Number | Name | Date | Kind |
---|---|---|---|
3761895 | Ellis et al. | Sep 1973 | |
3897274 | Stehlin et al. | Jul 1975 | |
3929512 | Nicholas et al. | Dec 1975 | |
3931632 | Uchida et al. | Jan 1976 | |
3945031 | Kahng et al. | Mar 1976 | |
3952325 | Beale et al. | Apr 1976 | |
4021787 | Stein et al. | May 1977 | |
4027320 | Jacobs et al. | May 1977 | |
4035820 | Matzen | Jul 1977 | |
4047974 | Harari | Sep 1977 | |
4081292 | Aoki et al. | Mar 1978 |
Entry |
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Learn et al., ". . . Ion-Impl. . . . in . . . Si/SiO.sub.2 System," Jour. Appl. Phys., 48, (1977), 308. |
Young et al., ". . . Electron Trapping . . . SiO.sub.2 . . . Al," Jour. Electron Materials, 6, (1977), 569. |