Number | Date | Country | Kind |
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9-309705 | Oct 1997 | JP |
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5247533 | Okazaki et al. | Sep 1993 | |
5496766 | Amano et al. | Mar 1996 | |
5661074 | Tischler | Aug 1997 | |
5747832 | Nakamura et al. | May 1998 | |
5932896 | Sugiura et al. | Aug 1999 |
Entry |
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Wolf, Stanley “Silicon Processing For The VLSI Era vol. I: Process Technology”, Lattice Press, pp. 465-471., 1986. |