Number | Date | Country | Kind |
---|---|---|---|
6-105116 | May 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5071488 | Takayama et al. | Dec 1991 | |
5158616 | Kinoshita et al. | Oct 1992 | |
5277715 | Cathey | Jan 1994 | |
5346556 | Perry et al. | Sep 1994 | |
5372651 | Kodama | Dec 1994 | |
5382296 | Anttila | Jan 1995 | |
5415698 | Fujinaga et al. | May 1995 |
Entry |
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Journal of the Electrochemical Society, vol. 137, No. 10, Oct. 1, 1990, Akihiro Miyauchi et al. "Low-Temperature (900.degree.C) Si Epitaxial Growth on Si (100) after HF Treatment"; pp. 3257-3260. |