Wet cleaning only

Industry

CPC
H01L21/02052

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02052Wet cleaning only

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning method of cup of substrate processing apparatus and substr...
- Patent number 12,368,041
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Motohiro Okamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device and cleaning method
- Patent number 12,343,770
- Issue date Jul 1, 2025
- Ebara Corporation
- Yuki Tanaka
- B08 - CLEANING
Information Patent Grant
Treating vessel and liquid processing apparatus
- Patent number 12,341,027
- Issue date Jun 24, 2025
- Semes Co., Ltd.
- Dae Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for retaining a processing liquid on a surface of a semicon...
- Patent number 12,288,698
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Shan Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer-type wafer cleaning device and method for controlling...
- Patent number 12,288,699
- Issue date Apr 29, 2025
- SK SILTRON CO., LTD.
- Gun Ho Lee
- B08 - CLEANING
Information Patent Grant
Core module for semiconductor production facility machinery
- Patent number 12,288,697
- Issue date Apr 29, 2025
- Brooks Automation (Germany), GMBH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning semiconductor silicon wafer and method for c...
- Patent number 12,272,542
- Issue date Apr 8, 2025
- Shin-Etsu Handotai Co., Ltd.
- Kensaku Igarashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated semiconductor packaging system with enhanced dielectric-...
- Patent number 12,272,670
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jen-Yuan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-resistance resistor based on silicon carbide and manufacturing...
- Patent number 12,268,013
- Issue date Apr 1, 2025
- Talyuan University of Technology
- Yuying Xi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for wafer bonding including edge trimming
- Patent number 12,237,165
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yung-Lung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist removal method and photoresist removal system
- Patent number 12,210,288
- Issue date Jan 28, 2025
- Tencent Technology (Shenzhen) Company Limited
- Zhongping Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gallium arsenide substrate comprising a surface oxide layer with im...
- Patent number 12,205,815
- Issue date Jan 21, 2025
- Freiberger Compound Materials GmbH
- Wolfram Fliegel
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Intelligent customizable wet processing system
- Patent number 12,198,946
- Issue date Jan 14, 2025
- Yangtze Memory Technologies Co., Ltd.
- Gonglian Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning substrates using high temperature...
- Patent number 12,186,684
- Issue date Jan 7, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Fuping Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Ultraviolet and ozone clean system
- Patent number 12,159,782
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Banqiu Wu
- B08 - CLEANING
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,159,793
- Issue date Dec 3, 2024
- Semes Co., Ltd.
- Min Hee Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of manufacture
- Patent number 12,154,784
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Yang Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated semiconductor substrate polishing and cleaning
- Patent number 12,154,810
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- ShinBae Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer and method of wafer thinning
- Patent number 12,154,783
- Issue date Nov 26, 2024
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide substrate
- Patent number 12,104,278
- Issue date Oct 1, 2024
- Sumitomo Electric Industries, Ltd.
- Tsubasa Honke
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,094,732
- Issue date Sep 17, 2024
- SCREEN Holdings Co., Ltd.
- Keisuke Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead assembly and method of servicing assembly for semiconduc...
- Patent number 12,080,545
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Wei Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wet bench structure
- Patent number 12,074,041
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide substrate
- Patent number 12,071,708
- Issue date Aug 27, 2024
- Sumitomo Electric Industries, Ltd.
- Kyoko Okita
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate cleaning solution, and using the same, method for manufac...
- Patent number 12,068,150
- Issue date Aug 20, 2024
- Merck Patent GmbH
- Takafumi Kinuta
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Apparatus and method for cleaning semiconductor wafers
- Patent number 12,068,149
- Issue date Aug 20, 2024
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon carbide substrate
- Patent number 12,031,233
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Kyoko Okita
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor wafer evaluation method and manufacturing method and...
- Patent number 12,027,428
- Issue date Jul 2, 2024
- Sumco Corporation
- Takahiro Nagasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition for surface treatment, method for producing the same, s...
- Patent number 12,012,575
- Issue date Jun 18, 2024
- FUJIMI INCORPORATED
- Keita Suzuki
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Temperature adjustment device with spacers
- Patent number 11,978,621
- Issue date May 7, 2024
- Kelk Ltd.
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED SEMICONDUCTOR PACKAGING SYSTEM WITH ENHANCED DIELECTRIC-...
- Publication number 20250233106
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Yuan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...
- Publication number 20250210347
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Zhijie Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT COMPOSITION AND METHOD FOR PRODUCING WAFER
- Publication number 20250210375
- Publication date Jun 26, 2025
- Central Glass Company, Limited
- Yuzo OKUMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE, KIT FOR PROCESSING SUBSTRATE, AND...
- Publication number 20250201546
- Publication date Jun 19, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Takumi NAMIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20250201588
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Dae-Woong CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TREATING SUBSTRATE
- Publication number 20250191904
- Publication date Jun 12, 2025
- SEMES CO., LTD.
- So Young PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE QUALITY DIFFERENTIATION
- Publication number 20250125154
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Lala Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE, AND SUBSTRATE CLEANING METHOD USING THE...
- Publication number 20250105030
- Publication date Mar 27, 2025
- Samsung Electronics Co., Ltd.
- Jieun SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250087476
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kouzou Tachibana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250062115
- Publication date Feb 20, 2025
- SCREEN Holdings Co., Ltd.
- Takashi IZUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS
- Publication number 20250062148
- Publication date Feb 20, 2025
- GLOBALWAFERS CO., LTD.
- ShinBae Park
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR WAFER AND METHOD OF WAFER THINNING
- Publication number 20250062114
- Publication date Feb 20, 2025
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. SEDDON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT IN INTEGRATED CIRCUIT PACKAGE AND METHOD
- Publication number 20250062201
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Shien Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GALLIUM ARSENIDE SINGLE CRYSTAL SUBSTRATE AND METHOD OF MANUFACTURI...
- Publication number 20240426023
- Publication date Dec 26, 2024
- Sumitomo Electric Industries, Ltd.
- Makoto KIYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING SOLUTION, METHOD FOR MANUFACTURING...
- Publication number 20240425777
- Publication date Dec 26, 2024
- Merck Patent GmbH
- KAZUMA YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE, CHEMICAL SOLUTION, AND METHOD FOR...
- Publication number 20240395538
- Publication date Nov 28, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Takumi NAMIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION AND MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT
- Publication number 20240392214
- Publication date Nov 28, 2024
- FUJIFILM CORPORATION
- Naotsugu MURO
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
- Publication number 20240395536
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Yang Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ASSEMBLY AND METHOD OF SERVICING ASSEMBLY FOR SEMICONDUC...
- Publication number 20240371626
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Wei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING IMPROVEMENT
- Publication number 20240363371
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Edward GOLUBOVSKY
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20240355614
- Publication date Oct 24, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDI...
- Publication number 20240321599
- Publication date Sep 26, 2024
- Samsung Electronics Co., Ltd.
- Hoyoung RYU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING SOLUTION AND METHOD OF CLEANING WAFER
- Publication number 20240297036
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Ren Zi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD OF CLEANING SEMICONDUCTOR WAFER AND METHOD OF MANUFACTURING...
- Publication number 20240290665
- Publication date Aug 29, 2024
- SUMCO CORPORATION
- Ryosuke TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR RETAINING A PROCESSING LIQUID ON A SURFACE OF A SEMICON...
- Publication number 20240282597
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Shan Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER CLEANING DEVICE, SEMICONDUCTOR WAFER CLEANING M...
- Publication number 20240258126
- Publication date Aug 1, 2024
- SUMCO CORPORATION
- Kaito NODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
- Publication number 20240249934
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Naomi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...
- Publication number 20240207760
- Publication date Jun 27, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Fuping Chen
- B08 - CLEANING
Information Patent Application
SEPARATION METHOD OF BONDED SUBSTRATES
- Publication number 20240194492
- Publication date Jun 13, 2024
- SKY TECH INC.
- JUNG-HUA CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240194502
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Gentaro GOSHI
- H01 - BASIC ELECTRIC ELEMENTS

Wet cleaning only

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cleaning method of cup of substrate processing apparatus and substr...

Cleaning device and cleaning method

Treating vessel and liquid processing apparatus

Methods for retaining a processing liquid on a surface of a semicon...

Single wafer-type wafer cleaning device and method for controlling...

Core module for semiconductor production facility machinery

Apparatus for cleaning semiconductor silicon wafer and method for c...

Integrated semiconductor packaging system with enhanced dielectric-...

High-resistance resistor based on silicon carbide and manufacturing...

Method for wafer bonding including edge trimming

Photoresist removal method and photoresist removal system

Gallium arsenide substrate comprising a surface oxide layer with im...

Intelligent customizable wet processing system

Method and apparatus for cleaning substrates using high temperature...

Ultraviolet and ozone clean system

Substrate treating apparatus and substrate treating method

Semiconductor devices and methods of manufacture

Automated semiconductor substrate polishing and cleaning

Semiconductor wafer and method of wafer thinning

Silicon carbide substrate

Substrate processing method and substrate processing apparatus

Showerhead assembly and method of servicing assembly for semiconduc...

Wet bench structure

Silicon carbide substrate

Substrate cleaning solution, and using the same, method for manufac...

Apparatus and method for cleaning semiconductor wafers

Silicon carbide substrate

Semiconductor wafer evaluation method and manufacturing method and...

Composition for surface treatment, method for producing the same, s...

Temperature adjustment device with spacers

Patents Applicationslast 30 patents

INTEGRATED SEMICONDUCTOR PACKAGING SYSTEM WITH ENHANCED DIELECTRIC-...

METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...

SURFACE TREATMENT COMPOSITION AND METHOD FOR PRODUCING WAFER

METHOD FOR PROCESSING SUBSTRATE, KIT FOR PROCESSING SUBSTRATE, AND...

APPARATUS AND METHOD FOR TREATING SUBSTRATE

APPARATUS AND METHOD OF TREATING SUBSTRATE

OXIDE QUALITY DIFFERENTIATION

SUBSTRATE CLEANING DEVICE, AND SUBSTRATE CLEANING METHOD USING THE...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS

SEMICONDUCTOR WAFER AND METHOD OF WAFER THINNING

SURFACE TREATMENT IN INTEGRATED CIRCUIT PACKAGE AND METHOD

GALLIUM ARSENIDE SINGLE CRYSTAL SUBSTRATE AND METHOD OF MANUFACTURI...

ELECTRONIC DEVICE MANUFACTURING SOLUTION, METHOD FOR MANUFACTURING...

METHOD FOR PROCESSING SUBSTRATE, CHEMICAL SOLUTION, AND METHOD FOR...

COMPOSITION AND MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE

SHOWERHEAD ASSEMBLY AND METHOD OF SERVICING ASSEMBLY FOR SEMICONDUC...

SUBSTRATE CLEANING IMPROVEMENT

APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR WAFERS

CHEMICAL SUPPLY APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDI...

CLEANING SOLUTION AND METHOD OF CLEANING WAFER

METHOD OF CLEANING SEMICONDUCTOR WAFER AND METHOD OF MANUFACTURING...

METHODS FOR RETAINING A PROCESSING LIQUID ON A SURFACE OF A SEMICON...

SEMICONDUCTOR WAFER CLEANING DEVICE, SEMICONDUCTOR WAFER CLEANING M...

INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...

METHOD AND APPARATUS FOR CLEANING SUBSTRATES USING HIGH TEMPERATURE...

SEPARATION METHOD OF BONDED SUBSTRATES

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD