Number | Date | Country | Kind |
---|---|---|---|
4-102307 | Mar 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4663643 | Mimura | May 1987 | |
4782380 | Shankar et al. | Nov 1988 | |
5081064 | Inoue et al. | Jan 1992 | |
5082801 | Nagata | Jan 1992 | |
5234864 | Kim et al. | Aug 1993 |
Number | Date | Country |
---|---|---|
2-134818 | May 1990 | JPX |
Entry |
---|
Wolf, Silicon Processing for the VLSI Era, vol. 2, Lattice Press, Sunset Beach, Calif., 1990, pp. 264, 268-272. |
Guggina, W. H., et al, "Characterization of GaAs/Al Ga As selective reactive ion etching . . . ", J. Vac. Sci. Technol. B8(6), Nov./Dec. 1990. |