TREA

Method for Programming and Erasing an Array of NMOS EEPROM Cells That Minimizes Bit Disturbances and Voltage Withstand Requirements for the Memory Array and Supporting Circuits

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Information

  • Patent Application
  • 20070280001
  • Publication Number
    20070280001
  • Date Filed
    June 01, 2006
    18 years ago
  • Date Published
    December 06, 2007
    16 years ago
Information
Abstract
A method for programming and erasing an array of NMOS electrically erasable programmable read only memory (EEPROM) cells that minimizes bit disturbances and high voltage requirements for the memory array cells and supporting circuits. In addition, the array of N-channel memory cells may be separated into independently programmable memory segments by creating multiple, electrically isolated P-wells upon which the memory segments are fabricated. The multiple, electrically isolated P-wells may be created, for example, by p-n junction isolation or dielectric isolation.
Description

BRIEF DESCRIPTION OF THE DRAWINGS

A more complete understanding of the present disclosure thereof may be acquired by referring to the following description taken in conjunction with the accompanying drawings wherein:



FIG. 1 is a schematic diagram of byte selectable N-channel memory cells in a related technology incorporating byte select transistors and row select transistors;



FIG. 2 is a cross section of a related technology P-channel memory transistor;



FIG. 3 is an illustration of a related technology in which the matrix of P-channel memory transistors resides in a single N-well;



FIG. 4 is an illustration of an N-channel memory array comprising two P-wells within a deep N-well and each P-well having an independently programmable memory segment, according to a specific example embodiment of the present disclosure;



FIG. 5 is a schematic cross section elevational view of the specific example embodiment for a plurality of P-wells within a deep N-well as illustrated in FIG. 4;



FIG. 6 is a schematic cross section elevational view of a specific example embodiment of P-well segmentation trenching of N-wells illustrated in FIG. 4;



FIG. 7 is a schematic circuit diagram of the N-channel memory array illustrated in FIG. 4, according to a specific example embodiment of the present disclosure;



FIG. 8 is a voltage matrix chart for a byte erase operation of the N-channel memory array circuit as illustrated in FIG. 7; and



FIG. 9 is a voltage matrix chart for a bit program operation of the N-channel memory array circuit as illustrated in FIG. 7.


While the present disclosure is susceptible to various modifications and alternative forms, specific example embodiments thereof have been shown in the drawings and are herein described in detail. It should be understood, however, that the description herein of specific example embodiments is not intended to limit the disclosure to the particular forms disclosed herein, but on the contrary, this disclosure is to cover all modifications and equivalents as defined by the appended claims.





DETAILED DESCRIPTION

Referring now to the drawings, the details of example embodiments are schematically illustrated. Like elements in the drawings will be represented by like numbers, and similar elements will be represented by like numbers with a different lower case letter suffix.


Referring to FIG. 4, an N-channel memory array 10 comprising a plurality of P-wells (e.g., 301 and 302) within a deep N-well 304 (e.g., see FIGS. 5 and 6) and a plurality of independently programmable memory segments are shown. Each independently programmable memory segment is comprised of a matrix of memory cell transistors shown as cell rows 100 and cell columns 200. The embodiment of FIG. 4 segments the 16 cell columns 200 and the plurality of cell rows 100 of the memory array 10 into two independently programmable memory segments residing within the P-wells 301 and 302, respectively, and shown in dashed lines. P-wells 301 and 302 are electrically separated from each other.


In the specific example embodiment of the present disclosure, there are eight memory transistor columns within each P-well segment, thereby comprising byte (8 bit) segments. There are a common number of cell rows 100 within each P-well and the total number of rows 100 is determined by the desired size of the memory array 10. In FIG. 4, N rows of memory transistors are illustrated. Not shown in FIG. 4, but discussed below and shown in subsequent diagrams, are source select transistors (see source select transistors 501-516 in FIG. 7) at the bottom of each column 200 of the array 10.


In the embodiment of FIG. 4 only two P-wells and two independently programmable memory segments are shown in byte format, e.g., 8 cell columns per memory segment, or a total of 16 cell columns. However, those skilled in the art will recognize that additional P-well segmentations are possible thus yielding additional independently programmable memory segments in byte format. Thus, for a byte format memory array 10, the number of independently programmable memory segments multiplied by eight, e.g., the number of cell columns 200 per memory segment, equals the total number of cell columns 200 in the array 10.


Furthermore, each of the independently programmable memory segments which may be comprised of M cell columns, where M is either smaller or larger than a byte. The number M of cell columns 200, alternative to the byte format, include, but are not limited to: 2, 4, 16, 32, 64, etc., cell columns 200 for each independently programmable memory segment. These various memory array 10 geometries are easily implemented according to the specific example embodiments of this disclosure.


Each independently programmable memory segment may be comprised of a plurality of independently programmable memory units. An independently programmable memory unit is defined as those cell columns 200 which are common to a given cell row 100 and within a single independently programmable memory segment. The intersection of a cell column 200 and a cell row 100 defines a memory cell which may be a single memory transistor. Thus, for the specific example embodiment geometry illustrated in FIG. 4, each independently programmable memory unit is comprised of eight memory cells. Furthermore, the total number of independently programmable memory units for a given independently programmable memory segment is equal to the total number (N) of cell rows 100.


The functional relevance of the independently programmable memory unit may be as follows. A single independently programmable memory unit defines the smallest or most narrow portion of the memory array 10 that may be addressed by the write and erase memory operations described below. Additionally, all independently programmable memory units within a common cell row 100 may be simultaneously addressed by the read, write and erase memory operations.


Referring to FIG. 5, depicted is a schematic cross section elevational view of the specific example embodiment for a plurality of P-wells within a deep N-well as illustrated in FIG. 4. P-well 301 and P-well 302 are formed in a deep N-well 304. The deep N-well 304 is formed in a P-type substrate 308.


Referring to FIG. 6, depicted is a schematic cross section elevational view of a specific example embodiment of P-well segmentation trenching of N-wells as illustrated in FIG. 4. P-well 301a and P-well 302a are formed by dividing a single P-well with a trench 306 extending into the deep N-well 304 and filled with an insulating material. The deep N-well 304 is formed in a P-type substrate 308.


Referring to FIG. 7, depicted is a schematic circuit diagram of the N-channel memory array illustrated in FIG. 4, according to a specific example embodiment of the present disclosure. The memory array 10 is comprised of a plurality of N channel memory transistors 401-1 to 416-n which are laid out in a typical column/row matrix. Also shown are a row of N-channel source select transistors 501-516. Only one source select transistor 501-516 is necessary for each bit line BL1-BL16.


Two separate P-wells with accompanying independently programmable memory segments are shown in dashed lines drawn around a group of cells. Contained within P-well 301 are 8 memory transistor columns (only three are shown for clarity) and N memory transistor rows. P-well 302 is identical to P-well 301, however, P-well 302 is electrically isolated from P-well 301. Note that each independently programmable memory segment corresponds to a P-well and thus, the quantity of P-wells is equal to the quantity of independently programmable memory segments. The upper left independently programmable memory unit in P-well 301 is enclosed in a solid line box 702 to indicate that this is the target independently programmable memory unit (e.g., target byte) for the write, erase, and read operations described herein below.


The control electrodes of the N-channel memory transistors 401-1 to 416-n for each row are connected to common word lines WL1 to WLn, respectively. The drain electrodes of the memory transistors of any particular column are connected to a common bit lines BL1-BL16, respectively. The source electrodes of each memory transistor in a particular column are commonly connected to a respective one of the source select transistors 501-516. The source select transistors for each P-well are controlled by two control lines SSG and SSD, connected to the gates and drains, respectively, of the source select transistors. Hence, source select transistors 501-508 in P-well 301 are controlled by the control lines SSG1 and SSD1, and source select transistors 509-516 in P-well 302 are controlled by the control lines SSG2 and SSD2. Voltage potentials at P-well 301 and P-well 302 may also be independently controlled, as represented by node 704 and 706, respectively, for independent selection of an erase, program or read operation of only a memory segment contained within a certain P-well. However, it is contemplated and within the scope of the present disclosure that there may be only one P-well in a deep N-well of an NMOS EEPROM using the voltage combinations for selection of a byte erase, bit program or read operation.


In this disclosure the IEEE standard 1005 will be followed for consistent nomenclature. Writing or programming a memory cell bit is defined as placing electrons onto the floating gate of the memory transistor. Erasing is defined as removing electrons from the floating gate of the memory transistor. The various writing, erasing and reading operations are performed by applying different combinations of voltages onto the word lines WLx, bit lines BLx, source select transistor gates SSGx, source select transistor drains SSDx, and P-wells, as described herein more fully below.


Referring to FIG. 8, depicted is a voltage matrix chart for a byte erase operation of the N-channel memory array circuit illustrated in FIG. 7. For an erase operation, the word line WLx may be either at ground potential, e.g., zero (0) volts, or at some relatively high programming voltage, e.g., approximately minus eleven (−11) volts. For erasing the target independently programmable memory unit (e.g., target byte), the gates of the memory transistors 401-1 to 416-1 (FIG. 7) are driven to approximately −11 volts over the WL1 control line. The electric field resulting from a relatively high voltage potential, in relation to the P-well 301 biased to approximately 4 volts, causes electrons to tunnel from the floating gate across the dielectric layer and to the P-well of the transistors 401-1 to 408-1 (FIG. 7), thus erasing the transistors 401-1 to 408-1 (FIG. 7).


Conversely, using WL2 as an example, the control electrodes of memory transistors 401-2 to 408-2 are biased at approximately 0 volts, and the P-well 301 is biased at approximately 4 volts. Under these conditions, no tunneling occurs because of an absence of a sufficient electric field between these memory transistors 401-2 to 408-2 and the P-well 301. Thus, memory transistors 401-2 to 408-2 are not erased.


With respect to memory transistors 409-2 to 416-2, the P-well 302 is at approximately −11 volts and the control electrodes at zero (0) volts potential results in a N-type inversion layer under the poly 2 layer of each of the memory transistors 409-2 to 416-2. With BL9-16 at approximately 0 volts and the drain electrodes of memory transistors 409-2 to 416-2 tied to the inversion layer, there is no voltage potential between the control electrode and the inversion layer at the surface of the P-well 302. Thus, even with the P-well 302 biased to approximately −11 volts, no tunneling occurs thereby precluding an erase operation for memory transistors 409-2 to 416-2.


For the erase operation, the bit line to each of the columns BL1:8 is set to approximately 4 volts, each of the columns BL9:16 is set to approximately 0 volts, SSG and SSD for the select transistors 501-508 are set to approximately 4 volts, and the P-well 301 is biased to 4 volts. This permits a sufficient voltage potential between the floating gate of the memory transistors 401-1 to 408-1, controlled by WL1 at approximately −11 volts and the P-well 301 at approximately 4 volts (a difference in potential of approximately 15 volts). Electrons tunnel from the floating gate across the dielectric layer to the P-well 301, thus positively charging the floating gate. Conversely, P-well 302 is biased to approximately −11 volts, thereby failing to create a sufficient voltage potential between the control electrodes of the memory transistors 409-1 to 416-1 that are within P-well 302 and the P-well 302. Without a sufficient voltage differential, tunneling cannot occur and the erase cycle is not accomplished. Thus, by providing for separate and isolated P-wells, the N-channel memory transistors in any row may be organized in byte selectable segments where byte selection is effected, at least in part, by the application of, or biasing at, different voltage potentials, the plurality of the P-wells themselves.


Referring to FIG. 9, depicted is a voltage matrix chart for a bit program operation of the N-channel memory array circuit illustrated in FIG. 7. In this example, word line WL1 is biased to approximately 4 volts, the remainder of the word lines WL2:n are biased to approximately −7 volts; and the select lines SSG1, SSG2, SSD1 and SSD2, and P-wells 301 and 302 are biased to approximately −11 volts. The floating gates of the memory transistors 401-1 through 416-1 are capacitively coupled to a voltage sufficient to turn these transistors on hard, thereby creating an inversion layer. Bit line BL2 is biased to approximately −11 volts while bit lines BL1 and BL3:16 are biased to approximately 0 volts. This causes the inversion layer under the floating gate and pass gate of transistor 402-1 to be biased at −11 volts and the inversion layer under the floating gates and pass gates of transistors 401-1 and 403-1 through 416-1 to be biased at 0 volts. This creates a sufficient electric field to cause electron tunneling from the inversion region in the P-well 301 to the floating gate of the transistor 402-1 and thus charges the floating gate of the memory transistor 402-1, but not the other floating gates (refer to FIG. 7).


Conversely, with WL1 biased to approximately 4 volts and bit lines BL1 and BL3:16 biased to approximately 0 volts, there is insufficient electric field for electron tunneling from the inversion region to the floating gate for memory transistors 401-1 and 403-1 to 416-1. Thus, the write operation is not accomplished for memory transistors 401-1 and 401-3 to 416-1. In the target independently programmable memory unit (e.g. target byte 702) of FIG. 7, identified by the rectangle, a binary pattern may be entered into the memory cells 401-1 through 408-1 by setting the appropriate bit lines BL1:BL8 to approximately −11 volts or 0 volts. Bit lines set to approximately −11 volts will write the memory cell. Bit lines set to substantially ground or approximately zero volts will remain in an unchanged state.


While embodiments of this disclosure have been depicted, described, and are defined by reference to example embodiments of the disclosure, such references do not imply a limitation on the disclosure, and no such limitation is to be inferred. The subject matter disclosed is capable of considerable modification, alteration, and equivalents in form and function, as will occur to those ordinarily skilled in the pertinent art and having the benefit of this disclosure. The depicted and described embodiments of this disclosure are examples only, and are not exhaustive of the scope of the disclosure.

Claims
  • 1. A method of erasing selected ones of a plurality of memory segments in a memory array comprising a P-well in a deep N-well within a P-type substrate, said method comprising of the steps of: setting the deep N-well to a positive voltage;setting the P-well to the positive voltage;setting a one of a plurality of word lines to a negative voltage;setting other ones of the plurality of word lines to substantially zero volts;setting a plurality of bit lines to the positive voltage;setting a source select gate line to the positive voltage; andsetting a source select drain line to the positive voltage,wherein the selected ones are erased of the plurality of memory segments within the P-well and coupled to the one of the plurality of word lines.
  • 2. The method according to claim 1, wherein the positive voltage is approximately 4 volts, and the negative voltage is approximately −11 volts.
  • 3. The method according to claim 1, wherein the positive voltage is from about zero volts to about 20 volts, the negative voltage is from about 10 volts to about 20 volts less positive than the positive voltage, and unselected word lines are biased at a voltage from about zero volts to about 6 volts less positive than the positive voltage.
  • 4. The method according to claim 1, wherein the plurality of bit lines float instead of being set to the positive voltage.
  • 5. A method of erasing selected ones of a plurality of memory segments in a memory array comprising a plurality of P-wells in a deep N-well within a P-type substrate, wherein each of the plurality of memory segments resides within a respective one of the plurality of P-wells, said method comprising of the steps of: setting the deep N-well to a positive voltage;setting a one of the plurality of P-wells to the positive voltage and setting other ones of the plurality of P-wells to a negative voltage;setting a one of a plurality of word lines to the negative voltage;setting other ones of the plurality of word lines to substantially zero volts;setting a first plurality of bit lines in the one of the plurality of P-wells to the positive voltage;setting a second plurality of bit lines in the other ones of the plurality of P-wells to substantially zero volts;setting a first source select gate line associated with the one of the plurality of P-wells to the positive voltage;setting a first source select drain line associated with the one of the plurality of P-wells to the positive voltage;setting a second source select gate line associated with the other ones of the plurality of P-wells to the negative voltage;setting a second source select drain line associated with the other ones of the plurality of P-wells to the negative voltage;wherein the selected ones are erased of the plurality of memory segments within the one of the plurality of P-wells and coupled to the one of the plurality of word lines.
  • 6. The method according to claim 5, wherein the positive voltage is approximately 4 volts, and the negative voltage is approximately −11 volts.
  • 7. The method according to claim 5, wherein the positive voltage is from about zero volts to about 20 volts, the negative voltage is from about 10 volts to about 20 volts less positive than the positive voltage, and unselected word lines are biased at a voltage from about zero volts to about 6 volts less positive than the positive voltage.
  • 8. The method according to claim 5, wherein the number of selected ones of the plurality of memory segments comprise eight.
  • 9. The method according to claim 5, wherein un-selected ones of the plurality of memory segments are coupled to the other ones of the plurality of word lines.
  • 10. The method according to claim 5, wherein un-selected ones of the plurality of memory segments are within the other ones of the plurality of P-wells.
  • 11. The method according to claim 5, wherein the first plurality of bit lines float instead of being set to the positive voltage.
  • 12. A method of erasing selected ones of a plurality of memory segments in a memory array comprising a P-well in a deep N-well within a P-type substrate, said method comprising of the steps of: setting the deep N-well to a first voltage;setting the P-well to a second voltage;setting a one of a plurality of word lines to a third voltage;setting other ones of the plurality of word lines to a fourth voltage;setting a plurality of bit lines to a fifth voltage;setting a source select gate line to a sixth voltage; andsetting a source select drain line to seventh voltage,wherein the selected ones are erased of the plurality of memory segments within the P-well and coupled to the one of the plurality of word lines.
  • 13. The method according to claim 12, wherein: the first, second, fifth, sixth and seventh voltages are approximately 4 volts;the third voltage is approximately −11 volts; andthe fourth voltage is approximately 0 volts.
  • 14. The method according to claim 12, wherein: the first voltage is substantially equal to or more positive than zero volts and is substantially equal to or more positive than the second voltage;the second voltage is from about zero volts to about 20 volts;the third voltage is from about 10 volts to about 20 volts less positive than the second voltage;the fourth voltage is from about zero volts to about 6 volts less positive than the second voltage;the fifth voltage is substantially equal to or more positive than the second voltage;the sixth voltage is substantially equal to or less positive than the second voltage plus a source select transistor threshold voltage; andthe seventh voltage is substantially equal to or more positive than the second voltage.
  • 15. The method according to claim 14, wherein the fifth voltage is uncontrolled instead of being substantially equal to or more positive than the second voltage.
  • 16. A method of erasing selected ones of a plurality of memory segments in a memory array comprising a plurality of P-wells in a deep N-well within a P-type substrate, wherein each of the plurality of memory segments resides within a respective one of the plurality of P-wells, said method comprising of the steps of: setting the deep N-well to a first voltage;setting a one of the plurality of P-wells to a second voltage;setting other ones of the plurality of P-wells to a third voltage;setting a one of a plurality of word lines to a fourth voltage;setting other ones of the plurality of word lines to a fifth voltage;setting a first plurality of bit lines in the one of the plurality of P-wells to a sixth voltage;setting a second plurality of bit lines in the other ones of the plurality of P-wells to a seventh voltage;setting a first source select gate line associated with the one of the plurality of P-wells to an eighth voltage;setting a first source select drain line associated with the one of the plurality of P-wells to a ninth voltage;setting a second source select gate line associated with the other ones of the plurality of P-wells to a tenth voltage;setting a second source select drain line associated with the other ones of the plurality of P-wells to an eleventh voltage;wherein the selected ones are erased of the plurality of memory segments within the one of the plurality of P-wells and coupled to the one of the plurality of word lines.
  • 17. The method according to claim 16, wherein: the first, second, sixth, eighth and ninth voltages are approximately 4 volts;the third, fourth, tenth and eleventh voltages are approximately −11 volts; andthe fifth and seventh voltages are approximately zero volts.
  • 18. The method according to claim 16, wherein: the first voltage is substantially equal to or more positive than about zero volts and is substantially equal to or more positive than the second voltage;the second voltage is from about zero volts to about 20 volts;the third and fourth voltages are from about 10 volts to about 20 volts less positive than the second voltage;the fifth and seventh voltages are from about zero volts to 6 volts less positive than the second voltage;the sixth and ninth voltages are substantially equal to or more positive than the second voltage;the eighth voltage is substantially equal to or less positive than the second voltage plus a source select transistor threshold voltage;the tenth voltage is substantially equal to or less positive than the third voltage plus a source select transistor threshold voltage; andthe eleventh voltage is substantially equal to or more positive than the third voltage.
  • 19. The method according to claim 18, wherein the sixth voltage is uncontrolled instead of being substantially equal to or more positive than the second voltage.
  • 20. A method of programming selected ones of a plurality of memory segments in a memory array comprising a plurality of P-wells in a deep N-well within a P-type substrate, wherein each of the plurality of memory segments resides within a respective one of the plurality of P-wells, said method comprising of the steps of: setting the deep N-well to a positive voltage;setting the plurality of P-wells to a first negative voltage;setting a one of a plurality of word lines to the positive voltage;setting other ones of the plurality of word lines to a second negative voltage;setting at least one of a plurality of bit lines to the first negative voltage;setting other ones of the plurality of bit lines to substantially zero volts;setting a source select gate line to the first negative voltage; andsetting a source select drain line to the first negative voltage,wherein the selected ones are programmed of the plurality of memory segments coupled to the one of the plurality of word lines and the at least one of the plurality of bit lines.
  • 21. The method according to claim 20, wherein the positive voltage is approximately 4 volts, the first negative voltage is approximately −11 volts, and the second negative voltage is approximately −7 volts.
  • 22. The method according to claim 20, wherein the number of selected ones of the plurality of memory segments comprise any positive integer number.
  • 23. The method according to claim 20, wherein un-selected ones of the plurality of memory segments are coupled to the other ones of the plurality of word lines.
  • 24. The method according to claim 20, wherein un-selected ones of the plurality of memory segments are within the other ones of the plurality of P-wells.
  • 25. The method according to claim 20, wherein: the positive voltage is from about zero volts to about 20 volts;the first negative voltage is from about 10 volts to about 20 volts less positive than the positive voltage;the second negative voltage is from about zero volts to about 6 volts more positive than the first negative voltage; andan unselected plurality of bit lines are biased from about zero volts to about 6 volts less positive than the positive voltage.
  • 26. A method of programming selected ones of a plurality of memory segments in a memory array comprising a plurality of P-wells in a deep N-well within a P-type substrate, wherein each of the plurality of memory segments resides within a respective one of the plurality of P-wells, said method comprising of the steps of: setting the deep N-well to a first voltage;setting a one of the plurality of P-wells to a second voltage;setting other ones of the plurality of P-wells to a third voltage;setting the third voltage to the second voltage;setting a one of a plurality of word lines to a fourth voltage;setting other ones of the plurality of word lines to a fifth voltage;setting at least one of a plurality of bit lines to a sixth voltage;setting other ones of the plurality of bit lines to a seventh voltage;setting source select gate lines associated with the plurality of P-wells to an eighth voltage;setting source select drain lines associated with the plurality of P-wells to a ninth voltage;wherein the selected ones are programmed of the plurality of memory segments coupled to the one of the plurality of word lines and the at least one of the plurality of bit lines.
  • 27. The method according to claim 26, wherein: the first and fourth voltages are approximately 4 volts;the second, third, sixth, eighth and ninth voltages are approximately −11 volts;the fifth voltage is approximately −7 volts; andthe seventh voltage is approximately 0 volts;
  • 28. The method according to claim 26, wherein: the first voltage is substantially equal to or more positive than zero volts;the second, third and sixth voltages are from about 10 volts to about 20 volts less positive than the fourth voltage;the fourth voltage is from about zero volts to about 20 volts;the fifth voltage is from about zero volts to about 6 volts more positive than the second voltage;the seventh voltage is from about zero volts to about 6 volts less positive than the fourth voltage;the eighth voltage is substantially equal to or less positive than the second voltage plus a source select transistor threshold voltage; andthe ninth voltage is substantially equal to or more positive than the second voltage.