Number | Name | Date | Kind |
---|---|---|---|
3266961 | Emeis | Aug 1966 | |
3506509 | Kragness | Apr 1970 | |
3738881 | Erdman | Jun 1973 | |
3765969 | Kragness | Oct 1973 | |
4137123 | Barley | Jan 1979 | |
4758368 | Thompson | Jul 1988 |
Entry |
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Ghandhi, S., "VLSI Fabrication . . . ", 1983, pp. 488-489. |