Patent Grant
10545404
The present invention relates to a production method of a pattern-formed body having a pattern of different surface free energy. The present application claims a priority based on Japanese Patent Application No. 2013-122812 applied in Japan on Jun. 11, 2013, which is incorporated herein by reference.
Currently, most of fine patterns for electronic circuits in semiconductor devices, displays, or electronic products are produced by photolithography, but there is a limit to produce inexpensive product with photolithography. In production of electronics products aiming to give a large area, it is difficult to suppress production cost with a production method using lithography.
Considering the aforementioned trends, so-called “printed electronics,” which produces electronic circuits, sensors, or elements utilizing printing techniques, has been studied. This method has attracted attentions as a production method, which can reduce a usage amount of chemical substances, and is friendly to the global environment. Moreover, part of this method has already applied for electrode printing of a membrane keyboard, automobile windshield defogger, or RFID (Radio Frequency Identification) tag antenna.
PTL 1 discloses an intaglio for transferring, surface tension of which is partially reduced. PTL 2 discloses surface modification, which induces a difference in surface free energy, performed on a base.
According to the technique of PTL 1, however, it is necessary to segregate a material having low surface tension in part of the printed surface every time transfer is performed. According to the technique disclosed in PTL 2, moreover, a formation method is complicated, as a surface modification of a base is carried out using a mask pattern.
PTL 1: Japanese Patent Application Laid-Open (JP-A) No. 2007-164070
PTL 2: JP-A No. 2005-52686
The present invention is proposed based on the aforementioned current situations in the art, and provide a production method of a pattern-formed body, which can easily attain a pattern of different surface free energy.
In order to solve the aforementioned problems, a production method of a pattern-formed body of the present invention includes:
applying a resin composition, which contains a first compound exhibiting low surface free energy, and a second compound exhibiting surface free energy higher than the surface free energy of the first compound, onto a base; and
curing the resin composition with bringing the resin composition into contact with a master, to which a pattern has been formed with surface free energy differences, to thereby form, on the base, a cured resin layer to which the pattern of the master has been transferred.
Moreover, the pattern-formed body of the present invention is formed by the aforementioned production method.
Furthermore, the resin composition for transferring surface free energy of the present invention includes:
a first compound exhibiting low surface free energy;
a second compound exhibiting surface free energy higher than the surface free energy of the first compound; and
a photopolymerization initiator,
wherein the first compound contains perfluoropolyether-containing acrylate.
The present invention can easily attain a pattern of different surface free energy, which is formed by transferring a pattern of a master, without a complicated process, such as lithography.
The embodiments of the present invention are specifically described in the following order with reference to drawings, hereinafter.
1. Production method of pattern-formed body
2. Pattern-formed body
3. Examples
The production method of a pattern-formed body according to one embodiment of the present invention includes: applying a resin composition, which contains a first compound exhibiting low surface free energy, and a second compound exhibiting surface free energy higher than the surface free energy of the first compound, onto a base; and curing the resin composition with bringing the resin composition into contact with a master, to which a pattern has been formed with surface free energy differences, to thereby form, on the base, a cured resin layer to which the pattern of the master has been transferred.
Each step is described through
The base 11 is not particularly limited, and polyethylene terephthalate (PET), glass, or polyimide can be used as the base 11. Moreover, a transparent material or an opaque material can be used as the base 11. In the case where a UV-curable resin composition is used as the resin composition 12, ultraviolet rays can be applied from the side of the base 11 by using, as the base 11, a transparent material that transmits ultraviolet rays.
The resin composition 12 contains a first compound exhibiting low surface free energy, and a second compound exhibiting surface free energy higher than the surface free energy of the first compound.
As for the first compound, a surface adjusting agent, such as so-called “an anti-blocking agent,” “a slipping agent,” “a leveling agent,” and “an antifouling agent” can be used. The first compound is preferably a fluororesin-based compound, or a silicone resin-based compound. Examples of the fluororesin-based compound include a perfluoropolyether group-containing compound, and a perfluoroalkyl group-containing compound. Examples of the silicone resin-based compound include a polydimethylsiloxane-containing compound, and a polyalkylsiloxane-containing compound.
The second compound is not limited, as long as the second compound is a compound exhibiting surface free energy higher than the surface free energy of the first compound. In the case where a perfluoroalkyl group-containing acrylate is used as the first compound, for example, hydroxyl group-containing acrylate (e.g., pentaerythritol triacrylate, and polyethylene glycol monoacrylate) is preferably used as the second compound.
As for the resin composition 12, a fast curing radical polymerizable resin composition, or cationic polymerizable resin composition is preferably used. Other than the first compound and the second compound, the resin composition contains a polymerizable resin, and a polymerization initiator.
The radical polymerizable resin composition contains acrylate, and a radical polymerization initiator. Examples of the acrylate include pentaerythritol triacrylate, propylene glycol-modified glycerin triacrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, and trimethylol propane triacrylate. These may be used alone, or in combination. Moreover, examples of the radical polymerization initiator include an alkylphenone-based photopolymerization initiator, an acylphosphine oxide-based photopolymerization initiator, and a titanocene-based photopolymerization initiator. These may be used alone, or in combination.
The cationic polymerizable resin composition contains an epoxy resin, and a cationic polymerization initiator. Examples of the epoxy resin include a bisphenol epoxy resin, a phenol novolak epoxy resin, an alicyclic epoxy resin, a heterocyclic epoxy resin, and a glycidyl ester epoxy resin. These may be used alone, or in combination. Examples of the cationic polymerization initiator include onium salts, such as an aromatic sulfonium salt, an aromatic diazenium, an iodonium salt, a phosphonium salt, and a selenonium salt. These may be used alone, or in combination.
Note that, as other compounds, the resin composition 12 may contain a viscosity modifier, a diluent, and a surface conditioner, if necessary.
The master 20 contains a higher surface free energy region 21 and a low surface free energy region 22 at the surface thereof. For example, the high surface free energy region 21 is a region of glass, metal, or silicon, and the low surface free energy region 22 is a region of a fluorine coating, a silicone coating, nitrogen, argon, or air (a space).
The base of the master 20 is preferably glass to which fluorine coating is easily performed. Moreover, the surface of the master 20 is preferably smooth. As a result, surface migrations of the first compound and the second compound become easy, and a surface of the cured resin layer can be made smooth.
In the case where the master 20 is brought into contact with the resin composition 12, as illustrated in
ΔΥ=Υm−Υi (1)
In the formula (1) above, Υm is surface free energy of the surface of the master 20, and Υi is surface free energy of the surface of the resin composition 12.
Accordingly, for example, the fluororesin-based compound moves to the low surface free energy region 22, such as a fluorine coating region, and is removed from an interface of the high surface free energy region 21, as illustrated in
Moreover, the production method preferably further includes, after the curing step, applying an ink composition onto the cured resin layer, and curing the ink composition. As for the ink composition, for example, a composition, which has the same formulation to that of the resin composition 12, with proviso that the first compound is removed, can be used.
As described above, a pattern of the surface free energy differences of the master 20 can be repeatedly transferred by using the master 20. Moreover, the transferred pattern of the surface free energy differences is excellent in terms of fine pitch, and size stability. Moreover, the cured coating film thereof has excellent transparency.
Next, the pattern-formed body formed by the aforementioned production method is described.
The base 11 is identical to the base used for the aforementioned production method of a pattern-formed body, and the cured resin layer 13 is a cured product of the resin composition 12 used for the aforementioned production method of a pattern-formed body.
The pattern-formed body according to the present embodiment can provide a smooth pattern surface through smoothing of a transfer surface of the master 20. Then, a processed pattern having fine pitches and excellent size stability can be attained by processing the smooth pattern surface with an ink composition or the like. Accordingly, the pattern-formed body can be applied for the electronic field, such as electronic circuit patterns, or a biomedical field, such as DNA chips.
Examples of the present invention are specifically described hereinafter. In Examples, Master A, on which a pattern was formed with surface free energy differences, Master B, which had low surface free energy over the entire surface thereof, Master C, which had high surface free energy over the entire surface thereof, were produced, and the pattern was transferred to a resin composition using each of the masters. Note that, the present invention is not limited to these examples.
As for the exposure devices, contact angle gauge, microscope, and atomic force microscope (AFM), the following devices were used.
Exposure Device A: Mask Aligner MA-20 (manufactured by MIKASA CO., LTD.)
Exposure Device B: Alignment exposure device (manufactured by Toshiba Lighting & Technology Corporation)
Contact Angle Gauge: DM-701 (manufactured by Kyowa Interface Science Co., Ltd.)
Microscope: VHX-1000 (manufactured by Keyence Corporation)
AFM: SPA400 (manufactured by Hitachi High-Tech Science Corporation)
[Production of Master A]
A negative photoresist (product name: OFPR-800LB, manufactured by Tokyo Ohka Kogyo Co., Ltd.) was applied onto a glass substrate in the size of 10 cm×10 cm by spin coating, and the applied photoresist was dried for 90 seconds at 110° C. on a hot plate. The substrate coated with the photoresist, and a photomask, to which lines and spaces of 5 μm had been patterned, were set, and subjected to exposure by means of Exposure Device 1. After the exposure, the substrate was immersed in a 2.38% tetramethyl ammonium hydroxide aqueous solution for 1 minute, and then was immersed in pure water for 1 minute, followed by drying at room temperature, to thereby perform developing.
The developed substrate was washed with pure water, and then with a cleaning fluid (product name: Novec7300, manufactured by 3M Company) in this order. Thereafter, a fluorine coating agent (product name: DURASURF DS-5210F, manufactured by HARCES Co., Ltd.) was applied onto the substrate by dropwise. After leaving to stand overnight, the resultant was washed with a cleaning fluid (product name: Novec7300, manufactured by 3M Company). Thereafter, a fluorine coating agent (product name: DURASURF DS-5210F, manufactured by HARCES Co., Ltd.) was applied thereon dropwise. The resultant was further left to stand overnight, and then washed with a cleaning fluid (product name: Novec7300, manufactured by 3M Company), followed by drying at room temperature.
The resulting substrate was immersed in a stripping solution for 5 minutes to remove the remaining resist film, and then washed with acetone, and with a cleaning fluid (product name: Novec7300, manufactured by 3M Company) in this order. As a result, Master A, in which the high surface free energy region 31 and the low surface free energy region 32 had been patterned (partially fluorine coated) on the glass substrate 30, as illustrated in
[Production of Master B]
A microscope slide in the size of 7 cm×5 cm was washed with a cleaning fluid (product name: Novec7300, manufactured by 3M Company). Thereafter, a fluorine coating agent (product name: DURASURF DS-5210F, manufactured by HARCES Co., Ltd.) was applied onto the microscope slide dropwise. After leaving the resulting slide to stand overnight, the slide was washed with a cleaning fluid (product name: Novec7300, manufactured by 3M Company). Thereafter, a fluorine coating agent (product name: DURASURF DS-5210F, manufactured by HARCES Co., Ltd.) was applied onto the microscope slide dropwise. After leaving the resulting slide to stand overnight, the slide was washed with a cleaning fluid (product name: Novec7300, manufactured by 3M Company), to thereby obtain Master B (entire surface of which was coated with fluorine).
[Production of Master C]
A fresh microscope slide in the size of 7 cm×5 cm was provided as Master C.
[Preparation of Resin Composition]
In Table 1, formulation (part(s) by mass) of Resin Composition A for a cured resin layer, and Resin Composition B for a processing layer are presented.
[Formation of Cured Resin Layer]
Moreover, Master B and Master C were also brought into contact with Resin Composition A, and Resin Composition A was cured in the same manner as described above, to thereby obtain Coating Film B and Coating Film C.
[Evaluation of Surface Free Energy]
A contact angle of Coating Film B and a contact angle of Coating Film C were measured with the coating angle gauge, and each surface free energy was calculated in accordance with Kaelble-Wu method. The contact angles and surface free energy of Coating Film B and Coating Film C are presented in Table 2.
As presented in Table 2, the coating surface had low surface free energy, when Master B that was fluorine-coated glass was used, and the coating surface had high surface free energy when Master C that was glass was used. Specifically, it was found that the surface free energy of the master was transferred to Resin Composition A.
In Processing Example 1, Coating Film A, which was prepared by curing Resin Composition A using Master A, was painted with an oil-based ink pen. Then, the deposition state of the ink was observed. As for the oil-based ink pen, a commercially available pen, “Mackee” manufactured by ZEBRA CO., LTD. was used.
In the case where the entire surface of Coating Film A was painted with the oil-based ink pen, moreover, the 5 μm-width pattern of Master A could be printed. In the case where Master A was repeatedly used 5 times, similarly, the pattern of Master A could be printed.
In Processing Example 2, Resin Composition B was applied on a cured resin layer, which was prepared by curing Resin Composition A using Master A, and Resin Composition B was cured. First, Resin Composition B was applied on Coating Film A, which was prepared by curing Resin Composition A using Master A, by means of a bar coater to give a wet film thickness of 1.5 μm. Then, the resultant was subjected to exposure in a nitrogen atmosphere by means of Exposure Device 2 at the radiation dose of 1.5 J/cm2.
As described above, the pattern of the master is transferred by curing the resin composition containing the first compound exhibiting low surface free energy, and the second compound exhibiting surface free energy higher than the surface free energy of the first compound, in contact with the master to which a pattern has been formed with surface free energy differences, and a coating film having a pattern of surface free energy, which have fine pitches, and excellent size stability, can be attained.
Moreover, a pattern having excellent size stability and reproducibility can be attained by performing secondary processing, which includes further applying and curing an ink, such as a resin composition, on the coating film.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2013-122812 | Jun 2013 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2014/065065 | 6/6/2014 | WO | 00 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO2014/199910 | 12/18/2014 | WO | A |
| Number | Name | Date | Kind |
|---|---|---|---|
| 7749684 | Kobayashi | Jul 2010 | B2 |
| 8703839 | Takihara | Apr 2014 | B2 |
| 20080167396 | Murao | Jul 2008 | A1 |
| 20100246014 | Asahi et al. | Sep 2010 | A1 |
| 20100316849 | Millward | Dec 2010 | A1 |
| Number | Date | Country |
|---|---|---|
| 2005-052686 | Mar 2005 | JP |
| 2005-189631 | Jul 2005 | JP |
| 2007-164070 | Jun 2007 | JP |
| 2011-14829 | Jan 2011 | JP |
| Entry |
|---|
| International Search Report (PCT/ISA/210) datd Sep. 2, 2014, by the Japanese Patent Office as the International Searching Authority for International Application No. PCT/JP2014/065065. |
| Written Opinion (PCT/ISA/237) dated Sep. 2, 2014, by the Japanese Patent Office as the International Searching Authority for International Application No. PCT/JP2014/065065. |
| Extended Search Report issued by the European Patent Office in corresponding European Patent Application No. 14810216.3 dated Dec. 8, 2016 (7 pages). |
| Number | Date | Country | |
|---|---|---|---|
| 20160124305 A1 | May 2016 | US |
