Claims
- 1. A method for coating a workpiece, the method comprising the steps of:
- directing a liquid along a flow path;
- positioning the workpiece so that the workpiece receives the liquid; and
- illuminating the liquid along the flow path to illuminate contaminant particles carried by the liquid at multiple locations in the flow path.
- 2. The method of claim 1, further comprising the step of rotating said workpiece at a selected rotational velocity in a selected plane as said workpiece receives said liquid, to provide a coating of said liquid on said workpiece.
- 3. The method of claim 2, further comprising a step of detecting said contaminant particles by detecting light scattered by said contaminant particles.
- 4. The method of claim 1, wherein the step of directing a liquid along a flow path includes directing the liquid through a tube, and wherein the step of illuminating the liquid includes illuminating the liquid inside the tube.
- 5. The method of claim 4, including illuminating the liquid inside the tube from a source outside the tube.
- 6. A method for coating a workpiece, the method comprising the steps of:
- directing a liquid along a flow path;
- positioning the workpiece so that the workpiece receives the liquid; and
- illuminating the liquid along the flow path to illuminate at least one contaminant particle carried by the liquid by radiating light from a sidewall of an optical fiber which extends substantially adjacent the flow path of the liquid.
- 7. The method of claim 6, further comprising the step of rotating said workpiece at a selected rotational velocity in a selected plane as said workpiece receives said liquid, to provide a coating of said liquid on said workpiece.
- 8. The method of claim 7, further comprising a step of detecting said at least one contaminant particle by detecting light scattered by said at least one contaminant particle.
Parent Case Info
This is a divisional of application U.S. Ser. No. 08/250,659 filed on May 27, 1994, now U.S. Pat. No. 5,509,375, which is a continuation of U.S. Ser. No. 07/902,119 filed Jun. 22, 1992, now abandoned.
US Referenced Citations (11)
Foreign Referenced Citations (3)
Number |
Date |
Country |
62-261031 |
Nov 1987 |
JPX |
63-37235 |
Feb 1988 |
JPX |
63-231243 |
Sep 1988 |
JPX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
250659 |
May 1994 |
|
Continuations (1)
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Number |
Date |
Country |
Parent |
902119 |
Jun 1992 |
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