Number | Date | Country | Kind |
---|---|---|---|
61-258979 | Oct 1986 | JPX | |
61-258980 | Oct 1986 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4361600 | Brown | Nov 1982 | |
4549927 | Goth et al. | Oct 1985 | |
4641416 | Iranmanesh et al. | Feb 1987 | |
4666556 | Fulton et al. | May 1987 |
Entry |
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J. Vac. Sci. Technol., J. M. Morel et al., "High Resolution Steep Profile Resist Patterns", Nov./Dec. 1979, pp. 1620-1624. |