Number | Date | Country | Kind |
---|---|---|---|
5-315935 | Nov 1993 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4835112 | Pfiester et al. | May 1989 | |
5145794 | Kase et al. | Sep 1992 | |
5270250 | Murai et al. | Dec 1993 | |
5403756 | Yoshinouchi et al. | Apr 1995 |
Number | Date | Country |
---|---|---|
1-120015 | May 1989 | JPX |
Entry |
---|
Wolf, "Silicon Processing for the VLSI Era, vol. 2", 1986, pp. 264-265. |