 wherein step (c) includes the step of patterning the poly2 over the active region such that the poly 2 connects lines two transistor areas.
CROSS-REFERENCE TO RELATED APPLICATIONS
The present application is a divisional of U.S. Ser. No. 09/429,244, filed Oct. 28, 1999, now U.S. Pat. No. 6,448,609, and assigned of record to Advanced Micro Devices, Inc., of Sunnyvale, Calif.
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