Number | Name | Date | Kind |
---|---|---|---|
B554164 | Graul et al. | Mar 1976 | |
3485666 | Sterling et al. | Dec 1969 | |
3637423 | Sestrich | Jan 1972 | |
3652324 | Chu et al. | Mar 1972 | |
3672983 | De Witt et al. | Jun 1972 | |
3757733 | Reinburg | Sep 1973 | |
3900944 | Fuller et al. | Aug 1975 | |
3961103 | Aisenberg | Jun 1976 |
Entry |
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Hu et al., "Deposition of Silicon Nitride by RF Sputtering in Ammonia and Argon Mixture", in IBM Technical Disclosure Bulletin, vol. 10, No. 2, p. 100. |