Number | Name | Date | Kind |
---|---|---|---|
4159217 | Selinas et al. | Jun 1979 | |
5087297 | Pouliquen | Feb 1992 | |
5160388 | Legresy et al. | Nov 1992 | |
5268236 | Dumont et al. | Dec 1993 | |
5456815 | Fukuyo et al. | Oct 1995 |
Entry |
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J. Vac. Sci Technol. A 5(4), Crystallographic target effects in magnetron sputtering, C. E. Wickersham, Jr., Jul./Aug. 1987. |