The present invention relates to a method for finally shaping an air bearing surface (ABS) of a magnetic head slider and a manufacturing method of a magnetic head slider using this shaping method.
A flying magnetic head slider with a thin-film magnetic head is required to have a slightly convex shape such as convex crown and/or camber in an ABS of each rail in order to obtain an excellent flying performance. The “crown” represents a deformation in shape along fore-and-aft directions of the magnetic head slider or directions in parallel with an air-flowing direction, and the “camber” represents a deformation in shape along lateral directions of the magnetic head slider or directions perpendicular to the air-flowing direction. In some cases, the crown and the camber may be generically called as the crown.
The ABS with such convex shape is formed in a final shaping work after various works for a row bar provided with a plurality of aligned magnetic head sliders. Namely, in this final work, the ABS is shaped in convex by radiating a laser beam to a surface opposite to the ABS of the row bar so as to intentionally deform this row bar (U.S. Pat. No. 5,266,769).
However, in the conventional final shaping work, since the row bar is caught by a jig for holding, chipping of the row bar or contamination thereof may be occurred.
Also, if the row bar is cut and separated into individual magnetic head sliders after the shaping of the ABS into convex, the convex ABS may be deformed due to a distortion produced during the cutting. Thus, a desired flying performance cannot be expected.
If the shaping of the ABS into convex is executed after the cutting of the row bar into individual magnetic head sliders, the latter problem will not occur. However, in this case, a positioning of each magnetic head slider for the shaping in convex and a measurement of a crown amount or a height of the crest from the root of the convex shape are very difficult. Particularly, in case of a downsized magnetic head slider called as a 30% slider with a size of 1.0 mm×1.235 mm×0.3 mm or 20% slider with a size of 0.7 mm×0.85 mm×0.23 mm, it is quite difficult to easily and accurately execute the positioning of each magnetic head slider and the measurement of a crown amount. As will be noted, during or after the shaping of the ABS into convex, it is required to measure the crown amount to control a shaping amount.
It is therefore an object of the present invention to provide a method for finally shaping an ABS of a magnetic head slider and a manufacturing method of a magnetic head slider using this shaping method, whereby occurrence of chipping and contamination of the magnetic head slider can be reduced.
Another object of the present invention is to provide a method for finally shaping an ABS of a magnetic head slider and a manufacturing method of a magnetic head slider using this shaping method, whereby an ABS of the magnetic head slider can be easily and accurately shaped into a desired convex shape.
According to the present invention, a method for shaping an ABS of a magnetic head slider includes a step of holding at least one row bar with a plurality of aligned thin-film magnetic head elements by adhering a first surface of the at least one row bar to an adhesive tape capable of passing a laser beam there through, the first surface being opposite to an ABS of the at least one row bar, a step of shaping the ABS of the at least one row bar in a convex shape by radiating a laser beam to the first surface of the at least one row bar through the adhesive tape, a step of cutting the at least one row bar into individual magnetic head sliders, and a step of then, removing the magnetic head sliders from the adhesive tape after weakening adhesion properties of the adhesive tape by for example heating the tape.
Since the shaping of the ABS of the row bars are executed while the row bars are adhered and held by the adhesive tape, no chipping of the row bars nor contamination thereof are occurred.
It is preferred that the cutting step includes cutting at least one row bar into individual magnetic head sliders so that the adhesive tape holds all of the individual magnetic head sliders. It is also preferred that the method includes a step of measuring a crown amount of each magnetic head slider after the cutting step but before the removing step. Since a crown amount of the magnetic head slider is measured under the state where all the sliders are held by the adhesive tape, a precise measurement can be extremely easily performed.
It is further preferred that the holding step includes holding a single row bar with a plurality of aligned thin-film magnetic head elements by adhering the first surface of the row bar to the adhesive tape, or holding a plurality of row bars, each having a plurality of aligned thin-film magnetic head elements, by adhering the first surface of each of the row bars to the adhesive tape.
Also, according to the present invention, a method for shaping an air bearing surface of a magnetic head slider includes a step of holding at least one row bar with a plurality of aligned thin-film magnetic head elements by adhering a first surface of the at least one row bar to an adhesive tape capable of passing a laser beam there through, the first surface being opposite to an ABS of the at least one row bar, a step of cutting the at least one row bar into individual magnetic head sliders so that the adhesive tape holds all of the individual magnetic head sliders, a step of shaping an ABS of the individual magnetic head slider in a convex shape by radiating a laser beam to the first surface of the magnetic head slider through the adhesive tape, and a step of then, removing the magnetic head sliders from the adhesive tape after weakening adhesion properties of the adhesive tape.
Since the shaping of the ABS of the row bars are executed while the row bars are adhered and held by the adhesive tape, no chipping of the row bars nor contamination thereof are occurred. In addition, since the convex shape is formed after cutting into the individual magnetic head sliders, no deformation in crown due to a distortion that may occur during the dicing process of the row bar into the individual magnetic head sliders will be produced. Also, as all the magnetic head sliders are held in the fixing state to the adhesive tape, the positioning of each magnetic head slider for the shaping in convex can be precisely and easily performed.
It is preferred that the method includes a step of measuring a crown amount of each magnetic head slider after the cutting step but before the removing step. Since a crown amount of the magnetic head slider is measured under the state where all the sliders are held by the adhesive tape, a precise measurement can be extremely easily performed.
It is further preferred that the holding step includes holding a single row bar with a plurality of aligned thin-film magnetic head elements by adhering the first surface of the row bar to the adhesive tape, or holding a plurality of row bars, each having a plurality of aligned thin-film magnetic head elements, by adhering the first surface of each of the row bars to the adhesive tape.
According to the present invention, further, a method for shaping an ABS of a magnetic head slider includes a step of holding at least one row bar with a plurality of aligned thin-film magnetic head elements by adhering a first surface of the at least one row bar to a UV tape capable of passing a laser beam there through, the first surface being opposite to an ABS of the at least one row bar, a step of shaping the ABS of the at least one row bar in a convex shape by radiating a laser beam to the first surface of the at least one row bar through the UV tape, a step of cutting the at least one row bar into individual magnetic head sliders, and a step of then, removing the magnetic head sliders from the UV tape after radiating an ultra violet light to the UV tape so as to weaken its adhesion properties.
Since the shaping of the ABS of the row bars are executed while the row bars are adhered and held by the UV tape, no chipping of the row bars nor contamination thereof are occurred.
It is preferred that the cutting step includes cutting at least one row bar into individual magnetic head sliders so that the UV tape holds all of the individual magnetic head sliders. It is also preferred that the method includes a step of measuring a crown amount of each magnetic head slider after the cutting step but before the removing step. Since a crown amount of the magnetic head slider is measured under the state where all the sliders are held by the UV tape, a precise measurement can be extremely easily performed.
It is further preferred that the holding step includes holding a single row bar with a plurality of aligned thin-film magnetic head elements by adhering the first surface of the row bar to the UV tape, or holding a plurality of row bars, each having a plurality of aligned thin-film magnetic head elements, by adhering the first surface of each of the row bars to the UV tape.
Also, according to the present invention, a method for shaping an ABS of a magnetic head slider includes a step of holding at least one row bar with a plurality of aligned thin-film magnetic head elements by adhering a first surface of the at least one row bar to a UV tape capable of passing a laser beam there through, the first surface being opposite to an ABS of the at least one row bar, a step of cutting the at least one row bar into individual magnetic head sliders so that the UV tape holds all of the individual magnetic head sliders, a step of shaping an ABS of the individual magnetic head slider in a convex shape by radiating a laser beam to the first surface of the magnetic head slider through the UV tape, and a step of then, removing the magnetic head sliders from the UV tape after radiating an ultra violet light to the UV tape so as to weaken its adhesion properties.
Since the shaping of the ABS of the row bars are executed while the row bars are adhered and held by the UV tape, no chipping of the row bars nor contamination thereof are occurred. In addition, since the convex shape is formed after cutting into the individual magnetic head sliders, no deformation in crown due to a distortion that may occur during the dicing process of the row bar into the individual magnetic head sliders will be produced. Also, as all the magnetic head sliders are held in the fixing state to the UV tape, the positioning of each magnetic head slider for the shaping in convex can be precisely and easily performed.
It is preferred that the method includes a step of measuring a crown amount of each magnetic head slider after the cutting step but before the removing step. Since a crown amount of the magnetic head slider is measured under the state where all the sliders are held by the UV tape, a precise measurement can be extremely easily performed.
It is further preferred that the holding step includes holding a single row bar with a plurality of aligned thin-film magnetic head elements by adhering the first surface of the row bar to the UV tape, or holding a plurality of row bars, each having a plurality of aligned thin-film magnetic head elements, by adhering the first surface of each of the row bars to the UV tape.
Further, according to the present invention, a manufacturing method of a magnetic head slider includes a step of dicing an wafer on which many of thin-film magnetic head elements are fabricated to obtain a plurality of row bars each having a plurality of aligned thin-film magnetic head elements, a step of forming ABSs of magnetic head sliders on one surface of the each row bar, and the above-mentioned steps for shaping the ABS of each magnetic head slider.
Further objects and advantages of the present invention will be apparent from the following description of the preferred embodiments of the invention as illustrated in the accompanying drawings.
a and 10b show sectional views illustrating the row bar adhered on the UV tape before cutting and after cutting; and
In
As slightly exaggerated for purposes of illustration in
First, many magnetic head elements arranged in matrix are fabricated on an wafer by using a thin-film fabrication technique (step S1). This wafer process for fabricating the thin-film magnetic head elements can be performed by using various known methods.
Then, the wafer is cut into a plurality of row bars each of which has a plurality of aligned thin-film magnetic head elements (step S2).
Then, the plurality of row bars are adhered and fixed to a UV tape (step S3). This adhesion is performed by adhering a surface opposite to the ABS of the row bar to the UV tape. The UV tape has in general a three-layers structure of a base film, a UV-curing adhesive layer that will be cured by radiation of an ultra violet light and a peel-off film. As shown in
Next, the UV tape 50 with the stuck row bars 51 is attached to a fixing jig used for a laser radiation process and a cutting or dicing process (step S4).
As shown in these figures, the fixing jig 60 consists of a base frame 61 shaped in a circular loop for example, and a cover frame 62 also shaped in the circular loop and used in contact with the base frame 61. The fixing jig 60 holds or supports the UV tape 50 with the stuck row bars 51 by pinching the margins of the UV tape 50 between the base frame 61 and the cover frame 62. Thus, the row bars 51 will be tightly supported by the stretched UV tape 50.
Then, the fixing jig 60 is mounted on a laser radiation device and a laser beam is radiated to surfaces opposite to the ABSs of the row bars via the UV tape (step S5).
Any kind of laser source can be used if it is possible to partially heat and melt the rear surface of the row bar. In case that the laser beam is a spot beam with a small diameter, the laser beam will be moved to scan the row bars in longitudinal directions, lateral directions or slanting directions. In case of a relatively large diameter laser beam, these row bars will be radiated at once.
Thereafter, the fixing jig is detached from the laser radiation device and then mounted on a dicing device, so that each row bar is cut and separated into individual magnetic head sliders (step S6).
a and 10b illustrate the row bar 51 adhered on the UV tape 50.
Then, if necessary, a crown amount of each magnetic head slider is measured (step S7). The crown amount that corresponds to a height of the crest from the root of the convex shape in the ABS of the magnetic head slider will be optically measured. In order to execute this measurement, it is required that each magnetic head slider is precisely positioned on a measurement stage without inclining. In this embodiment, since all the magnetic head sliders are held in the fixing state to the UV tape, the positioning will be automatically completed and therefore extremely easy and precise measurement of the crown amount can be expected. This is in particular advantageous for a downsized magnetic head slider such as a 20% slider or a 30% slider. Also, since a crown amount of each magnetic head slider not a crown amount of each row bar can be measured, influence of a distortion that might occur during the dicing process of the row bar into the individual magnetic head sliders can be omitted from the measured amount. Furthermore, because of using of a thin UV tape with a thickness of about 100 μm, a distortion that may be produced at adhesion of the row bars to this UV tape will be absorbed by the UV tape itself and the magnetic head slider will be unaffected by the possible distortion. As a result, a flatness of the ABS will not change before and after the adhesion and thus precise crown amount can be measured.
Thereafter, an ultra violet light is radiated to the rear surface of the UV tape 50 to cure the adhesion layer of this UV tape (step S8).
Due to curing of the adhesion layer, the adhesion properties of the UV tape will be weakened, and then the magnetic head sliders 101 are detached from the UV tape 50 (step S9).
As aforementioned, according to this embodiment, since the shaping of the ABS of the row bars are executed while the row bars are adhered and held by the UV tape, no chipping of the row bars nor contamination thereof are occurred. Also, as a crown amount is measured under this state, a precise measurement can be extremely easily performed.
First, many magnetic head elements arranged in matrix are fabricated on an wafer by using a thin-film fabrication technique (step S11).
Then, the wafer is cut into a plurality of row bars each of which has a plurality of aligned thin-film magnetic head elements (step S12).
Then, the plurality of row bars are adhered and fixed to a UV tape (step S13).
Next, the UV tape 50 with the stuck row bars 51 is attached to a fixing jig used for a cutting or dicing process and a laser radiation process (step S14).
Then, the fixing jig 60 is mounted on a dicing device, so that each row bar is cut and separated into individual magnetic head sliders (step S15).
Thereafter, the fixing jig is detached from the dicing device, and then mounted on a laser radiation device. A laser beam is radiated to surfaces opposite to the ABSs of the row bars via the UV tape (step S16). By applying the laser beam to only the surface opposite to the ABS, this surface is partially and momentarily heated and melted to produce a stress in this surface only. Therefore, there occurs a difference in stresses between the opposite surface and the ABS, and then a convex shape such as convex crown and/or camber is formed in each row bar. In this embodiment, since the convex shape is formed after cutting into the individual magnetic head sliders, no deformation in crown due to a distortion that may occur during the dicing process of the row bar into the individual magnetic head sliders will be produced.
Then, if necessary, a crown amount of each magnetic head slider is measured (step S17).
Thereafter, an ultra violet light is radiated to the rear surface of the UV tape 50 to cure the adhesion layer of this UV tape (step S18).
Due to curing of the adhesion layer, the adhesion properties of the UV tape will be weakened, and then the magnetic head sliders 101 are detached from the UV tape 50 (step S19).
Another procedure in each process, operations and advantages in this embodiment are the same as those in the embodiment of
In the aforementioned embodiments, the execution order of the process of step S3 or S13 and the process of step S4 or S14 may be inversed each other, namely, row bars may be adhered to a UV tape after the UV tape is attached to a fixing jig.
Also, instead of the UV tape, any adhesive tape that passes a laser beam there through and has adhesion properties weakened by heating may be used. In this case, the similar processes except that a heating process is performed in place of the ultra violet light radiation process will be carried out and the similar advantages will be obtained.
Many widely different embodiments of the present invention may be constructed without departing from the spirit and scope of the present invention. It should be understood that the present invention is not limited to the specific embodiments described in the specification, except as defined in the appended claims.
Number | Date | Country | Kind |
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149212/2001 | May 2001 | JP | national |
Number | Date | Country | |
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Parent | 10143951 | May 2002 | US |
Child | 11028328 | Jan 2005 | US |