Number | Name | Date | Kind |
---|---|---|---|
3844831 | Cass et al. | Oct 1974 | |
4197141 | Bozler et al. | Apr 1980 | |
4419183 | Gullo et al. | Dec 1983 | |
4451326 | Gwozdz | May 1984 | |
4632852 | Akohoshi et al. | Dec 1986 | |
4668335 | Mockler et al. | May 1987 | |
4751106 | Wilkinson et al. | Jun 1988 |
Entry |
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Silicon Processing for the VLSI era, S. Wolf et al., Lattice Press, Sunset Bench, Calif. pp. 563-564, 1987. |