Number | Name | Date | Kind |
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4919749 | Mauger et al. | Apr 1990 | |
5308442 | Taub et al. | May 1994 |
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K. E. Bean, "Anisotropic Etching of Silicon" IEEE Trans. Electron Devices, ED-25(10), 1185 (1978). |
L. Levy, "Applied Optics," John Wiley & Sons, New York, 1980, Appendix 13.2, pp. 231-233. |