Number | Name | Date | Kind |
---|---|---|---|
4103287 | Frank | Jul 1978 | |
4295218 | Tanner | Oct 1981 | |
4736316 | Wallman | Apr 1988 | |
4755925 | Tsuchiya et al. | Jul 1988 | |
4870695 | Gonzales et al. | Sep 1989 | |
4975827 | Yonezawa | Dec 1990 | |
5130936 | Sheppard et al. | Jul 1992 | |
5155677 | Kurtzberg et al. | Oct 1992 | |
5216749 | Hamilton | Jun 1993 | |
5438527 | Feldbaumer et al. | Aug 1995 |
Entry |
---|
May and Spanos, Automated Malfunction Diagnosis of Semiconductor Fabrication Equip. A Plasma Etch Application, IEEE, Feb. 1993, vol. 6, No. 1 pp. 28-40. |