After-treatment

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CPC
C23C16/56

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/56After-treatment

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Patents Grantslast 30 patents

Information Patent Grant
Doped or undoped silicon carbide deposition and remote hydrogen pla...
- Patent number 12,300,488
- Issue date May 13, 2025
- Lam Research Corporation
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a nanoscale channel structure
- Patent number 12,297,541
- Issue date May 13, 2025
- Robert Bosch GmbH
- Christoph Schelling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of organic films
- Patent number 12,300,505
- Issue date May 13, 2025
- ASM IP Holding B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of cutting a fine pattern, methods of forming active patter...
- Patent number 12,293,921
- Issue date May 6, 2025
- Samsung Electronics Co., Ltd.
- Sanggyo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film and forming method thereof
- Patent number 12,291,776
- Issue date May 6, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xinlian Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming and patterning color centers
- Patent number 12,286,539
- Issue date Apr 29, 2025
- The Board of Trustees of the Leland Stanford Junior University
- Nicholas Alexander Melosh
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Selective deposition of carbon on photoresist layer for lithography...
- Patent number 12,283,484
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Nancy Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing blocking layers on conductive surfaces
- Patent number 12,281,382
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low refractive index surface layers and related methods
- Patent number 12,281,384
- Issue date Apr 22, 2025
- UChicago Argonne, LLC
- Elena Shevchenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,283,476
- Issue date Apr 22, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate for forming film containing silicon...
- Patent number 12,281,386
- Issue date Apr 22, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film structure including dielectric material layer, method of...
- Patent number 12,276,026
- Issue date Apr 15, 2025
- Samsung Electronics Co., Ltd.
- Bo-Eun Park
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods of forming phosphosilicate glass layers, structures formed...
- Patent number 12,276,021
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Seunghyun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cutting tool
- Patent number 12,269,098
- Issue date Apr 8, 2025
- Sumitomo Electric Hardmetal Corp.
- Susumu Okuno
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate with fluorinated yttrium coatings, and methods of prepari...
- Patent number 12,270,104
- Issue date Apr 8, 2025
- Entegris, Inc.
- Nilesh Gunda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detection chip and modification method therefor
- Patent number 12,269,030
- Issue date Apr 8, 2025
- BOE Technology Group Co., Ltd.
- Yudan Yin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions comprising silacycloalkanes and methods using same for...
- Patent number 12,264,258
- Issue date Apr 1, 2025
- VERSUM MATERIALS US, LLC
- Raymond N. Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Porous nanostructured electrodes for detection of neurotransmitters
- Patent number 12,265,050
- Issue date Apr 1, 2025
- International Business Machines Corporation
- Qing Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 12,261,038
- Issue date Mar 25, 2025
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorescent diamond and method for producing same
- Patent number 12,258,507
- Issue date Mar 25, 2025
- Daicel Corporation
- Motoi Nakao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Methods for depositing tungsten or molybdenum films
- Patent number 12,252,787
- Issue date Mar 18, 2025
- Entegris, Inc.
- Robert Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing non-contiguous metal oxide semiconductors, of...
- Patent number 12,255,066
- Issue date Mar 18, 2025
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Pierre-Vincent Guenery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming structures including transition metal layers
- Patent number 12,241,158
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single crystal composite synthetic diamond material
- Patent number 12,234,570
- Issue date Feb 25, 2025
- ELEMENT SIX (UK) LIMITED
- Andrew Mark Edmonds
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming copper iodide layer and structures including cop...
- Patent number 12,234,548
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polycrystalline ceramic substrate and method of manufacture
- Patent number 12,224,173
- Issue date Feb 11, 2025
- QROMIS, Inc.
- Vladimir Odnoblyudov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,222,643
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching features using a targeted deposition for selecti...
- Patent number 12,217,955
- Issue date Feb 4, 2025
- Lam Research Corporation
- Wenchi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...
- Publication number 20250146131
- Publication date May 8, 2025
- VERSUM MATERIALS US, LLC
- STEVEN GERARD MAYORGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
- Publication number 20250147417
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...
- Publication number 20250149330
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Wenchi LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYCRYSTALLINE CERAMIC SUBSTRATE AND METHOD OF MANUFACTURE
- Publication number 20250149333
- Publication date May 8, 2025
- QROMIS, Inc.
- Vladimir Odnoblyudov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...
- Publication number 20250140548
- Publication date May 1, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Jun IIOKA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...
- Publication number 20250140549
- Publication date May 1, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Jun IIOKA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE
- Publication number 20250137131
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Minju LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A CUTTING TOOL
- Publication number 20250137137
- Publication date May 1, 2025
- Rollomatic S.A.
- Christian KRUMM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20250129485
- Publication date Apr 24, 2025
- Bryan C. Hendrix
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESS CHAMBER GAS FLOW IMPROVEMENT
- Publication number 20250122621
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF ORGANIC FILMS
- Publication number 20250118562
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Eva E. Tois
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
HARD MASK LAYER AND FORMATION METHOD THEREOF
- Publication number 20250118569
- Publication date Apr 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE INCLUDING A HYDROPHILIC, NON-IONIC COATING FOR SIZE EXCLUSIO...
- Publication number 20250114786
- Publication date Apr 10, 2025
- WATERS TECHNOLOGIES CORPORATION
- Mathew H. DeLano
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEM AND METHOD FOR ELECTRICALLY CONDUCTIVE MEMBRANE SEPARATION
- Publication number 20250114746
- Publication date Apr 10, 2025
- SiTration, Inc.
- Brendan D. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION METHODS FOR 3D STRUCTURES BASED ON ROLLING-UP KIRIGAMI...
- Publication number 20250109487
- Publication date Apr 3, 2025
- City University of Hong Kong
- Lixin Dong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION
- Publication number 20250109490
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Krzysztof Kamil Kachel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTION METHOD AND DEVICE FOR BATTERY COMPONENTS, SECONDARY BATT...
- Publication number 20250112345
- Publication date Apr 3, 2025
- CONTEMPORARY AMPEREX TECHNOLOGY (HONG KONG) LIMITED
- Ting Li
- B60 - VEHICLES IN GENERAL
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20250104998
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Shoma MIYATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SEMICONDUCTOR PROCESSING
- Publication number 20250105002
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Hunter Frost
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING DEHYDROGENATION CATALYST USING ATOMIC LAYER...
- Publication number 20250101587
- Publication date Mar 27, 2025
- Korea Institute of Science and Technology
- Yong Min KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250101593
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FILLING TRENCHES ON SUBSTRATE SURFACE
- Publication number 20250104999
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Alexey Remnev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250092514
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masanobu IGETA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...
- Publication number 20250092512
- Publication date Mar 20, 2025
- GOODRICH CORPORATION
- STEVEN POTEET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASS...
- Publication number 20250092509
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Bhagyesh Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF IODINE-CONTAINING CARBON FILMS
- Publication number 20250092518
- Publication date Mar 20, 2025
- American Air Liquide, Inc.
- Phong NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiO POWDER PRODUCTION METHOD AND SPHERICAL PARTICULATE SiO POWDER
- Publication number 20250091883
- Publication date Mar 20, 2025
- OSAKA TITANIUM TECHNOLOGIES CO.,LTD.
- Kohki TAKESHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING EPITAXIAL MATERIAL, STRUCTURE FORMED USING THE...
- Publication number 20250084534
- Publication date Mar 13, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSULATING DEVICE AND METHOD FOR MANUFACTURING INSULATING DEVICE
- Publication number 20250087411
- Publication date Mar 13, 2025
- Kabushiki Kaisha Toshiba
- Kazuyuki ITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS
- Publication number 20250076550
- Publication date Mar 6, 2025
- Modulight Corporation
- Timo Aho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

After-treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Doped or undoped silicon carbide deposition and remote hydrogen pla...

Method for producing a nanoscale channel structure

Method and apparatus for low temperature selective epitaxy in a dee...

Deposition of organic films

Methods of cutting a fine pattern, methods of forming active patter...

Film and forming method thereof

Method for forming and patterning color centers

Selective deposition of carbon on photoresist layer for lithography...

Methods for depositing blocking layers on conductive surfaces

Low refractive index surface layers and related methods

Method of manufacturing semiconductor device, substrate processing...

Method of processing substrate for forming film containing silicon...

Thin film structure including dielectric material layer, method of...

Methods of forming phosphosilicate glass layers, structures formed...

Cutting tool

Substrate with fluorinated yttrium coatings, and methods of prepari...

Detection chip and modification method therefor

Advanced temperature control for wafer carrier in plasma processing...

Compositions comprising silacycloalkanes and methods using same for...

Porous nanostructured electrodes for detection of neurotransmitters

Gapfill of variable aspect ratio features with a composite PEALD an...

Fluorescent diamond and method for producing same

Methods for depositing tungsten or molybdenum films

Method for producing non-contiguous metal oxide semiconductors, of...

Method for forming structures including transition metal layers

Single crystal composite synthetic diamond material

Methods of forming copper iodide layer and structures including cop...

Polycrystalline ceramic substrate and method of manufacture

Method of manufacturing a semiconductor device and pattern formatio...

Method for etching features using a targeted deposition for selecti...

Patents Applicationslast 30 patents

COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAI...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...

METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...

POLYCRYSTALLINE CERAMIC SUBSTRATE AND METHOD OF MANUFACTURE

PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...

PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FO...

DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE

METHOD FOR PRODUCING A CUTTING TOOL

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

PROCESS CHAMBER GAS FLOW IMPROVEMENT

DEPOSITION OF ORGANIC FILMS

HARD MASK LAYER AND FORMATION METHOD THEREOF

DEVICE INCLUDING A HYDROPHILIC, NON-IONIC COATING FOR SIZE EXCLUSIO...

SYSTEM AND METHOD FOR ELECTRICALLY CONDUCTIVE MEMBRANE SEPARATION

FABRICATION METHODS FOR 3D STRUCTURES BASED ON ROLLING-UP KIRIGAMI...

SELECTIVE DEPOSITION

PROTECTION METHOD AND DEVICE FOR BATTERY COMPONENTS, SECONDARY BATT...

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

METHOD FOR SEMICONDUCTOR PROCESSING

METHOD OF MANUFACTURING DEHYDROGENATION CATALYST USING ATOMIC LAYER...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS OF FILLING TRENCHES ON SUBSTRATE SURFACE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...

SELECTIVE DEPOSITION OF ORGANIC POLYMER MATERIAL AND DEPOSITION ASS...

DEPOSITION OF IODINE-CONTAINING CARBON FILMS

SiO POWDER PRODUCTION METHOD AND SPHERICAL PARTICULATE SiO POWDER

METHOD OF DEPOSITING EPITAXIAL MATERIAL, STRUCTURE FORMED USING THE...

INSULATING DEVICE AND METHOD FOR MANUFACTURING INSULATING DEVICE

SYSTEM AND METHOD FOR FABRICATING HIGH-ASPECT-RATIO GRATINGS