Number | Date | Country | Kind |
---|---|---|---|
00111617 | May 2000 | EP |
Number | Name | Date | Kind |
---|---|---|---|
3528861 | Elam et al. | Sep 1970 | A |
4152223 | Wallace et al. | May 1979 | A |
4188237 | Chasteen | Feb 1980 | A |
4585481 | Gupta et al. | Apr 1986 | A |
4743462 | Radzavich et al. | May 1988 | A |
5071486 | Chasteen | Dec 1991 | A |
5368888 | Rigney | Nov 1994 | A |
5451142 | Cetel et al. | Sep 1995 | A |
5728227 | Reverman | Mar 1998 | A |
5800695 | Kang et al. | Sep 1998 | A |
5941686 | Gupta et al. | Aug 1999 | A |
6042879 | Draghi et al. | Mar 2000 | A |
6203847 | Conner et al. | Mar 2001 | B1 |
6332926 | Pfaendtner et al. | Dec 2001 | B1 |
6339879 | Wheat et al. | Jan 2002 | B1 |
6416589 | Lipkin et al. | Jul 2002 | B1 |
Number | Date | Country |
---|---|---|
0 034 041 | Aug 1981 | EP |
1 258 545 | Nov 2002 | EP |
Entry |
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“Chemical Vapor Deposition and Related Processes”, Surface Engineering, pp. 1166-1170. |