This is a division of application Ser. No. 07/334,253, filed Apr. 6, 1989.
Number | Name | Date | Kind |
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4600934 | Aine et al. | Jul 1986 | |
4732647 | Aine | Mar 1988 | |
4783237 | Aine et al. | Nov 1988 | |
4891255 | Ciarlo | Jan 1990 | |
4893509 | MacIver et al. | Jan 1990 |
Entry |
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Article Entitled, "Tuning Forks in Silicon", by Rudolf A. Buser, Nico F. de Rooij; pp. 94 & 95 of IEEE Catalog Number 89THO249-3, dated Feb. 20-22, 1989. |
Article Entitled, "Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications", by R. Buser, B. Stauffer, N. F. de Rooij; pp. 879 & 800 of Extended Abstracts, vol. 86-2, dated Oct. 19-24, 1986. |
Number | Date | Country | |
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Parent | 334253 | Apr 1989 |