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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/2236from or into a plasma phase

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor structure and methods of forming same
- Patent number 12,132,107
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having semiconductor device elements in a semi...
- Patent number 12,107,130
- Issue date Oct 1, 2024
- Infineon Technologies AG
- Ingo Muri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET fabrication methods
- Patent number 12,068,392
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual dopant source/drain regions and methods of forming same
- Patent number 11,935,793
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin field-effect transistor device having contact plugs with re-ent...
- Patent number 11,916,147
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method for manufacturing the same, power circ...
- Patent number 11,894,452
- Issue date Feb 6, 2024
- Kabushiki Kaisha Toshiba
- Tatsuo Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical transistor including symmetrical source/drain extension ju...
- Patent number 11,862,710
- Issue date Jan 2, 2024
- International Business Machines Corporation
- Chun-Chen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ferroelectric field effect transistor devices and methods for formi...
- Patent number 11,817,498
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Chieh Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for the treatment of workpieces
- Patent number 11,791,181
- Issue date Oct 17, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Ting Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method of manufacturing the same and electron...
- Patent number 11,695,074
- Issue date Jul 4, 2023
- Institute of Microelectronics, Chinese Academy of Sciences
- Huilong Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deep trench isolation with segmented deep trench
- Patent number 11,626,317
- Issue date Apr 11, 2023
- Texas Instruments Incorporated
- Binghua Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ferroelectric field effect transistor devices and methods for formi...
- Patent number 11,527,649
- Issue date Dec 13, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Chieh Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deuterium-containing films
- Patent number 11,508,584
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 11,462,545
- Issue date Oct 4, 2022
- SK Hynix Inc.
- Il-Sik Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin field-effect transistor device having contact plugs with re-ent...
- Patent number 11,380,794
- Issue date Jul 5, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and methods of forming same
- Patent number 11,355,635
- Issue date Jun 7, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor and manufacturing method thereof, array substr...
- Patent number 11,342,431
- Issue date May 24, 2022
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Tongshang Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Memory structure
- Patent number 11,335,691
- Issue date May 17, 2022
- Powerchip Semiconductor Manufacturing Corporation
- Ying-Tsung Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for precision formation of a lattice on a substrate
- Patent number 11,322,356
- Issue date May 3, 2022
- Denton Jarvis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced substrate amorphization using intermittent ion exposure
- Patent number 11,315,790
- Issue date Apr 26, 2022
- Applied Materials, Inc.
- Supakit Charnvanichborikarn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET fabrication methods
- Patent number 11,276,766
- Issue date Mar 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High surface dopant concentration formation processes and structure...
- Patent number 11,257,906
- Issue date Feb 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical transistor including symmetrical source/drain extension ju...
- Patent number 11,239,343
- Issue date Feb 1, 2022
- International Business Machines Corporation
- Chun-Chen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method for manufacturing the same, power circ...
- Patent number 11,227,942
- Issue date Jan 18, 2022
- Kabushiki Kaisha Toshiba
- Tatsuo Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming semiconductor device
- Patent number 11,227,951
- Issue date Jan 18, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Herbal extracts and flavor systems for oral products and methods of...
- Patent number 11,211,249
- Issue date Dec 28, 2021
- Sensient Flavors LLC
- Kenneth John Hughes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses including a boundary of a well beneath an a...
- Patent number 11,211,382
- Issue date Dec 28, 2021
- Micron Technology, Inc.
- Michael Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitride semiconductor device and method for manufacturing same
- Patent number 11,152,499
- Issue date Oct 19, 2021
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Hideyuki Okita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication of transistors having stressed channels
- Patent number 11,121,043
- Issue date Sep 14, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Nicolas Posseme
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for splitting semiconductor wafers
- Patent number 11,081,393
- Issue date Aug 3, 2021
- Infineon Technologies AG
- Christian Beyer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Dual Dopant Source/Drain Regions and Methods of Forming Same
- Publication number 20240379446
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINFET FABRICATION METHODS
- Publication number 20240371970
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun Hsiung TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240282800
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Takekazu Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAN DEVICE WITH N2 PRE-TREATMENT AND METHOD OF PERFORMING N2 PRE-TR...
- Publication number 20240282841
- Publication date Aug 22, 2024
- Powerchip Semiconductor Manufacturing Corporation
- Po-Hsien Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING ELECTRODE AND SEMICONDUCTOR DEVICE INCLUDING...
- Publication number 20240234148
- Publication date Jul 11, 2024
- SK HYNIX INC.
- Cha Deok DONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fin Field-Effect Transistor Device Having Contact Plugs with Re-Ent...
- Publication number 20240145597
- Publication date May 2, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240120407
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- H. Jim Fulford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRON...
- Publication number 20230369489
- Publication date Nov 16, 2023
- Institute of Microelectronics, Chinese Academy of Sciences
- Huilong Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROELECTRIC FIELD EFFECT TRANSISTOR DEVICES AND METHODS FOR FORMI...
- Publication number 20230170418
- Publication date Jun 1, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Chieh HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEUTERIUM-CONTAINING FILMS
- Publication number 20230037450
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SPLITTING SEMICONDUCTOR WAFERS
- Publication number 20230005794
- Publication date Jan 5, 2023
- INFINEON TECHNOLOGIES AG
- Christian Beyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fin Field-Effect Transistor Device Having Contact Plugs with Re-Ent...
- Publication number 20220336666
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Structure and Methods of Forming Same
- Publication number 20220262951
- Publication date Aug 18, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FINFET FABRICATION METHODS
- Publication number 20220208986
- Publication date Jun 30, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun Hsiung TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEEP TRENCH ISOLATION WITH SEGMENTED DEEP TRENCH
- Publication number 20220130717
- Publication date Apr 28, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Binghua Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL TRANSISTOR INCLUDING SYMMETRICAL SOURCE/DRAIN EXTENSION JU...
- Publication number 20220130980
- Publication date Apr 28, 2022
- International Business Machines Corporation
- Chun-Chen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, POWER CIRC...
- Publication number 20220102544
- Publication date Mar 31, 2022
- Kabushiki Kaisha Toshiba
- Tatsuo SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIN FIELD-EFFECT TRANSISTOR DEVICE HAVING CONTACT PLUGS WITH RE-ENT...
- Publication number 20210351299
- Publication date Nov 11, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES
- Publication number 20210313213
- Publication date Oct 7, 2021
- Applied Materials, Inc.
- Philip Allan KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING SEMICONDUCTOR DEVICE ELEMENTS IN A SEMI...
- Publication number 20210265468
- Publication date Aug 26, 2021
- Ingo Muri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL TRANSISTOR INCLUDING SYMMETRICAL SOURCE/DRAIN EXTENSION JU...
- Publication number 20210265488
- Publication date Aug 26, 2021
- International Business Machines Corporation
- Chun-Chen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES
- Publication number 20210183681
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Philip Allan KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY STRUCTURE
- Publication number 20210175237
- Publication date Jun 10, 2021
- Powerchip Semiconductor Manufacturing Corporation
- Ying-Tsung Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Splitting Semiconductor Wafers
- Publication number 20210175123
- Publication date Jun 10, 2021
- INFINEON TECHNOLOGIES AG
- Christian Beyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED SUBSTRATE AMORPHIZATION USING INTERMITTENT ION EXPOSURE
- Publication number 20210118681
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- SUPAKIT CHARNVANICHBORIKARN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR THE TREATMENT OF WORKPIECES
- Publication number 20210082724
- Publication date Mar 18, 2021
- Mattson Technology, Inc.
- Ting Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRON...
- Publication number 20210074857
- Publication date Mar 11, 2021
- Huilong Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20200328215
- Publication date Oct 15, 2020
- Powerchip Semiconductor Manufacturing Corporation
- Ying-Tsung Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Surface Dopant Concentration Formation Processes and Structure...
- Publication number 20200295135
- Publication date Sep 17, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING DEVICE
- Publication number 20200279949
- Publication date Sep 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS

from or into a plasma phase

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor structure and methods of forming same

Semiconductor device having semiconductor device elements in a semi...

FinFET fabrication methods

Dual dopant source/drain regions and methods of forming same

Fin field-effect transistor device having contact plugs with re-ent...

Semiconductor device, method for manufacturing the same, power circ...

Vertical transistor including symmetrical source/drain extension ju...

Ferroelectric field effect transistor devices and methods for formi...

Methods for the treatment of workpieces

Semiconductor device, method of manufacturing the same and electron...

Deep trench isolation with segmented deep trench

Ferroelectric field effect transistor devices and methods for formi...

Deuterium-containing films

Semiconductor device and method for fabricating the same

Fin field-effect transistor device having contact plugs with re-ent...

Semiconductor structure and methods of forming same

Thin film transistor and manufacturing method thereof, array substr...

Memory structure

System and method for precision formation of a lattice on a substrate

Enhanced substrate amorphization using intermittent ion exposure

FinFET fabrication methods

High surface dopant concentration formation processes and structure...

Vertical transistor including symmetrical source/drain extension ju...

Semiconductor device, method for manufacturing the same, power circ...

Method of forming semiconductor device

Herbal extracts and flavor systems for oral products and methods of...

Methods and apparatuses including a boundary of a well beneath an a...

Nitride semiconductor device and method for manufacturing same

Fabrication of transistors having stressed channels

Method for splitting semiconductor wafers

Patents Applicationslast 30 patents

Dual Dopant Source/Drain Regions and Methods of Forming Same

FINFET FABRICATION METHODS

IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME

GAN DEVICE WITH N2 PRE-TREATMENT AND METHOD OF PERFORMING N2 PRE-TR...

METHOD FOR FABRICATING ELECTRODE AND SEMICONDUCTOR DEVICE INCLUDING...

Fin Field-Effect Transistor Device Having Contact Plugs with Re-Ent...

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRON...

FERROELECTRIC FIELD EFFECT TRANSISTOR DEVICES AND METHODS FOR FORMI...

DEUTERIUM-CONTAINING FILMS

METHOD FOR SPLITTING SEMICONDUCTOR WAFERS

Fin Field-Effect Transistor Device Having Contact Plugs with Re-Ent...

Semiconductor Structure and Methods of Forming Same

FINFET FABRICATION METHODS

DEEP TRENCH ISOLATION WITH SEGMENTED DEEP TRENCH

VERTICAL TRANSISTOR INCLUDING SYMMETRICAL SOURCE/DRAIN EXTENSION JU...

SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, POWER CIRC...

FIN FIELD-EFFECT TRANSISTOR DEVICE HAVING CONTACT PLUGS WITH RE-ENT...

SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES

SEMICONDUCTOR DEVICE HAVING SEMICONDUCTOR DEVICE ELEMENTS IN A SEMI...

VERTICAL TRANSISTOR INCLUDING SYMMETRICAL SOURCE/DRAIN EXTENSION JU...

SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES

MEMORY STRUCTURE

Method for Splitting Semiconductor Wafers

ENHANCED SUBSTRATE AMORPHIZATION USING INTERMITTENT ION EXPOSURE

METHODS FOR THE TREATMENT OF WORKPIECES

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRON...

MEMORY STRUCTURE AND MANUFACTURING METHOD THEREOF

High Surface Dopant Concentration Formation Processes and Structure...

METHOD OF FORMING DEVICE