Number | Name | Date | Kind |
---|---|---|---|
4657628 | Holloway et al. | Apr 1987 | |
4661228 | Mintz | Apr 1987 | |
4816126 | Kamoshida et al. | Mar 1989 | |
4865712 | Mintz | Sep 1989 | |
4970176 | Tracy et al. | Nov 1990 | |
4994162 | Armstrong et al. | Feb 1991 | |
5071791 | Inoue et al. | Dec 1991 | |
5108570 | Wang | Apr 1992 |
Entry |
---|
Taguchi et al: Quarter Micron Hole Filling With SiN Sidewalls by Aluminum High Temperature Sputtering, Jun. 9-10, 1992 VMIC Conference, pp. 219-225. |