Number | Date | Country | Kind |
---|---|---|---|
5-335714 | Dec 1993 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4894352 | Lane et al. | Jan 1990 | |
5271972 | Kwok et al. | Dec 1993 | |
5364666 | Williams et al. | Nov 1994 |
Entry |
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Pierson, "Handbook Of Chemical Vapor Deposition (CVD), Principles, Technology and Applications", 1992 pp. 231-234. |