Claims
- 1. Process for coating films, layers, tapes, plates, and similar structures of metal or plastic materials with a thin polyfluorocarbon film characterized in that no other materials are interposed; the polyfluorocarbon films are adherent and non-porous, and have controlled wettability characteristics; the polyfluorocarbons have the formula (CF.sub.x).sub.n, where x is within the range of from 0.3 to 2.0, and are obtained directly on the substrate by the plasma-polymerization of gaseous streams of C.sub.2 F.sub.6 and H.sub.2 ; or C.sub.2 F.sub.6 and C.sub.2 F.sub.4 ; or CF.sub.4 and H.sub.2 ; or CF.sub.4 and C.sub.2 F.sub.4 ; or C.sub.2 F.sub.4 ; and wherein in said process a gaseous stream of C.sub.2 F.sub.6 and H.sub.2 ; or C.sub.2 F.sub.6 and C.sub.2 F.sub.4 ; or CF.sub.4 and H.sub.2 ; or CF.sub.4 and C.sub.2 F.sub.4 ; or C.sub.2 F.sub.4 is passed through a reactor provided with two electrodes, one of which is connected to a radio frequency current generator, and the other of which is connected to ground; the substrate is placed on one of the electrodes; the pressure of the gaseous stream is within the range of from 0.1 to 2 torr; a power densitiy of at least 1 watt/cm.sup.2 is applied, the plasma being thus generated, and the consequent polymerization of the fluorocarbons being caused directly on the substrate, the temperature of which is maintained at values within the range of 20.degree. to 120.degree. C.
- 2. Process according to claim 1, characterized in that the power density is within the range of from 1 to 10 watts/cm.sup.2.
- 3. Process accoding to claim 1 or claim 2, characterized in that the two electrodes are parallel to each other.
- 4. Process according to claim 1 or claim 2, characterized in that the temperature of the substrate is maintained at values within the range of from 40.degree. to 100.degree. C.
- 5. Process according to claim 1 or claim 2, characterized in that a gaseous stream of C.sub.2 F.sub.6 and H.sub.2 is used, the percentage of H.sub.2 by volume being within the range of from 10 to 80%.
Parent Case Info
This is a division of application Ser. No. 006,173 filed Jan. 23, 1987 now U.S. Pat. No. 4,791,012.
Divisions (1)
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Number |
Date |
Country |
Parent |
6173 |
Jan 1987 |
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