Number | Date | Country | Kind |
---|---|---|---|
63-324925 | Dec 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
RE32613 | Lepselter et al. | Feb 1988 | |
4577396 | Yamamoto et al. | Mar 1986 | |
4622735 | Shibata | Nov 1986 | |
4677736 | Brown | Jul 1987 | |
4731318 | Roche et al. | Mar 1988 | |
4816421 | Dynes et al. | Mar 1989 | |
4908334 | Zuhr et al. | Mar 1990 | |
4912061 | Nast | Mar 1990 |
Number | Date | Country |
---|---|---|
59-110115 | Jun 1984 | JPX |
59-181672 | Oct 1984 | JPX |
60-175456 | Sep 1985 | JPX |
61-114524 | Jun 1986 | JPX |
63-313818 | Dec 1988 | JPX |
Entry |
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English-language Abstracts corresponding to the documents listed under AS, AT, and AU. |
Japanese Search Report 63-324925, published Aug. 10, 1993. |
"TiSi.sub.2 and TiN Formation By Ti-Ion Implantation and Their Applications to MOS Devices", Y Omura, et al. Extended Abstracts of the 20th Conference on Solid State Devices and Materials, Aug., 1988, pp. 93-96. |