| Number | Date | Country | Kind |
|---|---|---|---|
| 10-280782 | Oct 1998 | JP | |
| 11-260565 | Sep 1999 | JP |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4264970 | Nishimura et al. | Apr 1981 | A |
| 6071374 | Kim | Jun 2000 | A |
| 6197209 | Shin et al. | Mar 2001 | B1 |
| Number | Date | Country |
|---|---|---|
| 2722798 | Nov 1997 | JP |
| Entry |
|---|
| Kameya, “Technical Report: Thickness-Reduction of TFT-LCD Glass Panel By Etching in After-Process: Sti Systems Technology Succeeded in Development of an Epoch-Making Etching System”, Monthly FPD Intelligence, Apr. 1999, pp. 24-26. |