Number | Date | Country | Kind |
---|---|---|---|
3315719 | Apr 1983 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4411734 | Maa | Oct 1983 | |
4444617 | Whitcomb | Apr 1984 |
Number | Date | Country |
---|---|---|
15403 | Sep 1980 | EPX |
Entry |
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"Refractory Silicides for Integrated Circuits", J. Vac. Sci. Techol., 17(4), Jul./Aug. 1980; pp. 775-792. |
"Tantalum Silicide/Polycrystalline Silicon-High Conductivity Gates for CMOS LSI Applications"; J. Vac. Sci. Technol., 18(2), Mar. 1981; pp. 345 to 348. |
"Molybdenum Etching Using CCI.sub.4 /O.sub.2 Mixture Gas"; Japanese Journal of Applied Physics, Jan. 1982; pp. 168 to 172. |