1. Field of the Invention
The present invention concerns testing of very large scale integrated-circuitry (“VLSI”) devices, and, more particularly, concerns high speed testing of such devices using test patterns.
2. Related Art
Referring now to
Referring now to
Referring now to
Main frame 120 includes a test sequencer 314, an address pattern generator 316, a data pattern generator 318, an error detector 331, a data log 329, some output data buffers 328, a precision crystal oscillator 324 which is used to produce a stable, high frequency reference clock 326 for synchronization, and device power supply 327.
The test sequencer 314 controls the sequence of tests, as well as the conditions of each test, such as the particular address and data patterns, particular time set (defines test cycle times, as well as address, data, and control signal edge values within a test cycle), temperature and voltage to which the DUT 136 is subjected. The address pattern generator 316 has at least one arithmetic logic unit (“ALU”) (not shown) to generate sequences of addresses necessary to access storage within the DUT 136 for read and write operations. The data pattern generator 318 has at least one ALU (not shown) to generate sequences of test data for writing to the device under test. The ALU's are programmable to generate a variety of test patterns. However, the patterns are all limited by the constraints of the ALU architecture. The ALU can generally only generate patterns of a certain type. That is, although such an ALU is programmable, the patterns that the ALU can generate still are not without substantial constraints because the ALU is designed for a certain limited set of op codes.
The error detector 331 compares the actual data read back from the DUT 136 with the expected data from the data generator 318 on a cycle-by-cycle, pin-by-pin basis to produce fail data. The data log 329 can then be used to log the fails or to ignore them. The device power supply 327 controls the power supply voltage per test corner for the DUT 136. Once the address and data patterns are generated on-the-fly, the patterns are stored temporarily in data buffers 328 and then sent to the test head 130.
Details of one of a number of channel cards 131 are illustrated in the test head 130 shown in
The signal formatter 343 merges the raw digital patterns of the data/address ALU for a signal with the signal's corresponding timing data to produce a signal with precise edges in relationship to the beginning of each test cycle. The signal is then driven to the DUT 136 by pin driver 348 with the correct up and down voltage levels.
Parametric measurement unit (“PMU”) 349 forces or measures voltage or current on the DUT 136 pin. Comparator 344 compares analog data of the DUT 136 and a reference voltage to produce digital “1's” and “0's” for the error detector 331 in the main frame 120.
Referring now to
In recent years there has been a trend to migrate functions from the main frame 120 to the channel cards 131, even to the extent of locating ALU's in the channel cards 131. At an extreme, each channel card 131 becomes an “instrument” in itself that includes multiple cards. Moving main frame 120 functionality to the channel cards 131 tends to reduce some data path problems by moving some high speed operations of the system 100 closer to the DUT 136. However, there is still a problem of synchronizing all the cards 131, which may number even in the hundreds. This is a considerable problem at high speed. Moreover, the problem of flexibility in pattern generation still exists.
In summary, prior art systems use high speed, localized, complex hardware-ALU's for address and data pattern generation operating at test speeds and use a long and high speed electrical tester bus. Both of these conventional features limit tester functionality at high speed because with this arrangement write and read operations of the tester are highly critical all the way from the main frame to the DUT and back. Also, as mentioned before, the hardware ALU's, due to their architectural limitations, can only generate certain types of test patterns. Therefore a need exists for improvements in high speed testing.
The foregoing need is addressed in the present invention. A process of the present invention (referred to herein as a pin vector generator or a bit vector generator) strips out patterns for each individual DUT signal pin (address pin, data pin, etc.) from conventional full-width test vectors. These full-width test vectors are from test patterns produced by a conventional test program. (They are referred to as full-width test vectors because they have widths equal to the whole address and data field width of the DUT.) The slicing of the conventional full-width test vectors by the pin generator produces a pin vector for each one of the DUT pins. The pin vectors are compressed and packaged to produce packets of data which are saved in a suitable storage media before test. Each packet also includes the address of its target channel card as well as one or more pointers to relevant timing and voltage data, such data being referred to herein as DUT vectors. This preprocessing of test vectors avoid the necessity of high-speed, on-the-fly, test pattern generation via hardware ALUs during test. This also removes limitations on the types of test patterns that can be generated.
At test initialization, the test packets and DUT vectors are loaded into a “pipeline” having a series of memory stages, i.e., data buffers in the tester, extending from the computer system all the way to the channel cards in the test head. The DUT vectors are preloaded into register files residing in each channel card during test initialization. As a test sequence progresses, fresh packets are constantly loaded to keep the memory pipeline filled. Each channel card may receive all of its data packets in a sequence corresponding to the sequence of specified tests. Alternatively, each packet may include a sequence identifier so that the packets can be sent out of order but processed by the channel cards for specified test sequences.
At the channel cards, each compressed pin vector is decompressed by a hardware assist decompressor and then processed through a parallel-in serial-out, high speed buffer. Each decompressed bit is then conditioned by a formatter before a pin driver delivers a precision signal to the channel card's respective DUT pin at high test speed.
Because of the parallel-in, serial-out buffer mechanism, the decompressor output can be at a lower speed than the test speed at which the DUT pins are driven. For each of its output operating cycles the decompressor outputs to the parallel-in, serial-out buffer a relatively wide stream of bits. The formatter receives bits from the buffer at the test frequency, which is higher than the output operating frequency of the decompressor since the formatter receives from the parallel-in, serial-out buffer a one-bit wide stream of bits. Similarly, since the compressed pin s are delivered to the decompressor through the memory pipeline the speed of the pipeline is even lower than the decompressor speed. Furthermore, since the pin vectors are delivered to the decompressor as compressed pin vectors the speed of the pipeline is even lower than the decompressor speed, i.e., each input cycle the decompressor takes in X bits, and each output cycle the decompressor outputs Y bits, where Y>X and the input frequency is correspondingly less than the output frequency. Furthermore, the compressed pin vectors are delivered for each output operating cycle of the pipeline in bit sets having more bits than that which the compressor reads in each of its input operating cycles. That is, the pipeline is wider than the decompressor input, and, therefore, the output operating frequency of the pipeline may be even lower than the output operating frequency of the decompressor. All of these arrangements contribute to enable the pipeline to operate slower than the decompressor. Consequently, the DUT runs at very high speed while the pin vectors are concurrently delivered to the test head at a substantially lower speed.
Instead of a conventional high speed electrical tester bus, the tester of the present invention has an optical control bus that is relatively narrow and very fast and a data bus that is electrical but slower and wider. The packets are transmitted from the computer over the electrical bus to the test head. In various implementations the width of the tester data bus may be a function of the desired volume of data transmission and the desired efficiency of the compressor. For example, in one implementation the data bus is 256 bits wide. This is in contrast to the prior art arrangement in which data and address generators are hard wired by dedicated, single data conductors to respective channel cards. The arrangement of the present invention is advantageous because each packet sent from the computer system to the test head during test utilizes the full width of the tester electrical data bus. That is, bits of a packet are transmitted in parallel on numerous bits of the data bus. In one implementation bits of a packet are transmitted in parallel on the entire bit width of the data bus. Since the electrical bus (also referred to herein as the “data bus”) is relatively wide and the pin vectors are compressed, a large number of pin vectors are transmitted in packets quickly at a relatively low data transmission frequency.
A few high speed optical control signals are transmitted on the optical bus and converted by a converter into electrical signals. The electrical signals are then divided by dividers to produce secondary electrical clocks clk0, clk1 . . . clkx at each of the channel cards. This mechanism advantageously produces all the necessary high speed electrical signals only very close to the DUT. Also, a high frequency reference clock is delivered in the optical domain in this manner, which provides critical high speed synchronism and control of timing signals needed for high speed testing. This avoids the necessity of the difficult task of delivering high speed electrical signals from the main frame to the channel cards in the test head. Using the optical signal to synchronize the channel cards also reduces constraints commonly associated with high speed synchronization in the electrical domain over a long transmission line and with large loads such as a large number of channel cards.
To restate the above, the tester of the present invention advantageously utilizes distributed operations (distributed both in software and in hardware domains) to replace functions of conventional ALU's and utilizes a wider but slower electrical data bus and a narrow but much faster optical control bus. The buses of the present invention traverse only a very short path between the parallel-in serial-out high speed buffer in the test head and the DUT for critical high speed operations. Thus, according to the invention, preprocessed pin vectors are transmitted over the data bus at a frequency that is substantially lower than the testing frequency of the DUT. (This is in contrast to the conventional practice of using hardware ALU's to generate address and data patterns at test speed on-the-fly and transmitting the patterns at high speed.) This, in turn, enables the present system to be used to test devices that operate at higher frequencies than would otherwise be possible and enables the use of a software program written in a high-level language, such as Perl, Java, etc., running on a conventional computer to generate the pin vectors, instead using of special, dedicated and localized high-speed hardware ALU's. This also permits flexibility regarding the patterns that can be generated for the pin vectors.
Thus, for the tester of the present invention complexity is buried in the software portion of the distributed ALU-like functionality, including a pre-processor software portion for generating test patterns and a post-processor software portion for analyzing collected DUT data. The pre-processor has a programmer interface, a test program generator, and the previously mentioned pin vector generator and compressor. The post-processor has a decompressor, error detector/data log, and a database. The hardware portion of the distributed ALU-like functionality is much simpler, with respect to its computational logic complexity, than the prior art hardware ALU's, and includes a hardware assist decompressor for delivering the pin vectors to the DUT and a hardware assist compressor to collect the DUT data for storage and post-processing.
In an alternative embodiment an optical bus is provided for data transmission instead of the previously mentioned electrical data bus. This increases the maximum achievable testing frequency and can also support testing of devices with higher signal pin counts, i.e., devices needing more channel cards.
Additional objects, advantages, aspects and forms of the invention will become apparent upon reading the following detailed description and upon reference to the accompanying drawings.
The claims at the end of this application set out novel features which applicants believe are characteristic of the invention. The invention, a preferred mode of use, further objectives and advantages, will best be understood by reference to the following detailed description of an illustrative embodiment read in conjunction with the accompanying drawings.
Referring now to
The preprocessing also produces DUT vectors that specify timing and voltage for the tests. That is, a DUT vector specifies at what voltage level a signal on a pin is asserted and when the signal starts and ends relative to a particular cycle. One such DUT vector may apply to all the pins on the DUT 136 and may even apply to numerous tests. Alternatively, one DUT vector may apply to all address pins and another DUT vector may apply to all data pins. Generally a DUT vector applies more nearly to the whole DUT 136 and each pin vector applies to an individual pin of the DUT 136. There may be exceptions, however, in which a single pin vector may apply to a number of pins. This exception usually arises because for a particular sequence of test patterns specified by a pin vector there may be a number of pins for which the same sequence of signals is asserted. Likewise, one DUT vector may sometimes apply only to selected pins.
After the pin vectors are produced they are compressed by compressor 406. Then each pin vector is packaged into packets with one or more pointers to one or more DUT vectors and the test packets and DUT vectors are stored in storage 407. This may be done before testing begins. That is, a set of the DUT vectors and the packets containing the compressed pin vectors may be saved in storage 407 before testing of the DUT 136 begins, the set being for a “complete” test of the DUT 136 so that the set does not have to be added to by the generator 405 during the test of the DUT. Consequently, in this circumstance there are no high speed, on-the-fly test pattern generations during test.
A “complete” test includes, for example, a test that writes to all the memory cells of the DUT 136 and reads the contents of the cells back out again. A complete test may even include the performance of this cycle numerous times, in which different patterns of data are written each time. A complete test may also include performance of cycles that vary the voltage or timing of the data written to the DUT 136 pins.
The system 420 may be a conventional computer system, although the test packets are specially adapted for the features of the invention and are produced by software that is likewise specially adapted. Producing the test packets via software in a conventional computer system as described above eliminates limitations that hardware ALU's have regarding the types of patterns they can generate.
At test initialization, the test packets and DUT vectors are loaded into a “pipeline” having a series of memory stages, i.e., data buffers 408, 431, 435, and 462, in the tester 400A, extending from the computer system 420 all the way to the channel cards 450A in the test head 440. As the test progresses, fresh test packets and possibly additional DUT vectors are constantly loaded to keep the memory pipeline filled. The “pipeline” includes bus 458 for transmitting test packets from the computer 420 to respective buffers 462 in each channel card 450A. Data bus 458 of tester 400A (
Tester 400A also has an optical control bus 457 that is relatively narrow and very fast. Timing for data transfer and other operations is controlled by signals from the master and timing clocks in signal sources 434, which are delivered over optical links 457 to optical-electrical converters 441 in each channel card 450A. (The speed of operation of the tester 400A of the present invention, as governed by the master clock, is limited by technology of optical-electrical converters. An operating frequency of up to 12 GHz is within the capability of currently available optical-electrical converters, which is sufficient for the present invention.) The electrical signals from converters 441 are then divided by dividers 443 to produce secondary electrical clocks clk0, clk1 . . . clkx at each of the channel cards 450A. This mechanism advantageously produces all the necessary high speed electrical signals only very close to the DUT 136. Also, a high frequency reference clock is delivered in the optical domain in this manner, which provides the critical high speed synchronism and control of timing signals needed for high speed testing.
Returning now to the description of data transfer, the data buffers 462 in each channel card 450A are capable of receiving data in parallel from the wide bus 458 and delivering parallel data on demand to the decompressor 452. For ease of future tester enhancement the decompressor 452 is a firmware upgradeable and hardware plugable unit.
The uncompressed pin vectors are then fed into the parallel-in serial-out high speed data buffer 444. The buffer 444 concurrently streams out serially the received parallel data to the high speed formatter 446, timed by one or more of the divided master clocks 443 at test speed, which is very high. The pin driver 448 delivers a precision signal to the DUT 136 at test speed.
In one embodiment of the invention, the parallel-in serial-out buffer 444, the formatter 446, and the pin driver 448 are electrically very close to one another, such as mounted on the same printed circuit card or multi-chip module, or even on the same integrated circuit chip. Consequently, these units are capable of a very high speed serial data transmission rate that is sufficient to keep up with the rate of data transfer required for high speed testing of the DUT.
The test sequencer 432, the DPS 437, the timing generator 445, the formatter 446, the pin driver 448, the PMU 470, and the comparator 456 for each channel card 450A function in substantially the same manner as the corresponding blocks in the prior art system 100 of
The raw (analog) DUT 136 data that is collected by the testing is fed into the comparator 456 which converts the serial DUT 136 data into digital 1s and 0s. This serial digital DUT data is then fed into the compressor 453 via buffer 454 in parallel to be compressed. For ease of future tester enhancement the compressor 453 is a firmware upgradeable and hardware plugable unit.
Compressed data is then buffered 455 and then transmitted over the electrical bus 458 all the way to the computer 420 and saved in storage 411. The software post-processor 415 then uses the decompressor 412 process to extract the DUT 136 data and the test results are analyzed by a suitable error detector/data log process and then saved in a database 413.
Thus, according to the above described arrangement, preprocessed test packets are transmitted over the data bus 458 at a frequency that is substantially lower than the testing frequency of the DUT 136. This is in contrast to the conventional practice of using hardware ALU's to generate address and data patterns at test speed on-the-fly and transmitting the patterns at high speed. This, in turn, enables the system 400A to be used to test devices that operate at higher frequencies than would otherwise be possible and enables the use of a software program written in a high-level language, such as Perl, Java, etc., running on a conventional computer to generate the test packets, instead using of special, dedicated and localized high-speed hardware ALU's. This also permits flexibility regarding the patterns that can be generated for the test packets.
Referring to
Referring now to
Referring now to
Of particular note, because of a variety of mechanisms illustrated in
Also, test packets are delivered to the decompressor 452 through a memory pipeline from buffer 408 through buffer 462, which has a bit width W into buffer 462. Since the test packets are delivered to the decompressor 452 as compressed test packets the speed of the pipeline may be lower than the decompressor 452 speed. That is, each input cycle the decompressor 452 takes in X bits, and each output cycle the decompressor 452 outputs Y bits, where Y is greater than X, and the decompressor 452 input frequency is correspondingly less than its output frequency.
Still further, the compressed test packets are delivered for each output operating cycle of the pipeline in bit sets having a bit width W that is wider than the number of bits that the compressor 452 reads in each of its input operating cycles. Therefore, the output operating frequency of the pipeline, i.e., the frequency with which it delivers bit sets to buffer 462, may be still lower than the output operating frequency of the decompressor 452.
All of these mechanisms contribute to enable the DUT 136 to run at very high speed while the test packets are concurrently delivered to the channel card 450A or 450B at a substantially lower speed.
Referring now to
Referring now to
In the example shown in
(Note that the 64-bit device in
Immediately to the right of the device 136 in
According to the illustrated sequence of test vectors 710B, i.e., top row to bottom row, data is first written to a cell in the top row and left-hand column of each partition in DUT 136. This cell has an address A3A2A1A0=0000, as shown in the one of the full-width test vector 710B shown in the top row. Then data is next written to a cell in DUT 136 that is over one column to the right and down one row. This cell has an address A3A2A1A0=0101, as shown in the one of the full-width test vector 710B shown in the next row down.
In the right-hand portion of the first row of vectors 710B is shown the portion of the first full-width test vector 710B for the data pins of the DUT 136. As stated above, data is written in the sequence indicated by the set of test vectors 710B to all the memory locations in the device 136. That is, in a first write cycle the four data bits D3D2D1D0=0011 of the first full-width test vector 710B are written to the respective I/O portions of the device 136 for address A3A2A1A0=0000. In a second write cycle the four bits D3D2D1D0=1100 of the second full-width test vector 710B are written for address A3A2A1A0=0101, and so on.
At the extreme right side of the
In addition to the information being organized into packets corresponding specifically to respective DUT 136 pins and their corresponding channel cards 450A (
The data compression includes detection of patterns and responsive encoding. For example, in a string of sixteen address or data bits “1001100001100111” a “flip” pattern may be detected, according to which the inverse (“flip”) of the first eight bits, 10011000, are repeated for the next eight bits, 01100111. So instead of sending all sixteen bits only the first eight may be sent along with a code indicating to flip those eight bits for the next eight bits. Other patterns include i) shift, in which a first sequence of bits is shifted left or right by n bits to form a second pattern, ii) pad, in which a 1 or 0 is repeated n times, and iii) repeat, in which a first pattern is repeated n times.
As another example, the data for channel card A0 in
In addition to compressing data as in the above examples, in which data is compressed with respect to sequences within a set of data for a single channel card, data may also be compressed with respect to sequences applying to numerous channel cards. For example, for the diagonal pattern shown in
Referring now to
Module 402 also has a bit vector (also known as pin vector) generator program 405 that receives the set of full-width test vectors 710A produced by program 404 and organizes them as pin vectors for the respective channel cards. That is, program 405 selects from the data and address bits of vectors 710A produced by program 404 a first sequence of bits as a first one of the pin vectors 720A, which has bits for no pins other than for address pin A0. Likewise, the program 405 selects a second a sequence of bits as a second one of the pin vectors 720A, which has bits for no pins other than for address pin A1. Likewise, the program 405 selects a third sequence of bits as a third one of the pin vectors 720A, which has bits for no pins other than for address pin A2. And the program 405 selects a fourth sequence of bits as a fourth one of the pin vectors 720A, which has bits for no pins other than for address pin A3. And the program selects a fifth sequence of bits as a fifth one of the pin vectors 720A, which has bits for no other pins other than for data pin D0. And the program selects a sixth sequence of bits as a sixth one of the pin vectors 720A, which has bits for no other pins other than for data pin D1. And so on, as shown in
Module 402 of
In addition to sending packets 810 for individual channel cards (or for groups of channel cards, if compressing permits) and their corresponding DUT 136 pins, module 402 also sends DUT vectors (not shown) to the test head 440 (
Referring now to
In various embodiments system 900 takes a variety of forms, including a personal computer system, mainframe computer system, workstation, Internet appliance, PDA, an embedded processor with memory, etc. That is, it should be understood that the term “computer system” is intended to encompass any device having a processor that executes instructions from a memory medium. The memory medium preferably stores instructions (also known as a “software program”) for implementing various embodiments of a method in accordance with the present invention. In various embodiments the one or more software programs are implemented in various ways, including procedure-based techniques, component-based techniques, and/or object-oriented techniques, among others. Specific examples include XML, C, C++ objects, Java and commercial class libraries.
It should be appreciated from the above that the invention involves a significant change in architecture to reduce problems associated with high speed testing. The invention includes novel features concerning the way data is delivered to the test head. More generally, VLSI tester of the present invention achieves improvements by trading higher hardware complexity, lower software complexity, lower speed and less data storage of a conventional tester for lower hardware complexity, higher software complexity, higher speed and more data storage.
Moving the sync clock to the optical domain, as in the system 400A of
Another advantage of the architecture of the testing system disclosed concerns precision timing. A number of factors contribute to the precision timing achieved by the present invention. First, the use of optical fiber contributes to more precise timing because optical fibers are capable of transmitting very high frequency clock signals without any capacitive loading effect. Also, the choice of optical fiber pathways for the clock signals results in low jitter because the optical fibers inherently have high noise immunity.
More specifically, it should be understood from the foregoing that it is a feature of the disclosed embodiment of the invention that no high frequency electrical signals or clocks are transmitted a long distance, e.g., from the main frame to the test head. Although one or more high speed signals are sent from the main frame to the test head, optical means is used to do so. If any high frequency electrical clock is necessary anywhere, then it is created and used only locally, such as in the channel cards. This is advantageous because the optical domain is less prone to loading effects and high speed optical signals can be sent over longer distances without distortion. It would not be practically feasible to transmit an electrical signal from the main frame to approximately 100 cards in the test head, because such a signal will not survive the capacitive loading effect of the long electrical wire that is part of the data bus and the combined capacitive effect of the channel cards. An optical signal, on the other hand, does not have such a capacitive load problem. Thus, it should be understood that from this standpoint it really does not matter if the optical source is in the main frame or in the test head. The optical source is located in the main frame in the disclosed embodiment of the invention because there is typically more space in the main frame and this transmission distance is generally not a problem for an optical signal.
While this arrangement is advantageous, it should nevertheless be understood that it is not completely without its own issues. The optical signal must be split at the test head into slices for each channel card using optical splitters. This is problematic because the more an optical beam is split, the more the intensity of the beam drops. If the intensity drops below a certain threshold, optical to electrical converters are unable to convert the optical beam into an electrical signal. Furthermore, if the intensity of the optical beam is increased to deal with the problem of splitting the beam then the frequency of the optical source tends to drop. So the right balance has to be found for the trade off between the number of optical splitters, which sets an upper limit on number of channel cards, and the optical intensity, which limits the maximum frequency of the master clock). While the tradeoffs among intensity, frequency and number of splitters for optical transmission of high frequency signals do present limitations in the disclosed design, nevertheless, these limitations are not as severe as those in the electrical domain. These limitations can be significantly eased by having multiple optical sources for the reference/sync clocks and providing a calibration procedure for channel card delay adjustments.
As for synchronization, an optical source provides a better signal because optical fiber has very good immunity to external noise pickup and is unaffected by the above mentioned capacitive loading effects. Dividing signals as disclosed herein and having a good calibration method is generally sufficient to reduce skew to a manageable level, producing a better synchronous timing environment.
The description of the present embodiments have been presented for purposes of illustration, but are not intended to be exhaustive or to limit the invention to the forms disclosed. Many additional aspects, modifications and variations are also contemplated and are intended to be encompassed within the scope of the following claims. For example, the processes of the present invention are capable of being distributed in the form of a computer readable medium of instructions in a variety of forms. The present invention applies equally regardless of the particular type of signal bearing media actually used to carry out the distribution. Examples of computer readable media include RAM, flash memory, recordable-type media such as a floppy disk, a hard disk drive, a ROM, CD-ROM, DVD and transmission-type media such as digital and/or analog communication links, e.g., the Internet.
The present invention also advantageously reduces the variety of hardware that is required for a tester. Another advantage of the present invention is its flexibility. The speed of the tester can be increased by factors such as replacing the optical oscillator, increasing the width of the data bus and increasing the amount of vector preprocessing and the amount of memory. The invention is particularly well suited for testing memory devices. Conventionally, preprocessing of test data as described herein has not been applied.
To reiterate, many additional aspects, modifications and variations are also contemplated and are intended to be encompassed within the scope of the following claims. Moreover, it should be understood that in the following claims actions are not necessarily performed in the particular sequence in which they are set out.
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