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Apparatus for applying a liquid, a resin, an ink or the like
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H01L21/6715
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/6715
Apparatus for applying a liquid, a resin, an ink or the like
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Patents Grants
last 30 patents
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Patent Grant
Resist pump buffer tank and method of resist defect reduction
Patent number
12,130,553
Issue date
Oct 29, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Yi Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
12,133,297
Issue date
Oct 29, 2024
Tokyo Electron Limited
Yoshifumi Amano
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Film processing method
Patent number
12,119,242
Issue date
Oct 15, 2024
SCREEN Holdings Co., Ltd.
Yuji Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sacrificial protection layer for environmentally sensitive surfaces...
Patent number
12,119,218
Issue date
Oct 15, 2024
Lam Research Corporation
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coater with automatic cleaning function and coater automatic cleani...
Patent number
12,111,575
Issue date
Oct 8, 2024
ACM Research (Shanghai) Inc.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing light emitting device
Patent number
12,100,790
Issue date
Sep 24, 2024
Nichia Corporation
Shinya Mitsuhashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, control method, and computer-readab...
Patent number
12,094,737
Issue date
Sep 17, 2024
Tokyo Electron Limited
Masayuki Kajiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
Patent number
12,094,738
Issue date
Sep 17, 2024
Elemental Scientific, Inc.
Tyler Yost
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier component and coating developer device
Patent number
12,084,756
Issue date
Sep 10, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Buxiang Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Recipe creation method or apparatus utilizing a series of steps acc...
Patent number
12,066,815
Issue date
Aug 20, 2024
Kokusai Electric Corporation
Takatoshi Seki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for cleaning semiconductor wafers
Patent number
12,068,149
Issue date
Aug 20, 2024
ACM Research (Shanghai) Inc.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for shuttered wafer cleaning
Patent number
12,068,179
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsui-Wei Wang
B08 - CLEANING
Information
Patent Grant
System configurations for fabrication of micro-LED displays
Patent number
12,062,735
Issue date
Aug 13, 2024
Applied Materials, Inc.
Hou T. Ng
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for cleaning semiconductor wafers
Patent number
12,062,556
Issue date
Aug 13, 2024
ACM Research (Shanghai) Inc.
Fuping Chen
B08 - CLEANING
Information
Patent Grant
Wafer-level etching methods for planar photonics circuits and devices
Patent number
12,057,332
Issue date
Aug 6, 2024
Ayar Labs, Inc.
Chen Sun
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of operating drippage prevention system
Patent number
12,048,944
Issue date
Jul 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Hung Wang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate processing apparatus, estimation method of substrate proc...
Patent number
12,051,587
Issue date
Jul 30, 2024
Tokyo Electron Limited
Hiroshi Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
12,051,605
Issue date
Jul 30, 2024
Tokyo Electron Limited
Nobuhiro Ogata
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Screen-printing screen and process for obtaining glazings equipped...
Patent number
12,049,093
Issue date
Jul 30, 2024
Saint-Gobain Glass France
André Beyrle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dispensing patterns including lines and dots at high speeds
Patent number
12,052,828
Issue date
Jul 30, 2024
nScrypt, Inc.
Kenneth H. Church
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for treating substrate
Patent number
12,046,466
Issue date
Jul 23, 2024
Semes Co., Ltd.
Yong-Jun Seo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,042,813
Issue date
Jul 23, 2024
SCREEN Holdings Co., Ltd.
Hiroshi Abe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Coating film forming method and coating film forming apparatus
Patent number
12,036,573
Issue date
Jul 16, 2024
Tokyo Electron Limited
Shougo Inaba
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate treatment apparatus containing elastic support members at...
Patent number
12,027,389
Issue date
Jul 2, 2024
Semes Co., Ltd.
In Hwang Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization process, planarization system, and method of manufact...
Patent number
12,027,373
Issue date
Jul 2, 2024
Canon Kabushiki Kaisha
Steven C. Shackleton
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Guided transport path correction
Patent number
12,028,991
Issue date
Jul 2, 2024
Kateeva, Inc.
Eliyahu Vronsky
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Methods of forming material within openings extending into a semico...
Patent number
12,020,979
Issue date
Jun 25, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Apparatus and method for processing substrate
Patent number
12,014,938
Issue date
Jun 18, 2024
Semes Co., Ltd.
Yong Hee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint lithography methods comprising multiple printheads configur...
Patent number
12,009,233
Issue date
Jun 11, 2024
Canon Kabushiki Kaisha
Amir Tavakkoli Kermani Ghariehali
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated showerhead with thermal control for delivering radical a...
Patent number
12,000,047
Issue date
Jun 4, 2024
Lam Research Corporation
Rachel E. Batzer
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A...
Publication number
20240420973
Publication date
Dec 19, 2024
TOKYO ELECTRON LIMITED
Michael Carcasi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mobile Cart for Commissioning Semiconductor Processing Tool
Publication number
20240404848
Publication date
Dec 5, 2024
Sam KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PR...
Publication number
20240393768
Publication date
Nov 28, 2024
TOKYO ELECTRON LIMITED
Rintaro TAKAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DROPLET JET NOZZLE DESIGN
Publication number
20240395579
Publication date
Nov 28, 2024
Applied Materials, Inc.
Manikandan JAYARAMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
Publication number
20240385602
Publication date
Nov 21, 2024
Kokusai Electric Corporation
Takatoshi SEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM, APPARATUS, AND METHOD FOR IMPROVING PHOTORESIST COATING OPE...
Publication number
20240387172
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Ming CHEN
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240387207
Publication date
Nov 21, 2024
SEMES CO., LTD.
Ki Won HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR SHUTTERED WAFER CLEANING
Publication number
20240363377
Publication date
Oct 31, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Tsui-Wei WANG
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20240359220
Publication date
Oct 31, 2024
SCREEN Holdings Co., Ltd.
Shigeru YAMAMOTO
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
Publication number
20240355614
Publication date
Oct 24, 2024
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
Publication number
20240355615
Publication date
Oct 24, 2024
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
Publication number
20240355617
Publication date
Oct 24, 2024
TOKYO ELECTRON LIMITED
Hiroshi Nakamura
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD OF OPERATING DRIPPAGE PREVENTION SYSTEM
Publication number
20240342745
Publication date
Oct 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chien-Hung WANG
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
APPARATUS FOR MANUFACTURING THIN FILM DEVICES
Publication number
20240339553
Publication date
Oct 10, 2024
Solaires Entreprises Inc.
Alfonso Fabian de la Fuente Sanchez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF
Publication number
20240326406
Publication date
Oct 3, 2024
SEMES CO., LTD.
Seong Soo JEONG
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
PLANARIZATION PROCESS, PLANARIZATION SYSTEM, AND METHOD OF MANUFACT...
Publication number
20240321586
Publication date
Sep 26, 2024
Canon Kabushiki Kaisha
Steven C. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
Publication number
20240318312
Publication date
Sep 26, 2024
LAM RESEARCH CORPORATION
Rachel E. BATZER
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
GUIDED TRANSPORT PATH CORRECTION
Publication number
20240314941
Publication date
Sep 19, 2024
Kateeva, Inc.
Eliyahu Vronsky
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Methods of Forming Material Within Openings Extending into a Semico...
Publication number
20240297068
Publication date
Sep 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...
Publication number
20240282603
Publication date
Aug 22, 2024
TOKYO ELECTRON LIMITED
Hiroshi MARUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMI...
Publication number
20240282604
Publication date
Aug 22, 2024
Samsung Electronics Co., Ltd.
Sunwoo PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DETECTING LIQUID IN LIQUID PROCESSING APPARATUS
Publication number
20240272554
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Yuichiro KUNUGIMOTO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
Publication number
20240274438
Publication date
Aug 15, 2024
TOKYO ELECTRON LIMITED
Takashi YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240261814
Publication date
Aug 8, 2024
SCREEN Holdings Co., Ltd.
Hiroshi ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR EXHAUST CLEANING
Publication number
20240246124
Publication date
Jul 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei Chang CHENG
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
Publication number
20240242985
Publication date
Jul 18, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Method of Making a Substrate with Improved...
Publication number
20240234195
Publication date
Jul 11, 2024
UTAC Headquarters Pte. Ltd.
Hua Hong Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR DISPENSING A LIQUID
Publication number
20240234182
Publication date
Jul 11, 2024
LAM RESEARCH AG
Karl David HENRIKS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240234173
Publication date
Jul 11, 2024
SHIBAURA MECHATRONICS CORPORATION
Hiroki KOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AIRFLOW CONTROL SYSTEM AND AIRFLOW CONTROL METHOD
Publication number
20240222148
Publication date
Jul 4, 2024
Semes Co., Ltd.
Ickkyun KIM
H01 - BASIC ELECTRIC ELEMENTS