Claims
- 1. A method for managing processes that are successively carried out by a plurality of individual apparatus in a production line to produce operational finished articles from unfinished articles comprising:
- inputting a recipe to each of a plurality of individual production apparatus, each apparatus carrying out at least one process in a production line being supplied with unfinished articles at the beginning of the production line, producing partly finished articles in the production line and producing operational finished articles at the end of the production line;
- monitoring data concerning at least one of the processes which has already been carried out on partially finished articles in accordance with at least one recipe;
- simulating the operational characteristics of finished articles from the data concerning the partially finished articles and the recipes input to the production apparatus for producing finished articles from the partially finished articles;
- determining process conditions for the processes for production of finished articles from the partially finished articles in response to the simulation of operational characteristics to produce finished articles having desired operational characteristics; and
- controlling the conditions in response to the determined process conditions of at least one process to be carried out to produce, from partially finished articles, finished articles having the desired operational characteristics.
- 2. A method for managing processes that are successively carried out by a plurality of individual apparatus in a production line to produce operational finished articles from unfinished articles and a plurality of individual inspection apparatus for obtaining data concerning partially finished articles in the production line comprising:
- inputting a recipe to each of a plurality of individual production apparatus, each apparatus carrying out at least one process in a production line being supplied with unfinished articles at the beginning of the production line, producing partly finished articles in the production line and producing operational finished articles at the end of the production line;
- monitoring data concerning at least one of the processes which has already been carried out on partially finished articles in accordance with at least one recipe;
- collecting data concerning at least one inspection of partially finished articles processed in accordance with at least one of the recipes;
- simulating the operational characteristics of finished articles from the data concerning the partially finished articles and the recipes input to the production apparatus for producing finished articles from the partially finished articles;
- determining process conditions for the processes for production of finished articles from the partially finished articles in response to the simulation of operational characteristics of finished articles and the collected data in order to produce finished articles having desired operational characteristics; and
- controlling the conditions in response to the determined process conditions of at least one process to be carried out to produce, from partially finished articles, finished articles having the desired operational characteristics.
Priority Claims (1)
Number |
Date |
Country |
Kind |
62-83415 |
Apr 1987 |
JPX |
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Parent Case Info
This application is a continuation of application Ser. No. 07/176,863, filed Apr. 1, 1988, now U.S. Pat. No. 4,901,242.
US Referenced Citations (6)
Non-Patent Literature Citations (1)
Entry |
"Automated Semiconductor Wafer Processing", Microelectronics Manufacturing and Testing, Apr. 1983, pp. 46-47. |
Continuations (1)
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Number |
Date |
Country |
Parent |
176863 |
Apr 1988 |
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