Patent Application
20180289946
The present invention belongs to the field of electrical conductors, electrical conductive strips, paths, lines, arrays or the like. In particular, the present invention relates to elastic, preferably highly conductive electrical connectors such as bendable and/or stretchable electrical conductors. In more detail, the present invention relates to a method for manufacturing electrical conductors, electrical conductive strips, paths, lines, arrays or the like. According to the present invention there is further provided a method for manufacturing electrodes or conductive paths in general, in particular for manufacturing stretchable electrical conductors, electrode arrays, paths, strips or the like. Still in more details, according to the present invention liquid and solid metals are used, in combination, for producing and/or manufacturing electrical conductors, electrode arrays, conductive circuits, paths, strips or the like, in particular bendable and/or stretchable.
Flexible and/or bendable and/or stretchable conductors such as, for instance, conductive arrays, paths, strips, lines or the like are becoming more and more popular and find use in several applications. For instance, stretchable arrays comprising thin or even ultrathin conductive films (made of either metal or conductive elastomer composites) are becoming more and more popular and find convenient applications in the fields of, for instance, wearable electronics, and/or soft robotics and/or implantable neuroprosthetic interface applications, and/or as electrode arrays for in vitro cell culture and tissue slice culture or the like; in fact, the most important characteristic or feature of stretchable microelectrode arrays, films, strips or lines of the kind mentioned above, relates to the fact that same can withstand mechanical deformations such as flexion, stretch, torsion or the like, without electrical failure or loss of their electrical features and properties (in particular of their electrical conductivity).
Accordingly, stretchable conductive micro arrays or circuits, films, paths or the like (in the following referred to as stretchable (conductive) interconnections) are particularly suitable to be used as a bioelectronics interface with the spinal cord, brain or peripheral nerves or soft biological tissue, for instance for the purpose of stimulating and/or recording neurological or cardiac activity (both in vitro and in vivo), as well as for monitoring hippocampal electrical activity after traumatic brain injury or bladder afferent activity, or even for stimulating electrical potential of excitable cells or the like.
Among other usual and very convenient applications of stretchable conductive micro arrays, films, paths, lines or the like, their use as, for instance, stretchable conductors for stretchable PCBs (Printed Circuit Boards), and/or stretchable interconnections, and/or sensing materials or the like may be mentioned.
It has in fact been verified that the electrical properties of stretchable interconnections are maintained during their deformation and even after repeated torsions, extensions, and therefore facilitate both the recording and the transmission of small amplitude signals (for instance biological) and ensure therefore the required reliability in each of the above mentioned applications. In particular, in both cases of in vitro and in vivo applications, stretchable interconnections did not show any degradation of the implant electrical functionality, even after several months from implantation.
In the most common stretchable interconnections according to the prior art, the conductive strips or films may be formed by using either solid or liquid conductive materials. In particular, as to the prior art interconnections with solid conductive films, same may be formed according to one of the following solutions:
a) inducing conductivity in inherently non-conductive elastic materials (for instance by adding carbon to an elastomer);
b) engineering elasticity within a non-elastic but conductive film (for instance by forming microcracks in a gold film);
c) engineering elasticity in a non-elastic but conductive film (for instance by macroscopic patterning the film to enable buckling).
Several disadvantages and/or drawbacks are however still related to stretchable interconnections (both stretchable and non-stretchable) with solid conductive films formed according to one of the above mentioned solutions a) to c), such as, for instance, low electrical conductivity a (ranging from 100 to 1000 S/cm in the case of films of composite materials according to solution a), amounting to 106 S/cm for microcracked Au according to solution b)).
The above disadvantages and/or drawbacks strongly limit the convenient applications of interconnections with solid tracks or films.
Moreover, as a further drawback, the density of the solid conductive tracks is strongly limited by the need of carrying out very complex, multistep processes (comprising transient packaging), which moreover result in very high manufacturing and/or production costs.
In an attempt to overcome the above summarized drawbacks, stretchable interconnections with liquid conductive strips, films, paths or the like (obtained for instance by deposing a liquid film on an elastic substrate and subsequently patterning the film) have been proposed in the recent years. However, a deep investigation as to the real advantages offered by liquid metals is still needed. Furthermore, reliable and cost efficient manufacturing processes for the batch production of stretchable interconnections using liquid metals are still mostly not available to the manufacturers.
For instance, in those cases in which the conductive films are formed by injecting a liquid metal, micro channels have to be formed on a substrate for hosting the liquid metal; however, in these cases manufacturing costs arise and the density of the conductive strips is strongly limited by the micro channels.
As to conductive films formed by printing a liquid metal on a substrate, the films may not be formed as thin as required by the most common integrated microelectronics circuits (see above).
It is therefore an object of the present invention that of overcoming or at least reducing the drawbacks affecting both the stretchable interconnections and methods for manufacturing same according to the prior art.
In particular, a goal of the present invention is that of proposing a solution allowing to overcome the drawbacks affecting the interconnections according to the prior art, in particular both those comprising solid conductive strips or tracks and those comprising liquid conductive strips or tracks.
In detail, a further goal of the present invention is that of proposing a method for the reliable and easy formation of very thin (<5 μm) conductive interconnections (both stretchable and non-stretchable, depending on the needs and/or circumstances) with films, paths, arrays or the like with high or even very high (and stable) electrical conductivity.
Moreover, according to the present invention, stretchable interconnections shall be manufactured with a limited need of carrying out complex, multistep processing and at low or at least contained costs, wherein it shall be possible to pattern the conductive films with very high in-plane aspect ratios and limited or contained thickness.
The methods according to the present invention have revealed to be particularly suitable and/or convenient for manufacturing conductive stretchable circuits, arrays and/or interconnections in general.
Accordingly, this is the reason why, in the following, description will be given of examples according to which the methods according to the present invention are carried out for manufacturing stretchable circuits and/or interconnections.
However, it has to be noted that the possible applications of the methods according to the present invention are not limited to the manufacturing of stretchable circuits and/or interconnections; to the contrary, the methods according to the present invention are adapted to be carried out for the formation on any substrate of either stretchable or not stretchable circuits, arrays, paths, films or the like and conductors in general.
The present invention is based on the consideration that the drawbacks affecting the methods according to the prior art for 30 manufacturing conductive interconnections, in particular stretchable, may be efficiently and conveniently overcome by using, for the formation of conductive strips on a substrate, both solid and liquid metals.
A further consideration on which the present invention is based relates to the fact that by opportunely selecting both the solid and the liquid metals, and by bringing them into contact, a conductive film or strip can be formed comprising both a solid alloy and residual liquid metal, thus offering excellent stretchability and conductivity.
A further consideration on which the present invention is based relates to the fact that liquid metals (such as gallium or eutectic gallium indium (EGaIn)) typically do not wet stretchable substrates (such as silicone). By depositing a well-selected metal layer on the substrate prior to liquid metal deposition, the liquid metal alloys with the metal layer in a first stage and enhances the wettability. Then, an excess of liquid metal is further deposited to enhance conductivity and stretchability of the resulting film. The selected deposition method for the liquid metal (as an example, physical vapor deposition) enables control of the ratio n between the number of atoms of liquid metal and the number of atoms of solid metal in the resulting biphasic (solid-liquid) layer or film, in order to maintain a micrometric thickness while guaranteeing high conductivity and high stretchability of the obtained films.
Still according to the considerations on the basis of the present invention further advantages arise by opportunely selecting the methods and/or processes for bringing into contact the solid and liquid metals used for forming the conductive strips, films, paths and interconnections in general.
On the basis of the considerations as stated above, a first embodiment of the present invention relates to a method for manufacturing an electrical conductor, said method comprising:
providing a substrate;
depositing a solid metal conductive layer or film on said 20 substrate;
depositing a liquid metal on said solid layer;
allowing said liquid metal and said solid layer to alloy by diffusion of said liquid metal into said solid layer or film so 25 as to form a solid conductive layer or film of said alloy;
allowing said liquid metal to further infiltrate said alloy so as to form percolating paths of said liquid metal in said solid conductive layer or film, thus forming a biphasic conductive layer comprising said solid alloy as a solid phase and said paths of said liquid metal as a liquid phase dispersed therein.
According to an embodiment, said method may further comprise allowing said liquid metal to further accumulate into bulges, locally yet randomly, on or within said biphasic conductive layer.
According to an embodiment, said liquid metal may be deposited on said solid conductive metal layer or film by thermal vapour deposition of said liquid metal.
According to a further embodiment said liquid metal may comprise one of gallium and a gallium-based alloy.
According to a further embodiment, said solid metal conductive layer or film may be sputtered on said substrate.
Eventually, said solid layer may be made of one of Au, Pd, Pt, Ir, and an alloy thereof.
Preferably, the thickness of said solid layer is between 10 and 1000 nm, more preferably 60 nm
Advantageously, the ratio n between the number of atoms of said liquid metal and the number of atoms of said solid metal in said biphasic layer or film is between 2 and 50, preferably 13.
According to an embodiment, said substrate may be an elastomeric substrate, preferably a silicone or a polydimethylsiloxane (PDMS) substrate.
Further embodiments of the method according to the present invention are specified in the appended method claims.
The present invention further relates to an electrical conductor manufactured by carrying out one of the methods according to the present invention, for instance one of them as summarized above, said electrical conductor comprising:
a substrate and a conductive layer or film on said substrate;
wherein said conductive layer or film is a biphasic conductive layer with a solid metal alloy as a solid phase and percolating paths and bulges of a liquid metal as a liquid phase dispersed therein.
According to an embodiment, said solid metal alloy may be an alloy of one of gallium and a gallium-based alloy, alloyed with one of Au, Pd, Pt, Ir and an alloy thereof.
According to a further embodiment, said percolating paths and bulges of a liquid metal are made of one of gallium and a gallium-based alloy.
According to a further embodiment, the thickness of said solid metal alloy layer or film may be between 10 and 1000 nm, preferably 60 nm
Eventually, the ratio n between the number of atoms of said liquid metal and the number of atoms of said solid metal in said biphasic layer or film may be between 2 and 50, preferably 13.
According to the needs and/or circumstances, said substrate may be an elastomeric substrate, preferably a silicone or a PDMS substrate.
Further eventual embodiments of one or both of the method and conductor according to the present invention are defined in the appended claims.
In the following, description will be given of the embodiments of the present invention depicted in the drawings. It has however to be noted that the present invention is not limited to the embodiments depicted in the drawings and described below; to the contrary, the present invention comprises all those embodiments which fall within the scope of the appended claims.
In the drawings:
a and 6 show schematic representations or views of a conductive film according to one embodiment of the present invention;
a and 8, 8a show scanning electron microscope (SEM) images of a conductive film according to an embodiment of the present invention;
a and 10, 10a show SEM images of the conductive film depicted in
As depicted in
During a second step, as depicted in
During a third step as depicted in
During the third step, the liquid metal (for instance gallium Ga) diffuses into the solid film 40 and alloys with the solid film to 5 form an alloy (for instance AuGa2 in case Au is used for forming the solid conductive layer 40 and Ga is used as a liquid metal). Moreover, once the solid film is totally alloyed, the liquid metal starts to accumulate so that percolating paths and bulges of liquid metal are formed.
The situation at the end of the third step is therefore that depicted in
For the sake of clarity, reference is made to
As apparent in particular from
The advantages of a biphasic conductive film of the kind disclosed above are schematically depicted in
As to the liquid metals, gallium and a gallium-based alloy may be used according to the present invention; however, gallium has revealed to provide the best results since the stoichiometry of the evaporated film is the same as the stoichiometry of the original material. Moreover, as to the deposition of the liquid metal, thermal evaporation of one or both of the above mentioned gallium and gallium-based alloy has revealed to be the most preferred solution.
As to the solid metal(s) to be used for the formation of the 10 alloying layer 40, one of Au, Pd, Pt and Ir and an alloy thereof may be used according to the present invention.
Moreover, within the frame of the present invention several parameters of the thermal evaporation step (
The most convenient thickness for the alloying solid layer or film 40 has been investigated too; in this respect, for each of Au, Pt, Pd and Ir a thickness of about 60 nm (≥10 nm and ≤1000 nm) offered the best electromechanical properties and/or results.
According to the present invention, during an optional further step (not depicted in the drawings), the biphasic film 43 may be patterned so as to obtain the desired conductive arrays and/or paths, films, lines or the like wherein for the purpose of patterning the film 43, for instance one or both of stencil and photolithography may be used. Still according to the present invention, and depending on the needs and/or circumstances, the biphasic film or array 43 can be encapsulated during a further step (not depicted in the drawings), for instance by spin-coating a further PDMS layer.
Still according to the present invention and depending on the needs and/or circumstances, during a further optional step not depicted in the drawings, one or more through vias can be formed in the upper encapsulation layer so as to expose one or more portions of the conductive biphasic film or array 43, wherein the exposed portions can be used for instance as contacting pads for electrical connection of the film 43, for instance wiring connection or stacking and connecting multiple metallized layers.
The above mentioned patterning and/or encapsulation and/or 15 wiring steps are not disclosed in detail for the sake of conciseness.
In the following, reference is made to
Moreover, it has to be noted that, within the meaning of the following disclosure, a 50% applied strain has to be understood as meaning that a 50% strain was applied to the elastomeric substrate underlying the biphasic film, for instance the substrate depicted in
The real SEM images of the drawings relate to a AuGa2 biphasic 30 conductive film with a ratio nGa/nAu corresponding to 13 formed according to the present invention. Comparing the images 9, 9a, 10 and 10a with the images 7, 7a, 8 and 8a, respectively, confirms that, in the case of a biphasic conductive film according to the present invention, when the biphasic film is subjected to a strain, for instance when the film is stretched, the liquid metal (for instance gallium) is able to flow and fill in the cracks eventually induced by the stretch. In particular, no degradations of its electrical performance (essentially its conductivity) arise up to 80% mechanical strain.
It has therefore been demonstrated with the above description that biphasic films and manufacturing methods thereof according to the present invention allow to obtain the wished results, thus overcoming the drawbacks affecting the prior art conductive films (either solid or liquid) and manufacturing methods thereof.
It has in particular been demonstrated by means of the above disclosure that according to the present invention, both stretchable and non-stretchable conductive interconnections (in particular conductive micro interconnections) may be formed. By way of example, as described, stretchable interconnections may be formed by forming the biphasic film according to the present invention on a stretchable substrate, for instance a rubber substrate, in particular a PDMS substrate. However, non-stretchable interconnections may be formed as well, for instance by forming the biphasic film on a non-stretchable substrate.
Whilst the present invention has been clarified by means of the above description of its embodiments as depicted in the drawings, the present invention is not limited to the embodiments depicted in the drawings and/or described above.
| Number | Date | Country | Kind |
|---|---|---|---|
| 15192402.4 | Oct 2015 | EP | regional |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/EP2016/076174 | 10/28/2016 | WO | 00 |
