Number | Name | Date | Kind |
---|---|---|---|
4753901 | Ellsworth et al. | Jun 1988 | A |
4810666 | Taji | Mar 1989 | A |
5241203 | Hsu et al. | Aug 1993 | A |
5401678 | Jeong et al. | Mar 1995 | A |
5559368 | Hu et al. | Sep 1996 | A |
5734192 | Sengle et al. | Mar 1998 | A |
5777370 | Omid-Zohoor et al. | Jul 1998 | A |
5831305 | Kim | Nov 1998 | A |
5956584 | Wu | Sep 1999 | A |
5998274 | Akram et al. | Dec 1999 | A |
6018180 | Cheek et al. | Jan 2000 | A |
6093628 | Lim et al. | Jul 2000 | A |
6107130 | Fulford, Jr. et al. | Aug 2000 | A |
6140168 | Tan et al. | Aug 2000 | A |
Entry |
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Stanley Wolf and Richard N. Tauber, Silicon Processing for the VLSI Era, vol. 1—Process Technology; pp. 210-226, 555-565; 1986. |
Stanley Wolf and Richard N. Tauber,Silicon Processing for the VLSI Era, Vol. 2—Process Integration; pp. 162-169; 318, 332-333, 354-361, 419-439; 1990. |
Stanley Wolf and Richard N. Tauber,Silicon Processing for the VLSI Era, vol. 3—The Submicron MOSFET; pp. 367-407, 591-660; 1995. |