Claims
- 1. A method for electroless gold deposition, comprising:
- providing a substrate;
- forming copper circuit features on said substrate by an additive process employing a catalyst material having palladium, wherein the palladium is a primary component to initiate the deposition of copper on said substrate;
- treating said substrate with an alkaline cleaner;
- rinsing said substrate subsequent to said treatment with an alkaline cleaner;
- treating said rinsed substrate with sodium persulfate;
- rinsing said substrate subsequent to said sodium persulfate treatment;
- treating said rinsed substrate with diluted sulfuric acid;
- rinsing said substrate subsequent to said diluted sulfuric acid treatment;
- immersing said rinsed substrate in a gold deposition solution whereby gold is directly deposited on exposed surfaces of the copper circuit features in the presence of detectable amounts of said palladium catalyst on said sides of the copper circuit features;
- rinsing said substrate subsequent to immersion in said gold deposition solution; and
- drying said rinsed substrate.
- 2. The method of claim 1 wherein spacing between copper circuit features is about 2 mil or less.
- 3. The method of claim 1 wherein the gold is deposited to provide a thickness of about 5,000 .ANG. to about 15,000 .ANG..
- 4. The method of claim 1 wherein the dilute sulfuric acid comprises about 2% sulfuric acid.
- 5. A method for electroless gold deposition, as set forth in claim 1, wherein treating said substrate with an alkaline cleaner includes immersing said substrate in a bath containing said alkaline cleaner for about 1.0 minute.
- 6. A method for electroless gold deposition, as set forth in claim 1, wherein rinsing said substrate subsequent to said treatment with an alkaline cleaner includes rinsing said substrate in a flowing stream of deionized water for about 2.0 minutes.
- 7. A method for electroless gold deposition, as set forth in claim 1, wherein treating said rinsed substrate with sodium persulfate includes immersing said substrate in a bath consisting of about 10% sodium persulfate for about 1.0 minute.
- 8. A method for electroless gold deposition, as set forth in claim 1, wherein rinsing said substrate subsequent to said sodium persulfate treatment includes rinsing said substrate in a flowing stream of deionized water for about 2.0 minutes.
- 9. A method for electroless gold deposition, as set forth in claim 1, wherein treating said substrate with diluted sulfuric acid, includes immersing said substrate in a bath consisting of about 2% sulfuric acid for about 1.0 minute.
- 10. A method for electroless gold deposition, as set forth in claim 1, wherein rinsing said substrate subsequent to treatment with diluted sulfuric acid includes rinsing said substrate in a flowing stream of deionized water for about two minutes.
- 11. A method for electroless gold deposition, as set forth in claim 1, wherein immersing said rinsed substrate in a gold deposition solution includes heating said gold deposition solution to a temperature of about 85.degree. C. and immersing said substrate in said heated gold deposition solution for from about 10 to about 15 minutes.
- 12. A method for electroless gold deposition, as set forth in claim 1, wherein immersing said rinsed substrate in a gold deposition solution includes heating said gold deposition solution to a temperature of about 85.degree. C. and immersing said substrate in said heated gold deposition solution for a period of time sufficient to form a conformal coating of gold on the exposed copper surfaces of said copper features having a thickness of from about 5,000 .ANG. to about 15,000 .ANG..
- 13. A method for electroless gold deposition, as set forth in claim 1, wherein said rinsing said substrate subsequent to immersion in said gold deposition solution includes rinsing said substrate in a flowing stream of deionized water for about 2.0 minutes.
- 14. A method for electroless gold deposition, as set forth in claim 1, wherein said drying said rinsed substrate includes drying said substrate in air.
Parent Case Info
This application is a continuation-in-part of Ser. No. 08/700,627, filed Aug. 8, 1996 now abandoned.
US Referenced Citations (14)
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
700627 |
Aug 1996 |
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