Number | Date | Country | Kind |
---|---|---|---|
6-121314 | Jun 1994 | JPX |
This application is a continuation of Application No. 08/451,659, filed May 30, 1995, now abandoned.
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4441124 | Heebner et al. | Apr 1984 | |
4595289 | Feldman et al. | Jun 1986 | |
4601577 | Gotou et al. | Jul 1986 | |
4764969 | Ohtombe et al. | Aug 1988 | |
4766324 | Saadat et al. | Aug 1988 | |
4871257 | Suzuki et al. | Oct 1989 | |
5046847 | Nakata et al. | Sep 1991 | |
5117110 | Yasutake | May 1992 | |
5177559 | Batchelder et al. | Jan 1993 | |
5247186 | Toda | Sep 1993 | |
5267017 | Uritsky et al. | Nov 1993 | |
5311275 | Taniguchi et al. | May 1994 | |
5321495 | Hgiwara et al. | Jun 1994 | |
5337140 | Hagiwara et al. | Aug 1994 | |
5379347 | Kato et al. | Jan 1995 | |
5422724 | Kinney et al. | Jun 1995 |
Number | Date | Country |
---|---|---|
0 442 630 | Aug 1991 | EPX |
0 527 448 | Feb 1993 | EPX |
58-33154 | Feb 1983 | JPX |
WO8503353 | Jan 1985 | WOX |
Entry |
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"Analysis and Evaluation Technology for High Performance Semiconductor Process", edited by Semiconductor Fundamental Technology Research Society, Published by Realize Ltd., pp. 111-129 in Japanese with brief English translation, May 29, 1992. |
A. Abraitis et al., "Direct Readout Particle Detection System", IBM Technical Disclosure Bulletin, vol. 23, No. 11, Apr. 1981, pp. 4970-4971. |
H. M. Marchman et al., "Optically Guided Large-Nanostructure Probe", Review of Scientific Instruments, vol. 64, No. 5, May 1993, New York, pp. 1248-1252. |
"Analyzing and Estimating Technique for Processing High Performance Semiconductor", Ultra Clean Tech., Series No. 13, Published by Realize Co., Ltd., 1992, pp. 110-129. |
Number | Date | Country | |
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Parent | 451659 | May 1995 |