Number | Date | Country | Kind |
---|---|---|---|
2-328346 | Nov 1990 | JPX | |
2-328348 | Nov 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3382568 | Kulper | May 1968 | |
3501829 | Corwin | Mar 1970 | |
3740835 | Duncan | Jun 1973 | |
3902936 | Price | Sep 1975 | |
4538344 | Okumura et al. | Sep 1985 |
Number | Date | Country |
---|---|---|
54-41871 | Dec 1979 | JPX |
Entry |
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Planarized Aluminum Metallization For Sub-0.5 .mu.m CMOS Technology, 1990 IEEE, IEDM 90, pp. 51-54, by F. S. Chen, et al. |