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Circuits for electrically characterising or monitoring manufacturing processes
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Industry
CPC
H01L22/34
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L22/00
Testing or measuring during manufacture or treatment; Reliability measurements
Current Industry
H01L22/34
Circuits for electrically characterising or monitoring manufacturing processes
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