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Number | Name | Date | Kind |
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4923824 | Fertig et al. | May 1990 | |
5047358 | Kosiak et al. | Sep 1991 | |
5356822 | Lin et al. | Oct 1994 |
Number | Date | Country |
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61-174667 | Aug 1986 | JPX |
64-64251 | Mar 1989 | JPX |
Entry |
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Ghandhi, "VLSI Fabricaton Principles, Silicon and Gellium Arsenide", 1983, pp. 346-348. |
Wolf, "Silicon Processing for the VLSI Era, vol. 2;" 1990, pp. 383-386. |