Chang, E. et al., "Using a Statistical Metrology Framework to Identify Systematic and Random Sources of Die- and Wafer-level ILD Thickness Variation in CMP Processes," IEEE, 1995, pp. 499-502. |
Chang, Keh-Jeng et al., "HIVE: An Efficient Interconnect Capacitance Extractor to Support Submicron Multilevel Interconnect Designs," IEEE, 1991, pp. 294-297. |
Chang, Keh-Jeng et al., "Parameterized SPICE Subcircuits for Multilevel Interconnect Modeling and Simulation," IEEE 1992 pp. 779-789. |
Chang, Keh-Jeng et al., "Nondestructive Multilevel Interconnect Parameter Characterization for High-Performance Manufacturable VLSI Technologies," 1993 Symposium on VLSI Technology Digest of Technical Papers, May 17-19, 1993, The Japan Society of Applied Physics, The IEEE Electron Devices Society, pp. 135-136. |
Schwartz, Geraldine Cogin et al., "TXRF Surface Impurity Comparison of t-DCE and TCA Oxidation," Journal of Electrochem. Soc., vol. 139, No. 12, Dec. 1992, pp.L118-L121. |
Yu, Crid et al., "Use of Short-Loop Electrical Measurements for Yield Improvement," IEEE Transactions On Semiconductor Manufacturing, vol. 8, No. 2, May, 1995, pp. 150-159. |
Rugen et al "An Interactive Layout Design System With Real-Time Logical Verification and Extraction of Layout Parasitics," IEEE, pp. 698-704, Jun. 1988. |
Chang et al "HIVE: An Express and Accurate Interconect Capacitance Extrctor for Submicron Multilevel Conductor Systems," IEEE, pp. 359-363, 1991. |
W. Meier "Hierachical Layout Verification for Submicron Designs," IEEE, pp. 382-386, 1990. |
Yehuda Shiran "YNCCdb: A New Database Representation FOF VLSI Circuits for Fast Navigation and Layout Verification Applications," IEEE, pp. 150-155, 1988. |
Belkale, K.P. et al., "Parallel Algorithms for VLSI Circuit Extraction," IEEE Trans. on CAD of Integrated Cir. & Systems, vol. 10, No. 5, May 1991, pp. 604-618. |
Chiang, Kuang-Wei, "Resistance Extraction and Resistance Calculation of GOALIE2," Proc. of the Design Auto. Conf., Las Vegas, Jun. 25-29, 1989, Paper 40.3, pp. 682-685. |
Ladage, L. et al., "Resistance Extraction and Along the Current Flow," Proc. of the Custom Integrated Circuits Conf., San Diego, May 9-12, 1993, pp. 17.5.1-17.5.4. |
Marple, David et al, "Tailor: A Layout System Based on Trapezoidal Corner Stiching," IEEE Trans. on Computer-Aided-Design of Int. Cir. and Sys., vol. 9, No. 1, Jan. 1990, pp. 66-90. |
Ramkumar, Balkrishna et al., "ProperCAD: A Portable Object-Oriented Parallel Environment for VLSI CAD," IEEE Trans. on Computer-Aided Design of Int. Cir. and Sys., vol. 13, No. 7, Jul. 1994, pp. 829-842. |
Rugen, Irmtraud et al., "An Interactive Layout Design System with Real-Time Logical Verification and Extraction of Layout Parasitics," IEEE Jor. of Solid-State Circuits, vol. 23, No. 3, Jun. 1988, pp. 66-90. |
Wang, Z. and Quiming Wu, IEEE Transactions on Computer-Aided Design, vol. 11, No. 4, Apr. 1992, "A Two-Dimensional Resistance Simulator Using the Boundary Element Method", pp. 497-504. |
Fukuda, Sanae et al., IEEE Transactions on Computer-Aided Design, vol. 9, No. 1, Jan. 1990, "A ULSI 2-D Capacitance Simulator for Complex Structures Based on Actual Processes", pp. 39-47. |
McCormick, Steven P., 21st Design Automation Conference, Paper 39.2, "EXCL: A Circuit Extractor for IC Designs", pp. 616-623 (1984). |
Stark, Don and Mark Horowitz, 24th ACM/IEEE Design Automation Conference, Paper 32.2, "REDS: Resistance Extraction for Digital Simulation", pp. 570-573 (1987). |
Horowitz, Mark and Robert W. Dutton, IEEE Transactions on Computer-Aided Design, vol. CAD-2, No. 3, Jul. 1983, "Resistance Extraction from Mask Layout Data", pp. 145-150. |
Hwang, Jerry P., 28th ACM/IEEE Design Automation Conference, Paper 41.1, "REX--A VLSI Parasitic Extraction Tool for Electromigration and Signal Analysis", pp. 717-722 (1991). |