Number | Name | Date | Kind |
---|---|---|---|
4321310 | Ulion et al. | Mar 1982 | |
4716050 | Green et al. | Dec 1987 | |
4916022 | Solfest et al. | Apr 1990 | |
5034284 | Bornstein et al. | Jul 1991 | |
5137426 | Rhoda | Aug 1992 | |
5217756 | Shinzawa | Jun 1993 | |
5238752 | Duderstadt et al. | Aug 1993 | |
5254413 | Maricocchi | Oct 1993 | |
5403669 | Gupta et al. | Apr 1995 |
Entry |
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Pierson, Hugh O. Handbook of Chemical Vapor Deposition (CVD) Principles, Technology and Application, 1992 p. 127. |