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Apparatus for applying a liquid, a resin, an ink or the like
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H01L21/6715
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/6715
Apparatus for applying a liquid, a resin, an ink or the like
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Patents Grants
last 30 patents
Information
Patent Grant
Method and/or system for coating a substrate
Patent number
12,283,499
Issue date
Apr 22, 2025
Service Support Specialties, Inc
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Integrated dry processes for patterning radiation photoresist patte...
Patent number
12,278,125
Issue date
Apr 15, 2025
Lam Research Corporation
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for dispensing spin-on glass (SOG) and method of using
Patent number
12,272,549
Issue date
Apr 8, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yung-Tsun Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Fluid supply nozzle for semiconductor substrate treatment and semic...
Patent number
12,266,549
Issue date
Apr 1, 2025
APET CO., LTD.
Tae Woo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matching process controllers for improved matching of process
Patent number
12,265,380
Issue date
Apr 1, 2025
Applied Materials, Inc.
James Robert Moyne
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tank, substrate processing apparatus, and method of using the tank
Patent number
12,261,064
Issue date
Mar 25, 2025
Tokyo Electron Limited
Tomohiko Muta
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Semiconductor manufacturing system, behavior recognition device and...
Patent number
12,259,709
Issue date
Mar 25, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Kai-Ting Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for real-time quality control of a film in a sp...
Patent number
12,255,110
Issue date
Mar 18, 2025
Samsung Electronics Co., Ltd.
Gaurav Kumar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Device maintenance in semiconductor manufacturing environment
Patent number
12,246,404
Issue date
Mar 11, 2025
Taiwan Semiconductor Manufacturing Company Limited
Vincent Chien
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing method, substrate processing apparatus and sub...
Patent number
12,237,173
Issue date
Feb 25, 2025
Tokyo Electron Limited
Keiko Hada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Information processing apparatus, information processing method and...
Patent number
12,228,390
Issue date
Feb 18, 2025
Tokyo Electron Limited
Masahide Tadokoro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor devices and corresponding device
Patent number
12,230,511
Issue date
Feb 18, 2025
STMicroelectronics S.r.l.
Fulvio Vittorio Fontana
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective component forming apparatus
Patent number
12,230,520
Issue date
Feb 18, 2025
Disco Corporation
Yoshinori Kakinuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Squeezing device, photoresist supply system and photoresist supply...
Patent number
12,222,652
Issue date
Feb 11, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Shengjiao Li
G01 - MEASURING TESTING
Information
Patent Grant
Substrate treating apparatus with parallel first and second parts o...
Patent number
12,217,986
Issue date
Feb 4, 2025
Screen Semiconductor Solutions Co., Ltd.
Hiroyuki Ogura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
12,217,983
Issue date
Feb 4, 2025
J.E.T. CO., LTD.
Atsuo Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,211,197
Issue date
Jan 28, 2025
SCREEN Holdings Co., Ltd.
Hideji Naohara
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
12,205,833
Issue date
Jan 21, 2025
Semes Co., Ltd.
Sun Mi Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spin coater and semiconductor fabrication method using the same
Patent number
12,189,295
Issue date
Jan 7, 2025
Samsung Electronics Co., Ltd.
Myung-Soo Hwang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Integrated dry processes for patterning radiation photoresist patte...
Patent number
12,183,604
Issue date
Dec 31, 2024
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Additive process for circular printing
Patent number
12,172,374
Issue date
Dec 24, 2024
Texas Instruments Incorporated
Daniel Lee Revier
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Substrate processing apparatus
Patent number
12,133,297
Issue date
Oct 29, 2024
Tokyo Electron Limited
Yoshifumi Amano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Resist pump buffer tank and method of resist defect reduction
Patent number
12,130,553
Issue date
Oct 29, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Yi Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film processing method
Patent number
12,119,242
Issue date
Oct 15, 2024
SCREEN Holdings Co., Ltd.
Yuji Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sacrificial protection layer for environmentally sensitive surfaces...
Patent number
12,119,218
Issue date
Oct 15, 2024
Lam Research Corporation
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coater with automatic cleaning function and coater automatic cleani...
Patent number
12,111,575
Issue date
Oct 8, 2024
ACM Research (Shanghai) Inc.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing light emitting device
Patent number
12,100,790
Issue date
Sep 24, 2024
Nichia Corporation
Shinya Mitsuhashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
Patent number
12,094,738
Issue date
Sep 17, 2024
Elemental Scientific, Inc.
Tyler Yost
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, control method, and computer-readab...
Patent number
12,094,737
Issue date
Sep 17, 2024
Tokyo Electron Limited
Masayuki Kajiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier component and coating developer device
Patent number
12,084,756
Issue date
Sep 10, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Buxiang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250096018
Publication date
Mar 20, 2025
SEMES CO., LTD.
Changhwa JEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR MANUFACTURING DISPLAY DEVICE, METHOD OF MANUFACTURING...
Publication number
20250087507
Publication date
Mar 13, 2025
SAMSUNG DISPLAY CO., LTD.
Hyun Deok IM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250079220
Publication date
Mar 6, 2025
SCREEN Holdings Co., Ltd.
Satoshi KAKINOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS APPARATUS SCHEDULING CONTROL METHOD AND SEMIC...
Publication number
20250068144
Publication date
Feb 27, 2025
XI'AN NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Junxiang ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250061565
Publication date
Feb 20, 2025
SCREEN Holdings Co., Ltd.
Hideji NAOHARA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FLOW RATE ADJUSTMENT METHOD IN SUBSTRATE PROCESSING APPARATUS AND S...
Publication number
20250025908
Publication date
Jan 23, 2025
TOKYO ELECTRON LIMITED
Hiroshi MARUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20250022737
Publication date
Jan 16, 2025
SEMES CO., LTD.
Taewoong SEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SACRIFICIAL PROTECTION LAYER FOR ENVIRONMENTALLY SENSITIVE SURFACES...
Publication number
20240429040
Publication date
Dec 26, 2024
LAM RESEARCH CORPORATION
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...
Publication number
20240420973
Publication date
Dec 19, 2024
TOKYO ELECTRON LIMITED
Michael Carcasi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mobile Cart for Commissioning Semiconductor Processing Tool
Publication number
20240404848
Publication date
Dec 5, 2024
Sam KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DROPLET JET NOZZLE DESIGN
Publication number
20240395579
Publication date
Nov 28, 2024
Applied Materials, Inc.
Manikandan JAYARAMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PR...
Publication number
20240393768
Publication date
Nov 28, 2024
TOKYO ELECTRON LIMITED
Rintaro TAKAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
Publication number
20240385602
Publication date
Nov 21, 2024
Kokusai Electric Corporation
Takatoshi SEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM, APPARATUS, AND METHOD FOR IMPROVING PHOTORESIST COATING OPE...
Publication number
20240387172
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Ming CHEN
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240387207
Publication date
Nov 21, 2024
SEMES CO., LTD.
Ki Won HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR SHUTTERED WAFER CLEANING
Publication number
20240363377
Publication date
Oct 31, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Tsui-Wei WANG
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20240359220
Publication date
Oct 31, 2024
SCREEN Holdings Co., Ltd.
Shigeru YAMAMOTO
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
Publication number
20240355614
Publication date
Oct 24, 2024
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
Publication number
20240355615
Publication date
Oct 24, 2024
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
Publication number
20240355617
Publication date
Oct 24, 2024
TOKYO ELECTRON LIMITED
Hiroshi Nakamura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD OF OPERATING DRIPPAGE PREVENTION SYSTEM
Publication number
20240342745
Publication date
Oct 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chien-Hung WANG
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
APPARATUS FOR MANUFACTURING THIN FILM DEVICES
Publication number
20240339553
Publication date
Oct 10, 2024
Solaires Entreprises Inc.
Alfonso Fabian de la Fuente Sanchez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF
Publication number
20240326406
Publication date
Oct 3, 2024
SEMES CO., LTD.
Seong Soo JEONG
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...
Publication number
20240321586
Publication date
Sep 26, 2024
Canon Kabushiki Kaisha
Steven C. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
Publication number
20240318312
Publication date
Sep 26, 2024
LAM RESEARCH CORPORATION
Rachel E. BATZER
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
GUIDED TRANSPORT PATH CORRECTION
Publication number
20240314941
Publication date
Sep 19, 2024
Kateeva, Inc.
Eliyahu Vronsky
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Methods of Forming Material Within Openings Extending into a Semico...
Publication number
20240297068
Publication date
Sep 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...
Publication number
20240282603
Publication date
Aug 22, 2024
TOKYO ELECTRON LIMITED
Hiroshi MARUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMI...
Publication number
20240282604
Publication date
Aug 22, 2024
Samsung Electronics Co., Ltd.
Sunwoo PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DETECTING LIQUID IN LIQUID PROCESSING APPARATUS
Publication number
20240272554
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Yuichiro KUNUGIMOTO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...