Number | Date | Country | Kind |
---|---|---|---|
51-125478 | Oct 1976 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3160539 | Hall et al. | Dec 1964 | |
3728179 | Davidson et al. | Apr 1973 | |
3738881 | Erdman et al. | Jun 1973 | |
3765969 | Kragness | Oct 1973 |
Entry |
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IBM Technical Disclosure Bulletin, vol. 16, No. 7, Dec. 1973, Process for Etching Silicon by Gaind et al., pp. 2291 and 2292. |